Number | Name | Date | Kind |
---|---|---|---|
3229511 | Rossire | Jan 1966 | |
3421594 | Hino | Jan 1969 | |
3423597 | Delp | Jan 1969 | |
3805907 | Knothe et al. | Apr 1974 | |
3913563 | Ball | Oct 1975 | |
4070661 | Marko | Jan 1978 | |
4275599 | Kohlenberger et al. | Jun 1981 | |
4393713 | Guillemot | Jul 1983 | |
4451730 | Brogardh et al. | May 1984 | |
4625819 | O'Neill | Dec 1986 | |
4626680 | Martens et al. | Dec 1986 |
Entry |
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R. Michael Madden, Ph.D., "Silicon Position Sensing Detectors for Precision Measurement and Control," SPIE vol. 153, Advances in Optical Metrology (1978), pp. 101-107. |