Number | Name | Date | Kind |
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3552071 | Albanese et al. | Jan 1971 | |
3715842 | Tredinnick et al. | Feb 1973 | |
3738881 | Erdman et al. | Jun 1973 | |
4113551 | Bassous et al. | Sep 1978 | |
4671851 | Beyer et al. | Jun 1987 | |
4889586 | Moguchi et al. | Dec 1989 | |
4892612 | Huff | Jan 1990 | |
5157876 | Medellin | Oct 1992 | |
5376222 | Miyajima et al. | Dec 1994 | |
5536202 | Appel et al. | Jul 1996 | |
5575837 | Kodama et al. | Nov 1996 | |
5637185 | Murarka et al. | Jun 1997 | |
5637513 | Sugiyama | Jun 1997 | |
5733819 | Kodama et al. | Mar 1998 | |
5759917 | Grover et al. | Jun 1998 | |
5861054 | Miyashita et al. | Jan 1999 | |
5885899 | Armocost et al. | Mar 1999 | |
5911111 | Bohr et al. | Jun 1999 |
Entry |
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Greg C. Lee et al., "An In-Depth Characterization of Dishing and Erosion During Tungsten CMP", San Jose State University, Jun. 10-12, 1997, VMIC Conference, 1997 ISMIC--107/97/0304(c), pp. 304-306. |
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