Number | Date | Country | Kind |
---|---|---|---|
4-341419 | Nov 1992 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3657029 | Fuller | Apr 1972 | |
4970574 | Tsunenari | Nov 1990 |
Number | Date | Country |
---|---|---|
57-54364 | Mar 1982 | JPX |
4199624 | Jul 1992 | JPX |
Entry |
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"A Process for Two-Layer Gold IC Metallization", Solid State Technology, Doug Summers, Dec. 1983, Beaverton, Oregon, pp. 137-141. |
"Multilevel Gold Metallization by use of Selective W-CVD and Polymide Siloxane Film", Proceedings of 6th IEEE V-MIC Conference, K. Mikagi et al., Jun. 12-13, 1989, pp. 33-39. |
"Multilevel Gold Metallization", Proceedings of 5th IEEE V-MIC Conference, K. Haberle et al., Jun. 13-14, 1988, pp. 117-124. |