Number | Name | Date | Kind |
---|---|---|---|
4501060 | Frye et al. | Feb 1985 | |
4508757 | Fabricius et al. | Apr 1985 | |
4784970 | Solomon | Nov 1988 | |
4851366 | Blanchard | Jul 1989 | |
4971925 | Alexander et al. | Nov 1990 | |
5091330 | Cambou et al. | Feb 1992 | |
5162254 | Usui et al. | Nov 1992 | |
5183783 | Ohta et al. | Feb 1993 | |
5238865 | Eguchi | Aug 1993 | |
5268326 | Lesk et al. | Dec 1993 |
Number | Date | Country |
---|---|---|
0226166 | Sep 1989 | JPX |
0305534 | Dec 1989 | JPX |
0005545 | Jan 1990 | JPX |
0023629 | Jan 1990 | JPX |
0045953 | Feb 1990 | JPX |
0267949 | Nov 1990 | JPX |
0095912 | Apr 1991 | JPX |
0136346 | Jun 1991 | JPX |
0232239 | Oct 1991 | JPX |
0166722 | Jul 1993 | JPX |
Entry |
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Becker et al., "Low Pressure Deposition of Doped SiO.sub.2 by Pyrolysis of Tetraethylorthosilicate (TEOS)"; J. Electrochem Soc.: Solid State Science and Technology, vol. 134, No. 11, 1987, pp. 2923-2931. |
"Bonding & Etch-Back Silicon-On-Insulator" pp. 684-687, IEDM 1985. |