Number | Date | Country | Kind |
---|---|---|---|
2-277101 | Oct 1990 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4331485 | Gat | May 1982 | |
4350537 | Young et al. | Sep 1982 | |
4482395 | Hiramoto | Nov 1984 | |
4576652 | Hovel et al. | Mar 1986 | |
4698486 | Sheets | Oct 1987 | |
4784975 | Hofmann et al. | Nov 1988 | |
4851358 | Huber | Jul 1989 | |
4868133 | Huber | Sep 1989 | |
4981815 | Kakoschke | Jan 1991 | |
5017508 | Dodt et al. | May 1991 |
Number | Date | Country |
---|---|---|
56-100451 | Aug 1981 | JPX |
58-190020 | Nov 1983 | JPX |
61-063019 | Apr 1986 | JPX |
61-260625 | Nov 1986 | JPX |
62-008519 | Jan 1987 | JPX |
62-088328 | Apr 1987 | JPX |
1-235232 | Sep 1989 | JPX |
2-33934 | Feb 1990 | JPX |
2070327 | Sep 1981 | GBX |
2179787 | Mar 1987 | GBX |
Entry |
---|
Wolf et al., "Silicon processing for the VLSI Era, vol. I: Process technology", Lattice Press, 1986 pages. |