Apparatus for fluid treatment

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CPC
H01L21/67017

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67017Apparatus for fluid treatment

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 12,224,185
- Issue date Feb 11, 2025
- Kokusai Electric Corporation
- Hideharu Itatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Guided flow valve assembly and system incorporating same
- Patent number 12,222,039
- Issue date Feb 11, 2025
- ICHOR SYSTEMS, INC.
- Stephen Carson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Assembly chamber for self-assembly of semiconductor light-emitting...
- Patent number 12,211,951
- Issue date Jan 28, 2025
- LG Electronics Inc.
- Inbum Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load lock device
- Patent number 12,211,735
- Issue date Jan 28, 2025
- Canon Anelva Corporation
- Jun Miura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid control device, fluid supply system, and fluid supply method
- Patent number 12,209,679
- Issue date Jan 28, 2025
- Fujikin Incorporated
- Masahiko Takimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Concentration control using a bubbler
- Patent number 12,209,310
- Issue date Jan 28, 2025
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing chamber deposition confinement
- Patent number 12,211,673
- Issue date Jan 28, 2025
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,211,708
- Issue date Jan 28, 2025
- SCREEN Holdings Co., Ltd.
- Shuichi Yasuda
- B08 - CLEANING
Information Patent Grant
Baking apparatus
- Patent number 12,211,711
- Issue date Jan 28, 2025
- Samsung Electronics Co., Ltd.
- Bumjin Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and non-tr...
- Patent number 12,202,016
- Issue date Jan 21, 2025
- Tokyo Electron Limited
- Yuki Ito
- B08 - CLEANING
Information Patent Grant
Equipment front end module
- Patent number 12,201,995
- Issue date Jan 21, 2025
- Sinfonia Technology Co., Ltd.
- Toshihiro Kawai
- B08 - CLEANING
Information Patent Grant
Temperature change rate control device, method, and semiconductor p...
- Patent number 12,205,836
- Issue date Jan 21, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Hongwei Geng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Airborne contaminant management method and system
- Patent number 12,202,015
- Issue date Jan 21, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Ming Tsao
- B08 - CLEANING
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,198,929
- Issue date Jan 14, 2025
- Kokusai Electric Corporation
- Hiroshi Ashihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,195,853
- Issue date Jan 14, 2025
- Kokusai Electric Corporation
- Motonari Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Member for semiconductor manufacturing apparatus, method for manufa...
- Patent number 12,198,965
- Issue date Jan 14, 2025
- NGK Insulators, Ltd.
- Kazuhiro Nobori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, process fluid treating apparatus, a...
- Patent number 12,198,943
- Issue date Jan 14, 2025
- Semes Co. Ltd
- Junhee Youn
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Grant
High pressure wafer processing systems and related methods
- Patent number 12,198,951
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Qiwei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature adjustment apparatus for high temperature oven
- Patent number 12,188,661
- Issue date Jan 7, 2025
- Yi-Ming Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing chamber, substrate processing system including...
- Patent number 12,191,190
- Issue date Jan 7, 2025
- Samsung Electronics Co., Ltd.
- Yongmyung Jun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for cleaning substrates using high temperature...
- Patent number 12,186,684
- Issue date Jan 7, 2025
- ACM RESEARCH (SHANGHAI), INC.
- Fuping Chen
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate processing apparatus, gas nozzle and method of manufactur...
- Patent number 12,188,124
- Issue date Jan 7, 2025
- Kokusai Electric Corporation
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Spin coater and semiconductor fabrication method using the same
- Patent number 12,189,295
- Issue date Jan 7, 2025
- Samsung Electronics Co., Ltd.
- Myung-Soo Hwang
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Vacuum system, low-pressure vacuum process device, and cutoff member
- Patent number 12,191,167
- Issue date Jan 7, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Tao Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load port and multi-use carrier
- Patent number 12,191,179
- Issue date Jan 7, 2025
- Brillian Network & Automation Integrated System Co., Ltd.
- Yi-Jun Gu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer system and method of use
- Patent number 12,191,165
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Kai-Chin Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flow modification fixture for an equipment front end module
- Patent number 12,183,611
- Issue date Dec 31, 2024
- Entegris, Inc.
- Seong Chan Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 12,183,602
- Issue date Dec 31, 2024
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate container with enhanced flow field therein
- Patent number 12,183,608
- Issue date Dec 31, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas mixing system for semiconductor fabrication
- Patent number 12,179,161
- Issue date Dec 31, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Ming Shing Lin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-PROCESSING METHOD
- Publication number 20250051920
- Publication date Feb 13, 2025
- TOKYO ELECTRON LIMITED
- Yudai FUKUSHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE AND EXHAUST SYSTEM THEREOF
- Publication number 20250054779
- Publication date Feb 13, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Lika WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPROVED THERMAL AND ELECTRICAL INTERFACE BETWEEN PARTS IN AN ETCH...
- Publication number 20250054778
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Anthony DE LA LLERA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING CHAMBER, SUBSTRATE PROCESSING SYSTEM INCLUDING...
- Publication number 20250054805
- Publication date Feb 13, 2025
- SAMSUNG ELECTRONICS CoO., LTD.
- Yongmyung JUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VALVE DEVICE, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURI...
- Publication number 20250043879
- Publication date Feb 6, 2025
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF WAFER BONDING
- Publication number 20250046650
- Publication date Feb 6, 2025
- WAFER WORKS CORPORATION
- Wei-Jing CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSFER PADDLES WITH MINIMUM CONTACT AREA STRUCTURES FOR RED...
- Publication number 20250046644
- Publication date Feb 6, 2025
- LAM RESEARCH CORPORATION
- Andrew Borth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT DEVICE, SUBSTRATE TREATMENT SYSTEM, AND METHOD...
- Publication number 20250046645
- Publication date Feb 6, 2025
- Tokyo Electron Limited
- Tamihiro KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SUBSTRATE COOLING AND/OR HEATING USING COOL...
- Publication number 20250038012
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Samer Banna
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD OF TREATING SUBSTRATE
- Publication number 20250034719
- Publication date Jan 30, 2025
- SEMES CO., LTD.
- Pil Kyun HEO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING TOOL WITH RAPID AND SELECTIVE CONTROL OF PARTI...
- Publication number 20250038011
- Publication date Jan 30, 2025
- LAM RESEARCH CORPORATION
- Richard H. GOULD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DISTRIBUTION ASSEMBLIES FOR SEMICONDUCTOR DEVICES
- Publication number 20250037978
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Sanjeev Baluja
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Actively Controlled gas inject FOR PROCESS Temperature CONTROL
- Publication number 20250037975
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER BOAT TEMPORARY STORAGE DEVICE AND SEMICONDUCTOR PROCESSING DE...
- Publication number 20250038015
- Publication date Jan 30, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jinlong LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL AND MONITORING SYSTEM FOR GAS DELIVERY SYSTEM
- Publication number 20250038020
- Publication date Jan 30, 2025
- WATLOW ELECTRIC MANUFACTURING COMPANY
- Miranda PIZZELLA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND PROCESS GAS SUPPLY CONTROL VERIFICA...
- Publication number 20250029851
- Publication date Jan 23, 2025
- SEMES CO., LTD.
- Tae Sung KIM
- B08 - CLEANING
Information Patent Application
GAS INJECTION SYSTEM AND A WAFER PROCESSING APPARATUS USING THE SAME
- Publication number 20250019828
- Publication date Jan 16, 2025
- ASM IP HOLDING B.V.
- Vivek Upadhaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND TE...
- Publication number 20250022695
- Publication date Jan 16, 2025
- TOKYO ELECTRON LIMITED
- Kazuki HOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GASBOX FOR SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20250014914
- Publication date Jan 9, 2025
- Applied Materials, Inc.
- Rahul Rajeev
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS APPARATUS INCLUDING GAS SUPPLIER AND METHOD OF OPERATING TH...
- Publication number 20250010257
- Publication date Jan 9, 2025
- Samsung Electronics Co., Ltd.
- Dongsik Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20250011929
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20250011926
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUSES FOR CLEANING A MULTI-STATION SEMICONDUCTOR PROCESSING C...
- Publication number 20250006514
- Publication date Jan 2, 2025
- LAM RESEARCH CORPORATION
- Harish Kumar Premakumar
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20250006512
- Publication date Jan 2, 2025
- Kokusai Electric Corporation
- Kazuya NABETA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250006513
- Publication date Jan 2, 2025
- SEMES CO., LTD.
- Yong Hee LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS
- Publication number 20250006516
- Publication date Jan 2, 2025
- TOKYO ELECTRON LIMITED
- Noriiki MASUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD WITH HOLE SIZES FOR RADICAL SPECIES DELIVERY
- Publication number 20250006515
- Publication date Jan 2, 2025
- LAM RESEARCH CORPORATION
- Aaron Blake MILLER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
WAFER BOAT SYSTEM, HOLDER RING AND USE THEREOF
- Publication number 20250006529
- Publication date Jan 2, 2025
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
I-BRIDGE
- Publication number 20240426410
- Publication date Dec 26, 2024
- Compart Systems Pte. Ltd.
- Kim N. Vu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR COLLECTING REACTION BY-PRODUCTS FOR SEMICONDUCTOR PRO...
- Publication number 20240425980
- Publication date Dec 26, 2024
- MILAEBO CO., LTD.
- Che Hoo CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Apparatus for fluid treatment

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of manufacturing semiconductor device

Guided flow valve assembly and system incorporating same

Assembly chamber for self-assembly of semiconductor light-emitting...

Load lock device

Fluid control device, fluid supply system, and fluid supply method

Concentration control using a bubbler

Processing chamber deposition confinement

Substrate processing apparatus and substrate processing method

Baking apparatus

Substrate cleaning apparatus, substrate cleaning method, and non-tr...

Equipment front end module

Temperature change rate control device, method, and semiconductor p...

Airborne contaminant management method and system

Method of manufacturing semiconductor device, substrate processing...

Substrate processing apparatus, method of manufacturing semiconduct...

Member for semiconductor manufacturing apparatus, method for manufa...

Substrate processing apparatus, process fluid treating apparatus, a...

High pressure wafer processing systems and related methods

Temperature adjustment apparatus for high temperature oven

Substrate processing chamber, substrate processing system including...

Method and apparatus for cleaning substrates using high temperature...

Substrate processing apparatus, gas nozzle and method of manufactur...

Spin coater and semiconductor fabrication method using the same

Vacuum system, low-pressure vacuum process device, and cutoff member

Load port and multi-use carrier

Wafer transfer system and method of use

Flow modification fixture for an equipment front end module

Substrate processing apparatus for processing substrates

Substrate container with enhanced flow field therein

Gas mixing system for semiconductor fabrication

Patents Applicationslast 30 patents

SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-PROCESSING METHOD

SEMICONDUCTOR PROCESSING DEVICE AND EXHAUST SYSTEM THEREOF

IMPROVED THERMAL AND ELECTRICAL INTERFACE BETWEEN PARTS IN AN ETCH...

SUBSTRATE PROCESSING CHAMBER, SUBSTRATE PROCESSING SYSTEM INCLUDING...

VALVE DEVICE, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURI...

METHOD OF WAFER BONDING

WAFER TRANSFER PADDLES WITH MINIMUM CONTACT AREA STRUCTURES FOR RED...

SUBSTRATE TREATMENT DEVICE, SUBSTRATE TREATMENT SYSTEM, AND METHOD...

SYSTEMS AND METHODS FOR SUBSTRATE COOLING AND/OR HEATING USING COOL...

APPARATUS AND METHOD OF TREATING SUBSTRATE

SUBSTRATE PROCESSING TOOL WITH RAPID AND SELECTIVE CONTROL OF PARTI...

GAS DISTRIBUTION ASSEMBLIES FOR SEMICONDUCTOR DEVICES

Actively Controlled gas inject FOR PROCESS Temperature CONTROL

WAFER BOAT TEMPORARY STORAGE DEVICE AND SEMICONDUCTOR PROCESSING DE...

CONTROL AND MONITORING SYSTEM FOR GAS DELIVERY SYSTEM

SUBSTRATE PROCESSING SYSTEM AND PROCESS GAS SUPPLY CONTROL VERIFICA...

GAS INJECTION SYSTEM AND A WAFER PROCESSING APPARATUS USING THE SAME

PLASMA PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND TE...

GASBOX FOR SEMICONDUCTOR PROCESSING CHAMBER

PROCESS APPARATUS INCLUDING GAS SUPPLIER AND METHOD OF OPERATING TH...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

APPARATUSES FOR CLEANING A MULTI-STATION SEMICONDUCTOR PROCESSING C...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS

SHOWERHEAD WITH HOLE SIZES FOR RADICAL SPECIES DELIVERY

WAFER BOAT SYSTEM, HOLDER RING AND USE THEREOF

I-BRIDGE

APPARATUS FOR COLLECTING REACTION BY-PRODUCTS FOR SEMICONDUCTOR PRO...