Femtosecond micromachining for inducing refractive index (RI) or phase change in hydrogel-based materials and other ophthalmic materials.
Femtosecond micromachining has been utilized to create highly localized microscopic structures inside materials, including three-dimensional microfabrication within silica glasses, buried tubular waveguides written in bulk poly(methyl methacrylate), and channel waveguides or diffraction gratings formed in cross-linkable PMMA-based copolymers, owing to its unique characteristics, such as rapid and precise energy deposition into the materials, elimination of thermal diffusion to the surrounding area, structural modification within the focal volume, and etcetera. Over the last decade, this technique has been applied to alter the optical properties of ophthalmic materials, such as hydrogel-based contact lenses, intra-ocular lenses (IOL), and cornea tissues, by creating different refractive index shaping structures. Gandara-Montano et al. successfully wrote arbitrary Zernike polynomials in hydrogel-based contact lenses. A phase-wrapped lens was written directly inside an IOL to alter the hydrophilicity of targeted areas, and also high-quality gradient-index (GRIN) Fresnel lenses with wide power range from −3.0 to +1.5 diopters were written in plano contact lens materials. NIR/Blue femtosecond lasers have been used for noninvasive Intra-Tissue Refractive Index Shaping (IRIS) inside corneal tissue and even in the eyes of living cats.
There are many factors that can determine the effectiveness of a laser-induced refractive index change (LIRIC), including both material properties and laser exposure parameters. Material properties including chemical composition, water content, dopant type or dopant concentration have been studied so as to extend the limit of maximum achievable refractive index change.
The Raman spectrum signature arising from O—H stretching vibration of water centered at 3420 cm−1 shows that larger phase change is associated with higher water content in the modified region and the lower refractive index of water compared to the studied hydrogels may account for the negative phase change induced in the laser-treated area. The function of water in the femtosecond micromachining process has been considered as increasing the heat-induced breakdown threshold due to the high heat capacity, slowing down the heat dissipation from the laser-treated area into the surrounding due to low heat diffusivity, or facilitating the photo-induced hydrolysis of polymeric materials in aqueous media.
As for the chemical composition needed for at least some femtosecond writings, there are two active components, a dopant and a quencher, to increase the energy deposited via nonlinear absorption and to transfer the energy absorbed for the chemical reaction to take place. Doped hydrogels have been reported to produce much larger RI change than undoped hydrogels because of enhanced nonlinearity absorption coefficient.
Apart from material properties, the induced RI change is also highly dependent on the system parameters and the effects of many system parameters, such as the scan speed, the laser average power, the numerical aperture (NA), the pulse width, the laser beam wavelength, and the number of layers written in the same area. Many of these parameters have been widely studied so as to optimize the femtosecond micromachining process. It has been reported that larger refractive index change can be induced in hydrogel polymers with a lower scan speed, a higher average power, and a shorter laser wavelength.
While progress has been made in the past studying factors that impact the effectiveness of the laser-induced refractive index change (LIRIC) in some materials, there remains room for improvement.
This patent describes systems and methods for optimizing manufacturing processes utilizing laser-induced refractive index changes, such as changes induced in ophthalmic materials by femtosecond laser micromachining. Applications of the techniques described in this patent include LIRIC customization of contact lenses, intra-ocular lenses (ex-vivo), and other ophthalmic materials.
This patent also describes a photochemical model that we have developed for LIRIC that can be used to design commercial scale LIRIC manufacturing systems and methods. We have tested our photochemical model in two-photon mode for blue writing in hydrogels and four-photon mode with 1035 nm writing in hydrogels. As just one example, our model predicts very fast writing with green 517 nm up to 3.7 m/sec demonstrated with 500 mw at 10 MHz.
One example of a method for designing a laser writing system for modifying a plurality of ophthalmic devices includes the steps of: (a) determining at least one material characteristic of the ophthalmic devices, determined over a range of laser writing system parameters; (b) determining at least one design characteristic of the ophthalmic device; and (c) using at least the determined material and design characteristics, configuring at least one system parameter of the laser writing system to optimize throughput of the laser writing system, the laser writing system including: (i) a laser configured to generate a laser beam, (ii) a splitter configured to split the laser beam into a plurality of outputs, and (iii) a plurality of writing heads, each writing head configured to direct at least one of the outputs to an ophthalmic device to write one or more localized refractive index modifications into the ophthalmic device.
In some instances, the at least one material characteristic includes a damage threshold for an induced single layer optical phase shift of the ophthalmic device; and the at least one design characteristic includes a maximum phase shift designed for the ophthalmic device.
In some instances, the at least one material characteristic includes at least a first damage threshold for an induced single layer optical phase shift of the ophthalmic device at a first laser repetition rate, and a second damage threshold for an induced single layer optical phase shift of the ophthalmic device at a second laser repetition rate.
In some instances, the range of laser writing system parameters used for determining the at least one material characteristic includes at least one of a power range, a scan speed range, a laser repetition rate range, and a range of focusing lens numerical aperture.
In some instances, the range of laser writing system parameters used for determining the at least one material characteristic includes at least two of the power range, the scan speed range, the laser repetition rate range, and the focusing lens numerical aperture.
In some instances, the determined material characteristics also include at least one fitting parameter of a quantitative model relating an induced phase shift in the ophthalmic device to a configuration of the laser writing system.
In some instances, the determined material characteristics also include a multiphoton order of the quantitative model.
In some instances, the quantitative model is a two photon regime model such as:
in which Δϕ is a single layer written phase shift, P is an average power, NA is a numerical aperture, ν is a laser repetition rate, λ is a laser wavelength, S is a scan speed, π is a pulse duration, and β is the fitting parameter.
In some instances, the quantitative model is a three photon regime model such as:
in which Δϕ is a single layer written phase shift, P is an average power, NA is a numerical aperture, ν is a laser repetition rate, λ is a laser wavelength, S is a scan speed, π is a pulse duration, and γ is the fitting parameter.
In some instances, the quantitative model is a four photon regime model such as:
in which Δϕ is a written single layer phase shift, P is an average power, NA is a numerical aperture, ν is a laser repetition rate, λ is a laser wavelength, S is a scan speed, π is a pulse duration, and γ is the fitting parameter.
In some instances, the quantitative model also includes a saturation factor.
In some instances, the quantitative model is an Nth photon regime model such as:
in which Δϕ is a single layer written phase shift, P is an average power, NA is a numerical aperture, ν is a laser repetition rate, λ is a laser wavelength, S is a scan speed, π is a pulse duration, and γ is the fitting parameter.
In some instances, the multiphoton order of the quantitative model is a two photon regime, a three photon regime, or a four photon regime.
In some instances, the quantitative model comprises a sum of a plurality of multi-photon regime models.
In some instances, the quantitative model is:
in which Δϕ is a single layer written phase shift, P is an average power, NA is a numerical aperture, ν is a laser repetition rate, λ is a laser wavelength, S is a scan speed, π is a pulse duration, β is a second order fitting parameter, γ is a third order fitting parameter, and δ is a fourth order fitting parameter.
In some instances, optimizing throughput of the laser writing system includes determining an optimal number of writing layers for modifying the ophthalmic devices in combination with an optimal number of writing heads of the laser writing system for optimizing throughput of the laser writing system.
In some instances, optimizing throughput of the laser writing system includes determining at least one of an optimal laser repetition rate, laser wavelength, laser pulsewidth, and scan speed for optimizing throughput of the laser writing system.
In some instances, determining the at least one material characteristic of the ophthalmic devices includes determining the at least one material characteristic over a first range of laser writing system parameters and a second range of laser writing system parameters, the first and second ranges including at least one different laser repetition rate parameter, laser wavelength parameter, laser pulsewidth parameter, and scan speed parameter.
In some instances, the design method also includes determining a line spacing characteristic of the ophthalmic device.
One example of a laser writing system for modifying a plurality of ophthalmic devices, includes: (a) a laser configured to generate a laser beam, (b) a splitter configured to split the laser beam into a plurality of outputs, and (c) a plurality of writing heads, each writing head configured to direct at least one of the outputs to an ophthalmic device to write one or more localized refractive index modifications into the ophthalmic device; in which the laser writing system is configured in accordance with the method described above.
In some instances, the laser is configured to generate a pulsed laser beam having a pulsewidth less than 350 femtoseconds and a repetition rate between 1 and 60 MHz.
In some instances, the laser is configured to generate a pulsed laser beam having a wavelength in the range of 340 nm to 1100 nm.
In some instances, the laser is configured to generate a pulsed laser beam having a wavelength in the range of 515 nm to 520 nm, or 1030 nm to 1040 nm, or 400 nm to 410 nm, or 795 nm to 805 nm.
In some instances, the splitter is configured to split the laser beam into 2 to 64 outputs.
In some instances, the ophthalmic devices are contact lenses or intraocular lenses, or hydrogel corneal implants.
One example of a method of using a laser writing system for writing localized refractive index changes into ophthalmic devices includes providing a laser writing system as described above configured in accordance with a method described above, and (a) generating a pulsed laser beam in the laser writing system; (b) splitting the pulsed laser beam into a plurality of outputs, at least some of the outputs each associated with a writing head in the laser writing system; and (c) at each writing head, scanning the pulsed laser beam relative to an ophthalmic device to write one or more refractive index changes into the ophthalmic device.
One example of a method of using a particular laser writing system for writing localized refractive index changes into particular ophthalmic devices includes: (a) generating a pulsed laser beam having a wavelength in the range of 1030 nm to 1040 nm, a pulsewidth less than 350 femtoseconds, and a repetition rate less than 20 MHz; (b) splitting the pulsed laser beam into a plurality of outputs, at least some of the outputs each associated with a writing head; (c) at each writing head, scanning the pulsed laser beam relative to an ophthalmic device to write one or more refractive index changes into the ophthalmic device, wherein the laser writing system is configured such that it is capable of inducing a single writing layer phase shift of at least 0.3 waves at an average power at the writing head of less than 1500 mW and a scan speed greater than 100 mm/s.
In some instances, the ophthalmic device is a hydrogel material having a four photon absorption parameter in the range of 1e-59 m6·waves/(W4·s) to 3e-59 m6·waves/(W4·s) in the equation:
in which Δϕ is a written single layer phase shift, P is an average power of the pulsed laser beam at the writing head, NA is a numerical aperture of the writing head, ν is a laser repetition rate, λ is a laser wavelength, S is a scan speed, π is a laser pulse duration, and γ is the four photon absorption parameter.
The following detailed description sets out examples of LIRIC writing systems and methods for ophthalmic materials, as well as techniques using our photochemical models for improving LIRIC manufacturing systems and methods. The specific examples described below are for illustrative purposes only, and are not intended to limit the scope of our inventions. Changes could be made to the systems, methods, and techniques described below without departing from the scope or spirit of our inventions.
In some of the examples described in this patent, in order to enhance the feasibility and practicability of the femtosecond micromachining in vision correction, we rely on the laser pulse repetition rate to reduce the average power and to enhance the scan speed needed for inducing detectable refractive index (RI) change inside ophthalmic materials. There are several research groups that have reported the effect of the repetition rate on the microstructure formation inside fused silica and metals with the range of Hz and KHz. Most of the studies are focused on the effect of repetition rate on ablation efficiency, laser drilling of metals, defects formation, or surface texture of the laser induced microstructures. A comparison between kilohertz and megahertz laser systems made by Reichman et al. showed that megahertz repetition rate modification resulted in better quality waveguides with a greater refractive index increase than kilohertz repetition rate modification. However, to our best knowledge, no studies so far have illustrated the effect of repetition rate on the RI change induced by femtosecond micromachining in hydrogel-based polymers.
The typical repetition rate currently used in femtosecond micromachining hydrogel polymers is larger than 80 MHz. However, prior to our investigation, it has not been investigated whether the high repetition rate (>80 MHz) is the optimal repetition rate for writing ophthalmic materials without inflicting any optical damage. Given the same single pulse energy, the accumulated temperature rise induced by a high-repetition-rate pulse train is higher than a low-repetition-rate pulse train, indicating that the high repetition rate of the pulse train should be able to induce larger refractive index change if we assume a pyrolytic degradation of polymers. However, we have considered the possibility that the laser-induced RI change results from a combination of both thermal-induced decomposition process and direct photochemical changes made by the nonlinear multiphoton absorption process. Although the accumulated thermal effect might be more significant in high repetition rate region, the photon energy that can be absorbed by the material is diminished due to a smaller single pulse energy for the same amount of average power; on the other hand, the low-repetition-rate pulses may easily reach the optical breakdown threshold and cause gross damage at smaller average power due to a larger single pulse energy. Therefore, we investigated the effect of repetition rate on both the induced RI change and the optical damage threshold. As part of our investigation, we discovered that the optimal repetition rate can be taken advantage of to reduce the amount of power required and speed up the femtosecond machining process.
In the following sub-sections, we present both the qualitative and quantitative experimental results showing how the repetition rate affects the magnitude of the induced phase change, which is related to RI change via the following equation,
where Δϕ is the magnitude of the induced phase change in number of waves and measured at a specific reference wavelength (e.g. in this example at λ=543 nm), Δn is the induced average RI change, and L is the longitudinal thickness of the laser induced region. Grating lines were written in hydrogel-based contact lenses at two different repetition rates, 15 MHz and 60 MHz, to show that the great discrepancy between low repetition rate modification and high repetition rate modification can be easily visualized from the differential interference contrast (DIC) images. More systematic quantitative results were obtained by fabricating continuous phase shifting bars at four different repetition rates, 5 MHz, 10 MHz, 15 MHz and 60 MHz. A calibration function is derived from a photochemical model by associating the induced phase change with the molecular density changes due to the multiphoton absorption process and a pulse overlapping effect. The coefficients in the calibration function are fitted by the least square method. Single pulse energy damage threshold as a function of repetition rate was also investigated so as to determine the maximum achievable phase change just below the material damage threshold and to obtain the dynamic range for the writing process.
1. Experimental Setup
The system configuration used for our experiment is depicted in
2. Experimental Results
In order to illustrate the effect of repetition rates on the induced phase change, we conducted both qualitative and quantitative experiments at different repetition rates, with different powers and different scan speeds. Samples used in our qualitative experiments are hydrogel-based contact lenses (Acuvue2, Johnson & Johnson) made of a soft hydrophilic material known as “etafilcon A”, a copolymer of 2-hydroxyethyl methacrylate and methacrylic acid cross-linked with 1,1,1-trimethylol propane trimethacrylate and ethylene glycol dimethacrylate. Periodic grating structures were fabricated ˜50 μm below the top surface of a contact lens using a raster scanning method.
More systematic experiments were performed to generate quantitative results. We inscribed phase bars instead of grating lines inside a Acuvue J+J contact lens with +4 diopters and a base curvature of 8.7 mm. The travel distance of the 2D linear stage is still set to be 20 mm so as to keep the scan speed constant at 200 mm/s inside the sample. Each phase bar is made up of 30 grating lines separated by 1 μm, which is smaller than the focused spot size, thus creating a continuous phase carpet of dimensions 30 μm by 20 mm. As shown in
3. Quantitative Photochemical Model of Phase Changes
To map out the induced phase change at different repetition rates, the power tested started from a small value at which a small phase change can be measured by the MZI and ended at a value where the sample damage occurs. The scanning pattern was the rectangular loop scanning and the writing speed was fixed at 200 mm/s. Two materials were laser-treated for collecting quantitative data at four different repetition rates, 5 MHz, 10 MHz, 15 MHz and 60 MHz. One of the materials is an Acuvue J+J Contact lens as described in the previous section and the other one is a plano hydrogel sample named Contaflex GM Advance 58 (Contamac Inc.), which is made of “Acofilcon A”, a synonym for “2-Butenedioic acid (2Z)-, di-2-propenyl ester, polymer with 2,3-Dihydroxypropyl 2-methyl-2-propenoate, 1-Ethenyl-2-pyrrolidinone, 2-Hydroxyethyl 2-methyl-2-propenoate and Methyl 2-methyl-2-propenoate”. The magnitude of the measured phase change at four repetition rates as a function of average power and single pulse energy is shown respectively in
The fitting curves are derived from a photochemical model involving multiphoton absorption process and overwriting factor. RI change is assumed to be induced by the density change of polymer matrix in the excitation volume through multiphoton absorption. In our specific case where near infrared light at 1035 nm was used, a four photon absorption process was expected to occur during the writing process due to a strong UV linear absorption cut off wavelength around 300 nm. Then the excited molecular density change D can be expressed in the following form assuming a small absorption limit for simplicity,
where ε is a material constant for relating the deposited energy to the molecule density change, E is the single pulse energy absorbed by the material, VOL is the light-matter interaction volume, β is the fourth photon absorption coefficient, IPeak is the peak pulse intensity and L is the longitudinal thickness of the interaction region. Apart from the four photon absorption process, accumulation effect originating from pulse overlapping should also be considered. The overwriting of spots can be accounted for as the spot size divided by the spacing between the spots by assuming a uniform (‘top-hat’) beam profile, denoted as for simplicity,
where ω is the diffraction limited laser spot size inside the material, ν is the pulse repetition rate and S is the scan speed. Eq. (3) represents the number of pulses per spot and the detailed illustration about the intersection of displaced laser pulses can be found in other research work. Therefore, the number of pulses per spot can be calculated based on Eq. (3) to be ˜18, ˜35, ˜53 and ˜210 at 5 MHz, 10 MHz, 15 MHz and 60 MHz, respectively.
Following Eq. (2) and Eq. (3), the overall excited molecule density change can be expressed as the product of the molecule density change caused by a single pulse times the overlapping effect N. After mathematica manipulation and expressing the single pulse energy in terms of average power and repetition rate, we are able to propose the final result of the phase change equation,
where P is the average power, NA is the numerical aperture, π is the pulse duration. Parameter γ is a constant which contains the fourth photon absorption coefficient and associates the absorbed energy with the phase change. It can be determined by using a least square fitting method. Results show the fitting curve matches the experimental results well for the three low repetition rates but there is a deviation at 60 MHz between the experimental data and the fitting curve. The fitting parameter is found to be γ=2.82e-59 m6·waves/(W4·s) for J+J contact lenses and γ=1.33e-59 m6·waves/(W4·s) for Contaflex samples. The results may suggest that the fourth photon absorption rate or the ability of transferring the absorbed energy to induce RI change of Contaflex samples is smaller than that of J+J contact lenses. Therefore, it may be considered to add dopants into the Contaflex samples to increase absorption cross section or add quenchers to enhance the energy conversion efficiency.
Several conclusions can be drawn from
4. Empirical Model of Phase Changes
As shown in
Other than the reduced nonlinearity order at high number of pulses due to color center formation, the deviation at 60 MHz could be attributed to a much higher accumulated temperature rise achieved inside the material after a high-repetition-rate laser exposure. The heat accumulation effect may play a more significant role at a high repetition rate domain and induce the phase change via a distinct photothermal effect which has a power dependency different from that of a photochemical effect. A third explanation for the deviation at 60 MHz could be a saturation effect at high intensities since we noticed the induced phase change cannot increase infinitively and tends to be saturated when the induced phase change reaches a high value. If the saturation factor is not introduced into the theoretical model, the fitting results would be higher than experimental results as the power and repetition rates increase. Therefore, a saturation factor can be incorporated into the photochemical model for the purpose of a better fitting. The saturation factor can be inserted under the material constants if we assume there is a possible limit on the finite number of available molecules, or the capability of the material to redirect the absorbed energy to induce phase change is limited or the depolymerization process is balanced by a recombination effect. On the other hand, the saturation factor can also be attached to the fourth photon absorption coefficient by analogy with the decreasing nonlinear absorption coefficient measured at high laser intensity. We then propose the modified photochemical model can be expressed in the following form by employing a classic saturation factor,
where Δϕ is a small signal induced phase change expressed in Eq. (4) and we tried to express A as the induced phase change, the excited molecular density, the average power/intensity, or the peak intensity. The best fitting results for all the repetition rates from 5 MHz to 60 MHz were obtained by denoting A as the average power/intensity and yielded a coefficient of determination R2 greater than 95% for J+J contact lenses and greater than 97% for Contaflex sample at all four repetition rates. However, the modified photochemical model does not work well at 60 MHz when A represents other parameters, including the induced phase change, the excited molecular density, and the peak intensity.
The exact mechanism associating the absorbed pulse energy to RI change is still controversial and could be subject to further investigation. The accumulated pulse energy absorbed by the material via multiphoton absorption can excite electrons to a high electronic state to induce direct bond dissociation or the absorbed energy can be transferred from electrons to lattice to heat the polymer matrix and induce subsequent pyrolysis of the polymer. Depolymerization, either a photolysis reaction or a thermal-driven process, usually increases polymer chain volume by random chain scission and direct bond breaking, thus causing monomer formation, internal tensile stress propagation and volume expansion which is confirmed by the shift of the molecular weight to a lower value and the broadening of the polymer molecular weight distribution. After the decomposition of polymer into smaller monomers or oligomers, we assume these smaller fragments may diffuse out from the laser-irradiated area into the surrounding and water molecules can then occupy the empty expanded area due to enhanced hydrolysis, thus resulting in an increasing water content in the laser treated area. Therefore, the negative sign of induced phase/RI change might be attributed to a lower refractive index of water than the sample itself and a reduced polymer density due to hydrodynamic expansion. One potential avenue for further research involves taking advantage of Raman spectroscopy to gain insight into the chemical composition change in the laser-irradiated area and then determine whether the RI change in hydrogel polymers arises from a thermal-induced decomposition process via non-radiative decay or a direct chemical bond breaking procedure via multiphoton ionization or a combined photothermal and photochemical effect.
5. Effect of Repetition Rate on Femtosecond Micromachining Process
The effect of repetition rate has been demonstrated to play an important role in femtosecond micromachining process. The same amount of phase change can be achieved at a lower average power and a faster scan speed by taking advantage of low repetition rate pulses while the damage threshold in terms of single pulse energy maintains almost the same for all the tested repetition rates. Based on both the qualitative and quantitative results, we are able to conclude that the induced phase change depends on the amount of pulse energy absorbed by the material via both the multiphoton absorption and the overlapping effect induced by adjacent pulses. In order to fit the experimental data, we developed a calibration function based on a photochemical model. The induced phase change scales as the power to the fourth order as a consequence of four photon nonlinear absorption at 1035 nm. The optimal repetition rate for femtosecond micromachining contact lenses seems to be around 15 MHz for at least some manufacturing processes, for the reason that the maximum achievable phase change just below the damage is a little bit lower than that obtained at 60 MHz but the average power required is roughly 3 times smaller.
6. Two Photon and Other Models
The above discussion is presented in the context of a four photon regime. For other systems and materials, a two photon regime may be the more appropriate photochemical model, and the following phase change equation may be utilized:
where P is the average power, NA is the numerical aperture, and π is the pulse duration. Parameter β is a constant which contains the second photon absorption coefficient and associates the absorbed energy with the phase change.
As a general matter, in at least some instances, a two photon model such as the one in eq. (6) may be more appropriate for relatively higher energy writing and a four photon model such as the one in eq. (4) may be more appropriate for relatively lower energy writing. In some instances, the slope of a fitting line in a plot of phase shift versus power on log-log scales may indicate whether a two photon or four photon model is more appropriate. For example the slopes of the lines in
For some systems and materials, a three or other photon model may be most appropriate, and for a general condition a sum of two-photon, three photon and four photon effects may be most appropriate. For a three photon regime, the following phase change equation may be utilized:
where P is the average power, NA is the numerical aperture, and π is the pulse duration. Parameter γ is a constant which contains the third photon absorption coefficient and associates the absorbed energy with the phase change.
For an Nth photon regime, the following phase change equation may be utilized:
where P is the average power, NA is the numerical aperture, and π is the pulse duration. Parameter γ is a constant which contains the Nth photon absorption coefficient and associates the absorbed energy with the phase change.
For a general condition including a sum of two-photon, three-photon, and four-photon effects, the following phase change equation may be utilized:
where P is the average power, NA is the numerical aperture, and π is the pulse duration. In this instance, parameters β, γ, and δ are constants which contain the second, third, and fourth photon absorption coefficients respectively.
Scalable Manufacturing with LIRIC
Using the information derived from the photochemical models and experiments discussed above, including information about the maximum phase shift obtainable in a given material at applicable scanning speeds, numerical apertures, and repetition rates, commercial scale LIRIC systems and methods with optimal throughput and other efficiencies can be designed and implemented.
Various lasers may be used for the writing system. Non-limiting examples include short pulsed lasers (such as femtosecond lasers with a pulsewidth less than 350 fs and a repetition rate (tunable or fixed repetition rate) in the range of 1 to 60 MHz), operating in the range of 340 nm to 1100 nm (e.g. near 405 nm, 517 nm, 800 nm, or 1035 nm).
Returning to
The scanning and delivery subsystem may deliver short laser pulses of sufficient energy (e.g. above a minimal threshold but below a damage threshold, as shown in
The writing system may be utilized to create lenses or other optical constructs in the interior of the material. For example,
Using the information derived from the photochemical models discussed above, manufacturing systems like the one of
1. Laser Specifications
Laser specification inputs may include, without limitation, average laser power, pulsewidth, wavelength, repetition rate, lens NA numerical aperture, system power throughput, and number of device writing heads. Example pulsewidths include femtosecond scale pulsewidths, and, in some examples, pulsewidths less than 350 fs. Example repetition rates include repetition rates in the range of 1-60 MHz. Example wavelengths include wavelengths in the range of 340 nm to 1100 nm, including wavelengths near 405 nm, 517 nm, 800 nm, and 1035 nm. Example lens NA include NA's between 0.19 and 1.0.
2. Scanner Specifications
Scanner specifications inputs may include, without limitation, maximum scanning speed, slow axis resolution (line spacing), turnaround (blanking) time, full field size, and scan pattern (e.g. raster, box, spiral, etc.). Example scanning speeds include speeds in the range from 1 mm/sec to 10 meters/sec.
3. Material Characteristics
Material characteristic inputs may include, without limitation, non-linear absorption coefficient of the material (such as one or more of the 2nd order limit, 4th order limit, and mixed 2nd through 4th order terms), as well as the maximum phase shift obtainable (determined at applicable scanning speeds, numerical apertures, repetition rates, or other factors).
In one example, a first step to determining material characteristics is to measure written phase shifts in the material of interest as a function of, for example, average power and scan speed. Phase vs. power can be plotted on log-log scales to determine slope of nonlinear processes in small signal regime (below saturation). The determined slope may be indicative of the applicable photochemical model for the material of interest (e.g. a slope close to 2 may be indicative of a two photon model, a slope close to 4 may be indicative of a four photon model, etc.). The applicable photochemical models (e.g. the two and/or four photon regime models identified above) may be fit to the data, and a maximum phase shift just below the damage threshold may be identified. This information may be subsequently used to establish a range of writing powers at desired scan speeds. It is noted that, while the best results for at least some systems and methods are obtained when the one-photon absorption is minimized, a small amount of one-photon absorption is tolerable even in those instances.
A specific example in the two photon regime is provided at
4. Device Design Details
Device design inputs may include, without limitation, diameter of the optical device to be written, the line spacing required (e.g. to ensure smooth phase shifts that produce no diffraction spots), and details impacting on the maximum phase shift required for the device (e.g. the phase wrapping profile, intended optical power, etc.).
5. Scan Layers Required
The number of scan layers required for the LIRIC process will impact on the time required to write the device. The number of scan layers required is a function of both the maximum phase shift required by the device's specification and the maximum phase shift produced in the device material at the relevant laser and scanner parameters. The number of layers required is the max phase shift required for the device divided by the max phase shift produced in the device material at the relevant laser and scanner parameters.
6. Estimated Writing Time
Estimated writing time for a device is a function of how many layers need to be written, as well as several other variables, including device width or diameter, line spacing, number of lines (device width divided by line spacing), scan speed, and scanner efficiency (to account for dead time). Time to write a device can be estimated by,
in which W is device width in mm, Nines is the number of lines, S is the scan speed in mm/s, and η is scanner efficiency.
7. Number of Writing Heads
The number of writing heads that can be incorporated into the multi-head writing system is a function of the laser's maximum power, the maximum power required to write a one layer phase shift in the device, and a system loss factor (typically about 50%). Number of writing heads that could be supported by the system can be estimated by,
N
heads=(Pmax*F)/Pmax-phaseshift (11)
in which Pmax is the laser's maximum power, Pmax-phaseshift is the maximum power required to write a one layer phase shift in the device, and F is the system loss factor. As one example, for a 517 nm laser with a maximum power of 10 W, a 50% system loss factor, and a 0.5 W per device requirement to achieve a single layer max phase-shift, it is estimated that the system could support 10 heads with one single laser source.
8. LIRIC Optimization for Multi-Head Writing Systems
We have discovered that laser repetition rate can have a surprisingly significant impact on several aspects of the LIRIC writing process. Surprisingly, relatively low repetition rates can be used to achieve significant phase changes at relatively low power requirements. This can be visualized, for example, using
Taking into account these factors, as well as other factors in the LIRIC writing process discussed above, can allow for optimization of manufacturing throughput. One example is presented below in table 1, which assumes a LIRIC process utilizing a 30 W, 1035 nm laser having the same average power at all repetition rates, with the system having a 50% system loss and being used to manufacture a device requiring a max phase shift of 1 wave.
As can be seen from table 1, the 5 MHz process could power over 30 writing heads, 8.25 times as many as the 60 MHz process can power. However, the trade off is that the 5 MHz process would require three times the number of layers to be written as the 60 MHz process, roughly tripling the writing time required for each device. In this simple example, although it would require three times the number of layers to be written, the much larger number of writing heads supportable by the 5 MHz process would result in that system having a throughput of 2.75× greater than the 60 MHz process.
This invention was made with government support under IIP: 1549700 awarded by the National Science Foundation. The government has certain rights in the invention.
Filing Document | Filing Date | Country | Kind |
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PCT/US2019/061451 | 11/14/2019 | WO | 00 |
Number | Date | Country | |
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62768387 | Nov 2018 | US |