Calibration standards and methods of fabrication thereof

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GPHYSICS G01Measuring instruments G01QSCANNING-PROBE TECHNIQUES OR APPARATUS APPLICATIONS OF SCANNING-PROBE TECHNIQUES G01Q40/00Calibration

Current Industry

G01Q40/02Calibration standards and methods of fabrication thereof

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for calibrating nano measurement scale and standard material...
- Patent number 11,852,581
- Issue date Dec 26, 2023
- KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
- Kyung Joong Kim
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and method for a scanning probe microscope
- Patent number 11,796,563
- Issue date Oct 24, 2023
- Carl Zeiss SMT GmbH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for examining a measuring tip of a scanning pr...
- Patent number 11,680,963
- Issue date Jun 20, 2023
- Carl Zeiss SMT GmbH
- Kinga Kornilov
- G01 - MEASURING TESTING
Information Patent Grant
Reference-standard device for calibration of measurements of length...
- Patent number 11,592,289
- Issue date Feb 28, 2023
- Istituto Nazionale di Ricerca Metrologica
- Luca Boarino
- B82 - NANO-TECHNOLOGY
Information Patent Grant
System and method of performing scanning probe microscopy on a subs...
- Patent number 11,320,457
- Issue date May 3, 2022
- Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Roelof Willem Herfst
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for a scanning probe microscope
- Patent number 11,237,185
- Issue date Feb 1, 2022
- Carl Zeiss SMT GmbH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for examining a measuring tip of a scanning pr...
- Patent number 11,237,187
- Issue date Feb 1, 2022
- Carl Zeiss SMT GmbH
- Kinga Kornilov
- G01 - MEASURING TESTING
Information Patent Grant
System and method for generating and analyzing roughness measuremen...
- Patent number 10,648,801
- Issue date May 12, 2020
- Fractilia, LLC
- Chris Mack
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Non-contact velocity measurement instruments and systems, and relat...
- Patent number 10,620,100
- Issue date Apr 14, 2020
- Battelle Energy Alliance, LLC
- Jeffrey M. Lacy
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Determining interaction forces in a dynamic mode AFM during imaging
- Patent number 10,578,643
- Issue date Mar 3, 2020
- Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Hamed Sadeghian Marnani
- G01 - MEASURING TESTING
Information Patent Grant
Method of calibrating a nanometrology instrument
- Patent number 10,473,692
- Issue date Nov 12, 2019
- The Government of the United States of America, as represented by the Secreta...
- Marc Christophersen
- G01 - MEASURING TESTING
Information Patent Grant
Automatic calibration and tuning of feedback systems
- Patent number 10,444,259
- Issue date Oct 15, 2019
- Technion Research & Development Foundation Limited
- Uri Sivan
- G01 - MEASURING TESTING
Information Patent Grant
Nanometer standard prototype and method for manufacturing nanometer...
- Patent number 10,012,675
- Issue date Jul 3, 2018
- KWANSEI GAKUIN EDUCATIONAL FOUNDATION
- Tadaaki Kaneko
- C30 - CRYSTAL GROWTH
Information Patent Grant
Calibration standard with pre-determined features
- Patent number 9,797,924
- Issue date Oct 24, 2017
- Seagate Technology LLC
- Gennady Gauzner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Transferable probe tips
- Patent number 9,200,883
- Issue date Dec 1, 2015
- International Business Machines Corporation
- Paul S. Andry
- G01 - MEASURING TESTING
Information Patent Grant
Characterization structure for an atomic force microscope tip
- Patent number 8,739,310
- Issue date May 27, 2014
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Johann Foucher
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for characterizing a probe tip
- Patent number 8,650,661
- Issue date Feb 11, 2014
- Bruker Nano, Inc.
- Gregory A. Dahlen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Test surfaces useful for calibration of surface profilometers
- Patent number 8,616,044
- Issue date Dec 31, 2013
- The Regents of the University of California
- Valeriy V. Yashchuk
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Optical grid for high precision and high resolution method of wafer...
- Patent number 8,456,650
- Issue date Jun 4, 2013
- Cornell University
- Amit Lal
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and structure for characterising an atomic force microscopy tip
- Patent number 8,443,460
- Issue date May 14, 2013
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Johann Foucher
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for aligning patterns on a substrate
- Patent number 8,043,652
- Issue date Oct 25, 2011
- NanoInk, Inc.
- Raymond K. Eby
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Real-time, active picometer-scale alignment, stabilization, and reg...
- Patent number 7,928,409
- Issue date Apr 19, 2011
- The United States of America as represented by the Secretary of Commerce
- Thomas T. Perkins
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Sample holder for holding samples at pre-determined angles
- Patent number 7,895,879
- Issue date Mar 1, 2011
- International Business Machines Corporation
- James M. Robert
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of calibrating a caliper AFM
- Patent number 7,493,794
- Issue date Feb 24, 2009
- Xidex Corporation
- Vladimir Mancevski
- G01 - MEASURING TESTING
Information Patent Grant
Nanometrology device standards for scanning probe microscopes and p...
- Patent number 7,472,576
- Issue date Jan 6, 2009
- State of Oregon Acting by and Through the State Board of Higher Education on...
- Peter Moeck
- G01 - MEASURING TESTING
Information Patent Grant
Deconvolving tip artifacts using multiple scanning probes
- Patent number 7,415,868
- Issue date Aug 26, 2008
- Multiprobe, Inc.
- Casey Patrick Hare
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for aligning patterns on a substrate
- Patent number 7,279,046
- Issue date Oct 9, 2007
- Nanoink, Inc.
- Raymond K. Eby
- G01 - MEASURING TESTING
Information Patent Grant
Methods of fabricating structures for characterizing tip shape of s...
- Patent number 7,210,330
- Issue date May 1, 2007
- Veeco Instruments, Inc.
- Ami Chand
- G01 - MEASURING TESTING
Information Patent Grant
Methods of fabricating structures for characterizing tip shape of s...
- Patent number 7,096,711
- Issue date Aug 29, 2006
- Veeco Instruments Inc.
- Ami Chand
- G01 - MEASURING TESTING
Information Patent Grant
Nanolithographic calibration methods
- Patent number 7,060,977
- Issue date Jun 13, 2006
- Nanoink, Inc.
- Sylvain Cruchon Dupeyrat
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM FOR PERFORMING ATOMIC FORCE MICROSCOPY, INCLUDING A GRID PLA...
- Publication number 20240241151
- Publication date Jul 18, 2024
- Nearfield Instruments B.V.
- Hamed SADEGHIAN MARNANI
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF REMOVING DEFECT OF MASK
- Publication number 20240219826
- Publication date Jul 4, 2024
- Samsung Electronics Co., Ltd.
- Yoonki HWANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FIDUCIAL MARKER DESIGN, FIDUCIAL MARKER, SCANNING PROBE MICROSCOPY...
- Publication number 20240210443
- Publication date Jun 27, 2024
- Nearfield Instruments B.V.
- Hamed SADEGHIAN MARNANI
- G01 - MEASURING TESTING
Information Patent Application
AUTOMATED LANDING METHOD OF A SCANNING PROBE MICROSCOPY SYSTEM AND...
- Publication number 20240110939
- Publication date Apr 4, 2024
- Nearfield Instruments B.V.
- Hamed SADEGHIAN MARNANI
- G01 - MEASURING TESTING
Information Patent Application
PROBE ASSESSMENT METHOD AND SPM
- Publication number 20240069064
- Publication date Feb 29, 2024
- Shimadzu Corporation
- Hiroshi ARAI
- G01 - MEASURING TESTING
Information Patent Application
STANDARD SAMPLE AND MANUFACTURING METHOD THEREOF
- Publication number 20230228792
- Publication date Jul 20, 2023
- NTT ADVANCED TECHNOLOGY CORPORATION
- Akira KODAIRA
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR EXAMINING A MEASURING TIP OF A SCANNING PR...
- Publication number 20220107340
- Publication date Apr 7, 2022
- Carl Zeiss SMT GMBH
- Kinga Kornilov
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD OF PERFORMING SCANNING PROBE MICROSCOPY ON A SUBS...
- Publication number 20210318353
- Publication date Oct 14, 2021
- NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
- Roelof Willem HERFST
- G01 - MEASURING TESTING
Information Patent Application
REFERENCE-STANDARD DEVICE FOR CALIBRATION OF MEASUREMENTS OF LENGTH...
- Publication number 20200318957
- Publication date Oct 8, 2020
- Istituto Nazionale di Ricerca Metrologica
- Luca BOARINO
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR A SCANNING PROBE MICROSCOPE
- Publication number 20200025796
- Publication date Jan 23, 2020
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...
- Publication number 20190186909
- Publication date Jun 20, 2019
- FRACTILIA, LLC
- Chris MACK
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DETERMINING INTERACTION FORCES IN A DYNAMIC MODE AFM DURING IMAGING
- Publication number 20190025340
- Publication date Jan 24, 2019
- NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
- Hamed Sadeghian Marnani
- G01 - MEASURING TESTING
Information Patent Application
AUTOMATIC CALIBRATION AND TUNING OF FEEDBACK SYSTEMS
- Publication number 20180217180
- Publication date Aug 2, 2018
- Technion Research & Development Foundation Limited
- Uri SIVAN
- G01 - MEASURING TESTING
Information Patent Application
NON-CONTACT VELOCITY MEASUREMENT INSTRUMENTS AND SYSTEMS, AND RELAT...
- Publication number 20180031459
- Publication date Feb 1, 2018
- Battelle Energy Alliance, LLC
- Jeffrey M. Lacy
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CALIBRATION STANDARD WITH PRE-DETERMINED FEATURES
- Publication number 20160069929
- Publication date Mar 10, 2016
- SEAGATE TECHNOLOGY LLC
- Gennady Gauzner
- G01 - MEASURING TESTING
Information Patent Application
NANOMETER STANDARD PROTOTYPE AND METHOD FOR MANUFACTURING NANOMETER...
- Publication number 20140317791
- Publication date Oct 23, 2014
- KWANSEI GAKUIN EDUCATIONAL FOUNDATION
- Tadaaki Kaneko
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARACTERIZATION STRUCTURE FOR AN ATOMIC FORCE MICROSCOPE TIP
- Publication number 20130291236
- Publication date Oct 31, 2013
- Johann Foucher
- B82 - NANO-TECHNOLOGY
Information Patent Application
Transferable Probe Tips
- Publication number 20120279287
- Publication date Nov 8, 2012
- International Business Machines Corporation
- Paul S. Andry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL GRID FOR HIGH PRECISION AND HIGH RESOLUTION METHOD OF WAFER...
- Publication number 20110249275
- Publication date Oct 13, 2011
- Amit Lal
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND STRUCTURE FOR CHARACTERISING AN ATOMIC FORCE MICROSCOPY TIP
- Publication number 20110093990
- Publication date Apr 21, 2011
- Commissariat a I'Energie Atomique et aux Energies Alternatives
- Johann FOUCHER
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Characterizing a Probe Tip
- Publication number 20100313312
- Publication date Dec 9, 2010
- VEECO INSTRUMENTS INC.
- Gregory Dahlen
- G01 - MEASURING TESTING
Information Patent Application
Real-time, active picometer-scale alignment, stabilization, and reg...
- Publication number 20100257641
- Publication date Oct 7, 2010
- The U.S.A., as represented by the Secretary of Commerce, The Ntl. Inst. of St...
- Thomas T. Perkins
- G01 - MEASURING TESTING
Information Patent Application
Test Surfaces Useful for Calibration of Surface Profilometers
- Publication number 20100037674
- Publication date Feb 18, 2010
- The Regents of the University of California
- Valeriy V. Yashchuk
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method using a disk drive slider and/or a peltier pla...
- Publication number 20090151434
- Publication date Jun 18, 2009
- SAMSUNG ELECTRONICS CO., LTD.
- Dongman Kim
- G01 - MEASURING TESTING
Information Patent Application
SAMPLE HOLDER FOR HOLDING SAMPLES AT PRE-DETERMINED ANGLES
- Publication number 20090145247
- Publication date Jun 11, 2009
- International Business Machine Corporation
- James M. Robert
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
ATOMIC FORCE MICROSCOPE TIP SHAPE DETERMINATION TOOL
- Publication number 20090106868
- Publication date Apr 23, 2009
- COMMISSARIAT A L'ENRGIE ATOMIQUE
- Johann Foucher
- G01 - MEASURING TESTING
Information Patent Application
Scanning probe microscopy inspection and modification system
- Publication number 20080315092
- Publication date Dec 25, 2008
- General Nanotechnology LLC
- Victor B. Kley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR ALIGNING PATTERNS ON A SUBSTRATE
- Publication number 20080147346
- Publication date Jun 19, 2008
- Nanolnk, Inc.
- Raymond K. Eby
- G01 - MEASURING TESTING
Information Patent Application
Caliper method, system, and apparatus
- Publication number 20080078229
- Publication date Apr 3, 2008
- Vladimir Mancevski
- G01 - MEASURING TESTING
Information Patent Application
Electron microscope and scanning probe microscope calibration device
- Publication number 20080067370
- Publication date Mar 20, 2008
- John Patrick McCaffrey
- G01 - MEASURING TESTING

Calibration standards and methods of fabrication thereof

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for calibrating nano measurement scale and standard material...

Apparatus and method for a scanning probe microscope

Method and apparatus for examining a measuring tip of a scanning pr...

Reference-standard device for calibration of measurements of length...

System and method of performing scanning probe microscopy on a subs...

Apparatus and method for a scanning probe microscope

Method and apparatus for examining a measuring tip of a scanning pr...

System and method for generating and analyzing roughness measuremen...

Non-contact velocity measurement instruments and systems, and relat...

Determining interaction forces in a dynamic mode AFM during imaging

Method of calibrating a nanometrology instrument

Automatic calibration and tuning of feedback systems

Nanometer standard prototype and method for manufacturing nanometer...

Calibration standard with pre-determined features

Transferable probe tips

Characterization structure for an atomic force microscope tip

Method and apparatus for characterizing a probe tip

Test surfaces useful for calibration of surface profilometers

Optical grid for high precision and high resolution method of wafer...

Method and structure for characterising an atomic force microscopy tip

Method and apparatus for aligning patterns on a substrate

Real-time, active picometer-scale alignment, stabilization, and reg...

Sample holder for holding samples at pre-determined angles

Method of calibrating a caliper AFM

Nanometrology device standards for scanning probe microscopes and p...

Deconvolving tip artifacts using multiple scanning probes

Method and apparatus for aligning patterns on a substrate

Methods of fabricating structures for characterizing tip shape of s...

Methods of fabricating structures for characterizing tip shape of s...

Nanolithographic calibration methods

Patents Applicationslast 30 patents

SYSTEM FOR PERFORMING ATOMIC FORCE MICROSCOPY, INCLUDING A GRID PLA...

METHOD OF REMOVING DEFECT OF MASK

FIDUCIAL MARKER DESIGN, FIDUCIAL MARKER, SCANNING PROBE MICROSCOPY...

AUTOMATED LANDING METHOD OF A SCANNING PROBE MICROSCOPY SYSTEM AND...

PROBE ASSESSMENT METHOD AND SPM

STANDARD SAMPLE AND MANUFACTURING METHOD THEREOF

METHOD AND APPARATUS FOR EXAMINING A MEASURING TIP OF A SCANNING PR...

SYSTEM AND METHOD OF PERFORMING SCANNING PROBE MICROSCOPY ON A SUBS...

REFERENCE-STANDARD DEVICE FOR CALIBRATION OF MEASUREMENTS OF LENGTH...

APPARATUS AND METHOD FOR A SCANNING PROBE MICROSCOPE

SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...

DETERMINING INTERACTION FORCES IN A DYNAMIC MODE AFM DURING IMAGING

AUTOMATIC CALIBRATION AND TUNING OF FEEDBACK SYSTEMS

NON-CONTACT VELOCITY MEASUREMENT INSTRUMENTS AND SYSTEMS, AND RELAT...

CALIBRATION STANDARD WITH PRE-DETERMINED FEATURES

NANOMETER STANDARD PROTOTYPE AND METHOD FOR MANUFACTURING NANOMETER...

CHARACTERIZATION STRUCTURE FOR AN ATOMIC FORCE MICROSCOPE TIP

Transferable Probe Tips

OPTICAL GRID FOR HIGH PRECISION AND HIGH RESOLUTION METHOD OF WAFER...

METHOD AND STRUCTURE FOR CHARACTERISING AN ATOMIC FORCE MICROSCOPY TIP

Method and Apparatus for Characterizing a Probe Tip

Real-time, active picometer-scale alignment, stabilization, and reg...

Test Surfaces Useful for Calibration of Surface Profilometers

Apparatus and method using a disk drive slider and/or a peltier pla...

SAMPLE HOLDER FOR HOLDING SAMPLES AT PRE-DETERMINED ANGLES

ATOMIC FORCE MICROSCOPE TIP SHAPE DETERMINATION TOOL

Scanning probe microscopy inspection and modification system

METHOD AND APPARATUS FOR ALIGNING PATTERNS ON A SUBSTRATE

Caliper method, system, and apparatus

Electron microscope and scanning probe microscope calibration device