Processing chamber for manufacturing semiconductors

Information

  • Patent Grant
  • D593969
  • Patent Number
    D593,969
  • Date Filed
    Tuesday, April 10, 2007
    17 years ago
  • Date Issued
    Tuesday, June 9, 2009
    15 years ago
  • US Classifications
    Field of Search
    • US
    • D13 182
    • D06 509
    • D06 577
    • D09 456
    • D14 214
    • D14 215
    • D14 219
    • D14 471
    • D14 475
    • D14 483
    • D12 525
    • D12 538
    • D12 547
    • D12 562
    • D12 570
    • D17 24
    • 118 715000
    • 118 724000
    • 118 725000
    • 118 728000
    • 118 729000
    • 156 345240
    • 156 345510
    • 216 067000
    • 219 390000
    • 324 765000
  • International Classifications
    • 1303
    • Term of Grant
      14Years
      Disclaimer
      This patent is subject to a terminal disclaimer.
Abstract
Description


FIG. 1 is a bottom and left front perspective view of a processing chamber for manufacturing semiconductors or the like, showing my new design;



FIG. 2 is a front elevational view thereof;



FIG. 3 is a rear elevational view thereof;



FIG. 4 is a right side elevational view thereof, the left side elevational view being a mirror image of the side view shown;



FIG. 5 is a top plan view thereof;



FIG. 6 is a bottom plan view thereof;



FIG. 7 is a cross-sectional view thereof taken in the direction of the arrows on line 77 of FIG. 2; and,



FIG. 8 is a bottom and left front perspective view thereof in the state of use.


The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.


Claims
  • The ornamental design for a processing chamber for manufacturing semiconductors or the like, as shown and described.
Priority Claims (1)
Number Date Country Kind
2006-027246 Oct 2006 JP national
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7147719 Welch et al. Dec 2006 B2
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