Number | Date | Country | Kind |
---|---|---|---|
9-023605 | Feb 1997 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4857477 | Kanamori | Aug 1989 | |
5674775 | Ho et al. | Oct 1997 | |
5795811 | Kim et al. | Aug 1998 |
Number | Date | Country |
---|---|---|
63-76330 | Apr 1988 | JPX |
1-107554 | Apr 1989 | JPX |
2174139 | Apr 1990 | JPX |
2-174139 | Jul 1990 | JPX |
7-193121 | Jul 1995 | JPX |
8-236609 | Sep 1996 | JPX |
8-274157 | Oct 1996 | JPX |
Entry |
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Perera et al., "Trench Isolation for .045 .mu. m Active Pitch and Below", IEDM Technical Digest, 1995, pp. 679-682. |