Ring for a plasma processing apparatus

Information

  • Patent Grant
  • D891636
  • Patent Number
    D891,636
  • Date Filed
    Wednesday, April 24, 2019
    5 years ago
  • Date Issued
    Tuesday, July 28, 2020
    3 years ago
  • US Classifications
    Field of Search
    • US
    • D24 104
    • D24 1106
    • D24 113
    • D24 129
    • D24 144
    • D24 193
    • D24 197
    • D24 206
    • D24 216
    • D24 224
    • D23 200
    • D23 213
    • D23 214
    • D23 215
    • CPC
    • H01L21/3065
    • H01L21/31116
    • H01L21/67069
    • H01L21/6831
    • H01L21/68785
    • H01J37/32642
    • H01J37/32715
  • International Classifications
    • 2402
    • Term of Grant
      15Years
Abstract
Description


FIG. 1 is a front, bottom and right side perspective view of a ring for a plasma processing apparatus according to the design;



FIG. 2 is a front elevational view thereof;



FIG. 3 is a left side elevational view thereof;



FIG. 4 is a right side elevational view thereof;



FIG. 5 is a top plan view thereof;



FIG. 6 is a bottom plan view thereof;



FIG. 7 is a rear elevational view thereof;



FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 2; and,



FIG. 9 is an enlarged view of the portion shown in BOX 9 in FIG. 8.


The box labelled as 9 in FIG. 8 is shown in broken lines and forms no part of the claimed design.


Claims
  • The ornamental design for a ring for a plasma processing apparatus, as shown and described.
Priority Claims (1)
Number Date Country Kind
2018-023399 Oct 2018 JP national
US Referenced Citations (13)
Number Name Date Kind
D694790 Matsumoto et al. Dec 2013 S
D694791 Matsumoto et al. Dec 2013 S
D697038 Matsumoto et al. Jan 2014 S
8703249 Tong Apr 2014 B2
9123661 Kellogg Sep 2015 B2
9165812 Ouye Oct 2015 B2
D802790 Tauchi Nov 2017 S
D810705 Krishnan Feb 2018 S
D836573 Ichino Dec 2018 S
10170283 Kubota Jan 2019 B2
D840365 Ichino Feb 2019 S
D871608 Okuda Dec 2019 S
D871609 Isozaki Dec 2019 S