SEAL RETAINER FOR A COMPONENT ASSEMBLY AND METHOD OF INSTALLING A COMPONENT INTO AN APPARATUS FOR CONTROLLING FLOW

Abstract

Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow require a variety of fluid flow components which are tightly packaged within the apparatuses for controlling flow. Servicing the apparatuses requires specialized equipment and methods which enable installation of seals in close quarters in apparatuses which are installed in the field. Seal retainers may be used to retain the seals during assembly of fluid flow components into apparatus for controlling flow.

Description

Claims

1. A seal retainer for retaining a seal, the seal retainer comprising: a sheet body, the sheet body comprising: a first axis;a second axis perpendicular to the first axis;a first portion, the first axis coplanar with the first portion, the first portion elongate in a direction of the first axis and extending from the second axis along the first axis;a second portion, the second portion extending along the second axis and having a seal retaining feature.

2. The seal retainer of claim 1 wherein the first portion comprises a first perimeter edge, a second perimeter edge opposite the first perimeter edge, a third perimeter edge, and a fourth edge opposite the third perimeter edge, the fourth edge being collinear with the second axis.

3. The seal retainer of claim 1 wherein the first portion comprises a plurality of circular apertures which form a gripping feature.

4. The seal retainer of claim 1 wherein the first portion comprises a plurality of elongate apertures separated by a tab portion, the tab portion having a distal edge connected to an internal edge of the first portion, and wherein the distal edge of the tab portion is connected to the internal edge of the first portion by a frangible zone.

5. The seal retainer of claim 1 wherein the second portion is elongate along the second axis.

6. The seal retainer of claim 1 wherein the seal retaining feature of the second portion is a seal retaining aperture, and wherein the seal retaining aperture is circular.

7. The seal retainer of claim 6 wherein the second portion comprises a frangible zone adjacent the seal retaining aperture.

8. The seal retainer of claim 1 wherein a frangible zone is located between the seal retaining feature and a perimeter edge of the sheet body.

9. The seal retainer of claim 1 wherein the second portion comprises a frangible zone, the frangible zone comprising a slot.

10. The seal retainer of claim 9 wherein the slot extends from the seal retaining feature.

11. The seal retainer of claim 9 wherein the seal retaining feature comprises a center point, the slot extending radially from the center point to a perimeter edge of the sheet body.

12. The seal retainer of claim 1 wherein the second portion comprises a frangible zone and the sheet body comprises a perimeter edge, the frangible zone positioned at a location where a distance between the seal retaining feature and the perimeter edge is smallest.

13. The seal retainer of claim 1 wherein the second portion comprises a fastener engagement feature.

14. The seal retainer of claim 13 wherein the fastener engagement feature forms a portion of a perimeter edge of the sheet body.

15. The seal retainer of claim 1 wherein, in a folded state, the second portion is angled with respect to the first axis and wherein, in a flat state, the second portion is coplanar with the first axis.

16. A fluid flow component assembly, the fluid flow component assembly comprising: a fluid flow component comprising a first seal cavity;an alignment feature in contact with the fluid flow component;a first seal configured to engage the first seal cavity;a first seal retainer configured to engage the first seal and the alignment feature of the fluid flow component;wherein the first seal is assembled to the first seal retainer, the first seal in contact with the first seal cavity.

17. The component assembly of claim 16 wherein the first seal retainer has a circular seal retaining aperture configured to engage a cylindrical outer surface of the first seal.

18. The component assembly of claim 16 wherein the first seal retainer has a fastener engagement feature, wherein the fastener engagement feature comprises a frangible zone.

19. The component assembly of claim 16 wherein the first seal retainer is formed of a sheet material.

20. A seal retainer for retaining a seal, the seal retainer comprising: a sheet body, the sheet body comprising: a first portion extending along a first axis, the first portion being elongate in a direction of the first axis and extending from the second axis;a second portion extending along a second axis, the second axis being perpendicular to the first axis, the second portion extending along the second axis; anda seal retaining feature formed into the second portion.