The invention relates to electrostatic discharge (ESD) protection of integrated circuits, and more particularly, to a robust ESD protection circuit, method, and design structure for tolerant and failsafe designs.
An electrostatic discharge (ESD) event may cause extremely high currents to flow through the semiconductor devices in a chip, causing device junctions, gate oxides, and other adjacent structures to be permanently damaged. Conventional methods and structures may be used to provide ESD protection during chip manufacture, including during various fabrication, testing, and packaging steps. However, ESD protection in high voltage applications, such as for example, in the user environment and field use, is still an issue of concern.
With the shrinking of device size through technology scaling, it becomes increasingly more challenging to achieve adequate protection against electrostatic discharge (ESD) for CMOS integrated circuits. Technology scaling has brought with it very low breakdown voltages in CMOS circuits. For example, in the 90 nm node, these breakdown voltages fall below 10V for transient stresses of short duration as it typically occurs in a Charged Device Model (CDM) discharge. At the same time, advances in IC technology have increased the circuit density which has led to a corresponding increase in the number of pads for off-chip connections, i.e., for chip input/outputs (I/Os) and for supplying power and ground to the chip.
Moreover, while gate oxide is getting thinner and more difficult to protect, the compatibility requirement to legacy devices remains unchanged. This limits the design window to an even smaller range. Compatibility with legacy devices requires that chips utilizing current technology offerings (e.g., 2.5V devices) communicate with older chips that use older technology (e.g., 5V devices).
In general, newer, lower-voltage ESD NFETs can no be used to protect older, higher voltage tolerant or fail-safe I/O designs. In such cases, stacked NFETs are required to make legacy-compatible designs while handling the higher voltage across the device to be protected. However, the practice of stacking 2.5V ESD NFETs to handle 5V operations (e.g., when interacting with legacy devices) suffers from reliability problems and insufficient ESD protection levels. Moreover, traditional silicided NFETs are not robust against ESD discharge and require significantly more chip area on resistance ballasting in order to handle the ESD current safely. As such, backward-compatibility (e.g., 5V-tolerant I/Os) and ESD-ruggedness in consumer electronics requires new solutions for designs manufactured in sub-micron technologies.
Accordingly, there exists a need in the art to overcome the deficiencies and limitations described hereinabove.
In an aspect of the invention, a circuit comprises a middle junction control circuit that turns off a top NFET of a stacked NFET electrostatic discharge (ESD) protection circuit during an ESD event.
In another aspect of the invention, a circuit comprises a stacked NFET ESD protection circuit comprising a top NFET and a bottom NFET arranged in series between an I/O pad and ground. A middle junction control circuit is also used to turn off the top NFET during an ESD event.
In another aspect of the invention, a method of providing electrostatic discharge protection, comprising during an ESD event, turning off a top NFET of a stacked NFET ESD protection circuit by biasing a middle junction between the top NFET and a bottom NFET to substantially a same voltage as a gate of the top NFET.
In another aspect of the invention, a design structure embodied in a machine readable medium for designing, manufacturing, or testing an integrated circuit is provided. The design structure comprises the structures and/or methods of the present invention.
The present invention is described in the detailed description which follows, in reference to the noted plurality of drawings by way of non-limiting examples of exemplary embodiments of the present invention.
The invention relates to ESD protection of integrated circuits, and more particularly, to robust 2.5V ESD protection structures and methods for 5V-tolerant and failsafe designs. In embodiments, a middle junction control circuit is provided to control the state of at least one MOSFET of a stacked MOSFET protection circuit during an ESD event. Particularly, during normal operation (e.g., operation other than during an ESD event), the middle junction control circuit permits the top MOSFET (e.g., the MOSFET closer to the pad) to be at a potential close to digital Vdd (e.g., DVdd) and permits the bottom MOSFET (e.g., the MOSFET closer to ground) to be tied to ground. On the other hand, during an ESD event, the middle junction control circuit causes the top gate to be tuned off, thereby providing enhanced ESD performance. Optionally, the middle junction control circuit may also control the bottom gate during an ESD event to be partially turned on, which further enhances ESD performance for the stacked gate circuit. Additionally, one or more diodes may be provided in the middle junction control circuit to fine tune the voltage supplied during an ESD event. In this manner, implementations of the invention provide enhanced ESD performance for stacked MOSFET protection circuits.
As depicted in
The gate-silicided (GS) structure depicted in
It has been recognized that there are disadvantageous trade-offs between ESD performance and device speed in chips having implementations of the configurations shown in
The test circuit 100 also includes a voltage divider 150 comprising a first resistor 155 having a resistance value of R1, and a second resistor 160 having a resistance of R2. The test circuit 100 also includes a switch 165. The voltage divider 150 and switch 165 operate to apply a portion of the pad voltage (e.g., VPAD) to a respective one of the NFETs 125 (or 130), while the other respective one of the NFETs 130 (or 125) is tied to ground. For example, the voltage applied to one of the gates is equal to the pad voltage multiplied by R2/(R1+R2), while the other gate is tied to ground. By applying a test Human Body Model (HBM) voltage to the pad 115, the test circuit 100 can be used to evaluate the effect of controlling the respective on/off state of the NFETs 125, 130 on the ESD performance of the circuit.
The first data plot 185 corresponds to the bottom gate (e.g., bottom NFET 130) being grounded, while the top gate (e.g., top NFET 125) sees a portion of the pad voltage (VPAD). So, for example, as indicated by data point 185a, the test circuit 100 failed at a pad voltage of about 2500V when the bottom gate was grounded and the top gate saw 0% of the pad voltage. Also, as indicated by data point 185b, the test circuit 100 failed at about 3700V when the bottom gate was grounded and the top gate saw about 50% of the pad voltage. Additionally, as indicated by data point 185c, the test circuit 100 failed at about 1000V when the bottom gate was grounded and the top gate saw about 100% of the pad voltage.
The second data plot 190 corresponds to the top gate (e.g., top NFET 125) being grounded, while a portion of the pad voltage (VPAD) is applied to the bottom gate (e.g., bottom NFET 130). So, for example, as indicated by data point 190a, the test circuit 100 failed at a pad voltage of about 2500V when the top gate was grounded and the bottom gate saw 0% of the pad voltage. Also, as indicated by data point 190b, the test circuit 100 failed at about 3900V when the top gate was grounded and the bottom gate saw about 25% of the pad voltage. Additionally, as indicated by data point 190c, the test circuit 100 failed at about 4000V when the top gate was grounded and the bottom gate saw about 75% of the pad voltage.
From the experimental data shown in
In embodiments, the middle junction control circuit 250 comprises a connection to Vdd (e.g., an internal logic power supply, analog Vdd, etc.) and DVdd (e.g., an digital I/O connection power supply.). In accordance with aspects of the invention, the Vdd net voltage may be used to determine when an ESD event is occurring. For example, during an ESD discharge to the PAD pin, Vdd typically has a value of zero (e.g., low, ground, etc.), while during normal operation Vdd typically has a value of high (e.g., nominal voltage for the device). In embodiments, a level shifter (not shown) may be used to adjust the level of Vdd relative to DVdd. The use of a level shifter is known in the art such that further explanation is not believed necessary.
In accordance with aspects of the invention, the middle junction control circuit 250 comprises an inverter 265. In embodiments, the Vdd voltage is applied to the input of the inverter 265. The inverter 265 comprises, for example, an NFET 270 and a PFET 275. The output of the inverter 265 is applied to a gate of a control switch 280. In embodiments, the control switch 280 is an NFET that closes when a high voltage (e.g., nominal voltage) is applied to the gate of the control switch 280, and opens when a low voltage (e.g., zero) is applied to the gate of the control switch 280. An input of the control switch 280 is tied to DVdd, while an output of the control switch 280 is connected to the middle junction 285 located between the top NFET 225 and bottom NFET 230 of the protection circuit 200. Accordingly, when the control switch 280 is closed, the middle junction 285 is biased to DVdd. In embodiments, the middle junction 285 is electrically connected to the source connection 290 of the top NFET 225, and DVdd is connected to the gate 295 of the top NFET 225.
In operation, during an ESD event the DVdd net is partially charged up from a diodes and/or parasitic capacitance. As the value of Vdd is low (e.g., zero) during an ESD event, the input of the inverter is also low, which results in the output of the inverter 265 being high, which closes the control switch 280. When the control switch 280 is closed, the middle junction 285 (and, therefore, the top NFET source connection 290) is biased to substantially the same voltage (e.g., DVdd) as the top NFET gate 295. This turns off the top NFET 225, which is the preferred state according to the data in
On the other hand, during normal operation (e.g., not during an ESD event), the value of Vdd is high (e.g., nominal voltage), which causes the output of the inverter 265 to be low (e.g., zero), which opens the control switch 280. With the control switch 280 open, the middle junction control circuit 250 does not bias the middle junction 285. Instead, during normal operation, the middle junction 285 is permitted to float (e.g., is not biased to DVdd by the middle junction control circuit 250). Also during normal operation, the gate of the top NFET 225 is biased to DVdd, while the bottom NFET 240 is tied to ground 220.
In embodiments, one or more diodes 300 may be inserted between the DVdd source and the middle junction control circuit 250, as depicted in
Accordingly, when Vdd is low during an ESD event, the output of the inverter 265 is high, which closes switches 280 and 305. When control switch 280 is closed, the middle junction 285 is biased to the same voltage (e.g., DVdd) as the gate of the top NFET 225, thereby turning off the top NFET 225. Moreover, when switch 305 is closed, DVdd is applied to the gate of the bottom NFET 230, thereby turning on the bottom NFET 230. In this manner, the middle junction control circuit 250′ operates to turn off the top NFET 225 and turn on the bottom NFET 230 during an ESD event, which is the preferred state during an ESD event according to
Implementations of the method may be used to provide a robust 2.5V ESD protection circuit for 5V tolerant and failsafe designs. Implementations of the invention may be used to improve the HBM ESD protection level up to 2500V for 5V-tolerant/fail-safe I/Os. Also, implementations can be used for both self-protected and non-self-protected I/O output configurations. Furthermore, embodiments provide the enhanced ESD performance without the need for an additional silicide-block region between gates of the stack device, thereby providing a smaller foot print and I/O size. Still further, embodiments can be implemented without additional process changes (e.g., without the need for extra masks, additional doping, etc.). Moreover, the tunable control voltage, via optional diodes, permits use in other output configurations.
Design process 910 preferably employs and incorporates hardware and/or software modules for synthesizing, translating, or otherwise processing a design/simulation functional equivalent of the components, circuits, devices, or logic structures shown in
Design process 910 may include hardware and software modules for processing a variety of input data structure types including netlist 980. Such data structure types may reside, for example, within library elements 930 and include a set of commonly used elements, circuits, and devices, including models, layouts, and symbolic representations, for a given manufacturing technology (e.g., different technology nodes, 32 nm, 45 nm, 90 nm, etc.). The data structure types may further include design specifications 940, characterization data 950, verification data 960, design rules 970, and test data files 985 which may include input test patterns, output test results, and other testing information. Design process 910 may further include, for example, standard mechanical design processes such as stress analysis, thermal analysis, mechanical event simulation, process simulation for operations such as casting, molding, and die press forming, etc. One of ordinary skill in the art of mechanical design can appreciate the extent of possible mechanical design tools and applications used in design process 910 without deviating from the scope and spirit of the invention. Design process 910 may also include modules for performing standard circuit design processes such as timing analysis, verification, design rule checking, place and route operations, etc.
Design process 910 employs and incorporates logic and physical design tools such as HDL compilers and simulation model build tools to process design structure 920 together with some or all of the depicted supporting data structures along with any additional mechanical design or data (if applicable), to generate a second design structure 990. Design structure 990 resides on a storage medium or programmable gate array in a data format used for the exchange of data of mechanical devices and structures (e.g. information stored in a IGES, DXF, Parasolid XT, JT, DRG, or any other suitable format for storing or rendering such mechanical design structures). Similar to design structure 920, design structure 990 preferably comprises one or more files, data structures, or other computer-encoded data or instructions that reside on transmission or data storage media and that when processed by an ECAD system generate a logically or otherwise functionally equivalent form of one or more of the embodiments of the invention shown in
Design structure 990 may also employ a data format used for the exchange of layout data of integrated circuits and/or symbolic data format (e.g. information stored in a GDSII (GDS2), GL1, OASIS, map files, or any other suitable format for storing such design data structures). Design structure 990 may comprise information such as, for example, symbolic data, map files, test data files, design content files, manufacturing data, layout parameters, wires, levels of metal, vias, shapes, data for routing through the manufacturing line, and any other data required by a manufacturer or other designer/developer to produce a device or structure as described above and shown in
The methods and/or design structure as described above is used in the fabrication of integrated circuit chips. The resulting integrated circuit chips can be distributed by the fabricator in raw wafer form (that is, as a single wafer that has multiple unpackaged chips), as a bare die, or in a packaged form. In the latter case the chip is mounted in a single chip package (such as a plastic carrier, with leads that are affixed to a motherboard or other higher level carrier) or in a multichip package (such as a ceramic carrier that has either or both surface interconnections or buried interconnections). In any case the chip is then integrated with other chips, discrete circuit elements, and/or other signal processing devices as part of either (a) an intermediate product, such as a motherboard, or (b) an end product. The end product can be any product that includes integrated circuit chips.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms “a”, “an” and “the” are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms “comprises” and/or “comprising,” when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
The corresponding structures, materials, acts, and equivalents of all means or step plus function elements, if any, in the claims below are intended to include any structure, material, or act for performing the function in combination with other claimed elements as specifically claimed. The description of the present invention has been presented for purposes of illustration and description, but is not intended to be exhaustive or limited to the invention in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the invention. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, and to enable others of ordinary skill in the art to understand the invention for various embodiments with various modifications as are suited to the particular use contemplated.
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