REFERENCE SPECIMEN FOR MICROSCOPE AND MANUFACTURING METHOD THEREOF

Abstract

In a reference specimen for a microscope, for use in calibration or inspection of a microscope, having an uneven structure in which convex portions having a prescribed height or concave portions having a prescribed depth are arrayed in a prescribed cycle on a substrate surface, as a material forming the uneven structure, a hydrolytically cured product of a metal alkoxide, or a cured product of an epoxy resin or an acrylic resin is used. The fine uneven structure is manufactured in the following manner. It is transferred by pressing a master plate against a molding material coated on a substrate, and cured, followed by release.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A to 1C are Views illustrating the problems in measurement of the shape of a scanning probe microscope;

FIGS. 2A to 2D are Views illustrating steps of molding and transfer;

FIG. 3 is a perspective view showing one example of a reference specimen for measurement distance calibration of the invention; and

FIG. 4 is a perspective view showing one example of a reference specimen for probe tip inspection of the invention.

Claims

1. A reference specimen for a microscope, for use in calibration or inspection of a microscope, comprising: an uneven structure in which convex portions having a prescribed height or concave portions having a prescribed depth are arrayed in a prescribed cycle on a substrate surface;wherein a material forming the uneven structure includes a hydrolytically cured product of a metal alkoxide.

2. The reference specimen for a microscope, for use in calibration or inspection of a microscope, comprising: an uneven structure in which convex portions having a prescribed height or concave portions having a prescribed depth are arrayed in a prescribed cycle on a substrate surface;wherein a material forming the uneven structure includes a cured epoxy resin or acrylic resin.

3. The reference specimen for a microscope according to claim 1, wherein the microscope is a scanning probe microscope capable of observing an electrically insulating specimen.

4. The reference specimen for a microscope according to claim 1, wherein the uneven structure is one-dimensionally arrayed in a prescribed cycle.

5. The reference specimen for a microscope according to claim 1, wherein the prescribed height of the convex portions or the prescribed depth of the concave portions is set in the range of 10 nm or more and 2 μm or less.

6. The reference specimen for a microscope according to claim 1, wherein the region where the uneven structure is formed has an area of 3×3 mm or more.

7. A method for manufacturing a reference specimen for a microscope, for use in calibration or inspection of a microscope, including an uneven structure having a prescribed height arrayed in a prescribed cycle on a substrate surface, the method sequentially including: a coating step of coating a molding material having fluidity on a substrate, or filling and coating it in a molding die;a molding step of making the substrate and the molding die face each other across the molding material having fluidity interposed therebetween, and pressurizing them; anda curing step of applying an energy of heat or light thereto under pressure, and curing the molding material in the molding die; anda releasing step of releasing the molding die.

8. The reference specimen for a microscope according to claim 2, wherein the microscope is a scanning probe microscope capable of observing an electrically insulating specimen.

9. The reference specimen for a microscope according to claim 2, wherein the uneven structure is one-dimensionally arrayed in a prescribed cycle.

10. The reference specimen for a microscope according to claim 2, wherein the prescribed height of the convex portions or the prescribed depth of the concave portions is set in the range of 10 mm or more and 2 μm or less.

11. The reference specimen for a microscope according to claim 2, wherein the region where the uneven structure is formed has an area of 3×3 mm or more.