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3923559 | Sinha | Dec 1975 | |
4561171 | Schlosser | Dec 1985 | |
5273920 | Kwasnick et al. | Dec 1993 | |
5364803 | Lur et al. | Nov 1994 | |
5393686 | Yeh et al. | Feb 1995 |
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0109323 | Jul 1982 | JPX |
0137218 | Aug 1983 | JPX |
Entry |
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H. Komatsu, et al., "Restraint of W--Polycide Gate Capacitance Decrease," Journal of the Japanese Society of Applied Physics, Fall 1988, p. 616. |