The present invention will be better understood from the following detaiIed description of the preferred embodiment according to the present invention, taken inconjunction with the accompanying drawings, in which
The following description of the preferred embodiment is provided to understand the features and the structures of the present invention.
Please refer to
The present invention prepares a protective coating of a pervoskite structure on a stainless inter-connecting plate through the following steps:
(a) Deposing a stainless inter-connecting plate on a holder substrate in a vacuum chamber having a vacuity 21: A stainless interconnecting plate 1111 is deposed on a holder substrate 111 in a vacuum chamber 11 and the vacuum chamber 11 obtains a vacuity by exhausting air through a pumping device. Therein, the stainless inter-connecting plate 1111 is made of a Fe(iron)-base alloy, a Cr(chromium)-base alloy, a Ni(nickel)-base alloy or an alloy made of any combination of the above alloys. The vacuity is below 10−4 torr. The holder substrate 111 is further equipped with a heating rotator to heat and rotate the holder substrate 111. The cathode 112 is cooled down with a cooling water to absorb heat from the pervoskite structure target 15 on plasma discharging. The shielding shell 114 preserves plasma on a surface of the pervoskite structure target 15 to keep from wasting. The holder substrate 111 has a potential further added by a bias 14. The bias 14 has a voltage located between −150 volts (V) and 0V to enhance the speed and efficiency of the sputtering and forming of the protective coating. The potential of the holder substrate 111 and that of the anode 113 are ground potentials. And the molecular formula of the pervoskite structure target 15 is ABO3, where the ‘A’ is LnxE1-x; the Ln is a rare earth element; the E is an alkaline—earth metal; the x is a value greater than 0.1 and smaller than 0.9; and the B is a transition metal.
(b) Processing a DC discharge to obtain a plasma 22: After the vacuum chamber 11 obtains the default vacuity, a gas is accessed, which is argon (Ar), krypton (Kr), oxygen (O2) or a gas mixed of any combination of the above gases. A valve 115 is used to remain the vacuum chamber 11 in a pressure between 0.001 torr and 0.1 torr. The pulsed DC power supply 13 is processed with a DC discharge to obtain a plasma from the gas, where the DC discharge has a volt lower than 1000V; and the pulsed DC power supply 13 has a frequency between 0 and 350 kilo hertz (KHz). The power and time used is decided according to the state on fabricating the protective coating of a pervoskite structure.
(c) Sputtering a pervoskite structure on the stainless inter-connecting plate to form a protective coating before annealing 23: Reactive ions obtained from the plasma and the gas bombard the pervoskite structure target 15 with a field control to sputter the pervoskite structure on the stainless interconnecting plate 1111 for forming a protective coating. Then the stainless interconnecting plate 1111 having the protective coating is put in a furnace for processing an annealing to further obtain a stainless interconnecting plate 1111 having the protective coating of the pervoskite structure, where the temperature for the annealing is higher than 600 Celsius degrees (° C.).
Thus, a novel protective coating method of a pervoskite structure for SOFC interconnection is obtained.
Take fabricating a protective coating of a pervoskite structure for a stainless interconnecting plate of Crofer22, for example. The fabricating method comprises the following steps:
(a) A stainless interconnecting plate of Crofer22 having an area of 10×10 mm (millimeter) and a thickness of 5 mm is put on a holder substrate 111 in the vacuum chamber 11. Then the valve 115 is opened to exhaust gas by the pumping device to obtain a vacuity of 5×10−5 torr.
(b) A gas is accessed, which is Ar with a flow rate of 60 standard cubic centimeters per minute (sccm). The pressure in the vacuum chamber 11 is kept at 0.02 torr by using the valve 115 The cathode 112 is cooled down with a cooling water. The potentials of the holder substrate 111 is a ground potential. The distance 17 between the holder substrate 111 and the pervoskite structure target 15 is about 5 centimeters (cm). The shell of the vacuum chamber 11 is the anode 113 with a ground potential. Then the pulsed DC power supply 13 is turned on for a DC discharge between two electrodes to produce a plasma through reacting with the gas. There in, the DC discharge has a voltage of 200V; and the pulsed DC power supply has a frequency of 350KHz together with a power of 100 walts run for 2 hours.
(c) Reactive gas ions in the plasma bombard a pervoskite structure target 15 under a field control to sputter a pervoskite structure (La0.67Sr0.33MnO3, LSM) on the stainless interconnecting plate to form a protective coating. Then the stainless interconnecting plate 1111 having the protective coating is processed with four periods of one hour of annealing at 600° C., 700° C., 800° C. and 900° C. separately.
Please refer to
As a result, a protective coating of the pervoskite structure processed with one hour of annealing at 700° C. is obtained; and, as shown in
To sum up, the present invention is a protective coating method of a pervoskite structure for SOFC interconnection, where a close-grained protective coating of a pervoskite structure is formed after an annealing to a stainless interconnecting plate sputtered with a protective coating; and, by doing so, easy-fabricated and cheap stainless steel can be used as an interconnecting plate for SOFC used in a high temperature.
The preferred embodiment herein disclosed is not intended to unnecessarily limit the scope of the invention. Therefore, simple modifications or variations belonging to the equivalent of the scope of the claims and the instructions disclosed herein for a patent are all within the scope of the present invention.