Number | Name | Date | Kind |
---|---|---|---|
3598997 | Baertsch | Aug 1971 | |
4316209 | Ho et al. | Feb 1982 | |
4356622 | Widmann | Nov 1982 | |
4638551 | Einthoven | Jan 1987 | |
4675715 | Lepselter et al. | Jun 1987 |
Entry |
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"Refractory silicides for integrated circuits" by Murarka, J. Vac Sci Technol., vol 17, No. 4, Jul./Aug. 1980. |