Number | Date | Country | Kind |
---|---|---|---|
8-209892 | Aug 1996 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3504961 | Hoogland et al. | Apr 1970 | |
3897138 | Kano | Jul 1975 | |
3909115 | Kano | Sep 1975 | |
4497015 | Konno et al. | Jan 1985 | |
4666273 | Shimizu et al. | May 1987 | |
4770477 | Shafer | Sep 1988 | |
4772107 | Friedman | Sep 1988 | |
4811055 | Hirose | Mar 1989 | |
4891663 | Hirose | Jan 1990 | |
4918583 | Kudo et al. | Apr 1990 | |
5105075 | Ohta et al. | Apr 1992 | |
5170207 | Tezuka et al. | Dec 1992 | |
5172275 | DeJager | Dec 1992 | |
5245384 | Mori | Sep 1993 | |
5260832 | Togino et al. | Nov 1993 | |
5448408 | Togini et al. | Sep 1995 | |
5696631 | Hoffman | Dec 1997 |
Number | Date | Country |
---|---|---|
47-7435 | Mar 1972 | JPX |
47-35017 | Sep 1972 | JPX |
55-12902 | Jan 1980 | JPX |
63-118115 | May 1988 | JPX |
5-173065 | Jul 1993 | JPX |
6-313845 | Nov 1994 | JPX |
7-140384 | Jun 1995 | JPX |
7-140385 | Jun 1995 | JPX |
Entry |
---|
Braat, "Quality of Microlithographic Projection Lenses," SPIE 811:22-30 (1987). |