SBIR Phase I: A Detector for Co-Axial Micro-focused Ion Beams for Detection of Backscattered Ions and Secondary Electrons from semi-conducting surfaces

Information

• NSF Award
• 0912355

Owner

• IONWERKS, INC

• Award Id

  0912355

• Award Effective Date

  7/1/2009 - 16 years ago

• Award Expiration Date

  12/31/2009 - 15 years ago

• Award Amount

  $ 99,949.00

• Award Instrument

  Standard Grant

This Small Business Innovation Research Phase I project is to develop a secondary electron detector which can be co-axially mounted with a micro-focused ion beam. Backscattered neutral atoms (and ions) and secondary electrons will be analyzed to give a measure both of surface element location and identity. <br/><br/>This detector will enable unique types of secondary ion mass spectrometry. The electrons and negative backscattered ions can be energy and time analyzed to give a spatially resolved elemental image of the surface under examination. Beam damage is greatly reduced compared to secondary electron microscopy allowing its use on biological samples.<br/><br/>This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5).

• Program Officer

  Ben Schrag

• Min Amd Letter Date

  6/1/2009 - 16 years ago

• Max Amd Letter Date

  6/1/2009 - 16 years ago

• ARRA Amount

  99949

• Name

  IONWERKS, INC

• City

  HOUSTON

• State

  TX

• Country

  United States

• Address

  3401 Louisiana St.

• Postal Code

  770029556

• Phone Number

  7135229880

• First Name

  Kelley

• Last Name

  Waters

• Email Address

  kelldawg@ionwerks.com

• Start Date

  6/1/2009 12:00:00 AM

• Name

  Industrial Technology

• Code

  308000