Number | Date | Country | Kind |
---|---|---|---|
4032559 | Oct 1990 | DEX |
Number | Name | Date | Kind |
---|---|---|---|
4654663 | Alsenz et al. | Mar 1987 | |
4744248 | Stewart | May 1988 | |
4836023 | Oikawa | Jun 1989 |
Entry |
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William C. Tang, Tu-Cuong H. Nguyen, and Roger T. Howe, "Laterally Driven Polysilicon Resonant Microstructures", IEEE 1989, pp. 53-59. |
W. Kern, "Chemical Etching of Silicon, Germanium, Gallium Arsenide & Gallium Phosphide" RCA Review, vol. 39, Jun. 1978, pp. 278-308. |