Apparatus for fluid treatment

Industry

CPC
H01L21/67017

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67017Apparatus for fluid treatment

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,249,503
- Issue date Mar 11, 2025
- Kokusai Electric Corporation
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum valve for providing a symmetrical fluid flow
- Patent number 12,241,556
- Issue date Mar 4, 2025
- VAT Holding AG
- Florian Ehrne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Supporting shelf module and wafer container using same
- Patent number 12,237,190
- Issue date Feb 25, 2025
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vaporizer, processing apparatus and method of manufacturing semicon...
- Patent number 12,234,550
- Issue date Feb 25, 2025
- Kokusai Electric Corporation
- Gen Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ruthenium film forming method and substrate processing system
- Patent number 12,227,841
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum exhaust system
- Patent number 12,228,951
- Issue date Feb 18, 2025
- Edwards Japan Limited
- Manabu Nonaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate supporting apparatus, substrate processing apparatus incl...
- Patent number 12,230,531
- Issue date Feb 18, 2025
- ASM IP Holding B.V.
- Seung Woo Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Exhaust system and process equipment
- Patent number 12,230,517
- Issue date Feb 18, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsien-Chang Hsieh
- F23 - COMBUSTION APPARATUS COMBUSTION PROCESSES
Information Patent Grant
Capacitive sensor for monitoring gas concentration
- Patent number 12,228,534
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Xiaopu Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 12,224,185
- Issue date Feb 11, 2025
- Kokusai Electric Corporation
- Hideharu Itatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Guided flow valve assembly and system incorporating same
- Patent number 12,222,039
- Issue date Feb 11, 2025
- ICHOR SYSTEMS, INC.
- Stephen Carson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Assembly chamber for self-assembly of semiconductor light-emitting...
- Patent number 12,211,951
- Issue date Jan 28, 2025
- LG Electronics Inc.
- Inbum Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load lock device
- Patent number 12,211,735
- Issue date Jan 28, 2025
- Canon Anelva Corporation
- Jun Miura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid control device, fluid supply system, and fluid supply method
- Patent number 12,209,679
- Issue date Jan 28, 2025
- Fujikin Incorporated
- Masahiko Takimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Concentration control using a bubbler
- Patent number 12,209,310
- Issue date Jan 28, 2025
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing chamber deposition confinement
- Patent number 12,211,673
- Issue date Jan 28, 2025
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,211,708
- Issue date Jan 28, 2025
- SCREEN Holdings Co., Ltd.
- Shuichi Yasuda
- B08 - CLEANING
Information Patent Grant
Baking apparatus
- Patent number 12,211,711
- Issue date Jan 28, 2025
- Samsung Electronics Co., Ltd.
- Bumjin Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and non-tr...
- Patent number 12,202,016
- Issue date Jan 21, 2025
- Tokyo Electron Limited
- Yuki Ito
- B08 - CLEANING
Information Patent Grant
Equipment front end module
- Patent number 12,201,995
- Issue date Jan 21, 2025
- Sinfonia Technology Co., Ltd.
- Toshihiro Kawai
- B08 - CLEANING
Information Patent Grant
Temperature change rate control device, method, and semiconductor p...
- Patent number 12,205,836
- Issue date Jan 21, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Hongwei Geng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Airborne contaminant management method and system
- Patent number 12,202,015
- Issue date Jan 21, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Ming Tsao
- B08 - CLEANING
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,198,929
- Issue date Jan 14, 2025
- Kokusai Electric Corporation
- Hiroshi Ashihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,195,853
- Issue date Jan 14, 2025
- Kokusai Electric Corporation
- Motonari Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Member for semiconductor manufacturing apparatus, method for manufa...
- Patent number 12,198,965
- Issue date Jan 14, 2025
- NGK Insulators, Ltd.
- Kazuhiro Nobori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, process fluid treating apparatus, a...
- Patent number 12,198,943
- Issue date Jan 14, 2025
- Semes Co. Ltd
- Junhee Youn
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Grant
High pressure wafer processing systems and related methods
- Patent number 12,198,951
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Qiwei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature adjustment apparatus for high temperature oven
- Patent number 12,188,661
- Issue date Jan 7, 2025
- Yi-Ming Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing chamber, substrate processing system including...
- Patent number 12,191,190
- Issue date Jan 7, 2025
- Samsung Electronics Co., Ltd.
- Yongmyung Jun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for cleaning substrates using high temperature...
- Patent number 12,186,684
- Issue date Jan 7, 2025
- ACM RESEARCH (SHANGHAI), INC.
- Fuping Chen
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...
- Publication number 20250079195
- Publication date Mar 6, 2025
- SCREEN Holdings Co., Ltd.
- Tomomi HIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR A GAS LINE MATRIX AND INTERCHANGE ASSEMBLY
- Publication number 20250079194
- Publication date Mar 6, 2025
- ASM IP HOLDING B.V.
- Hannelore Azora Hemminger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250079193
- Publication date Mar 6, 2025
- TES CO., LTD.
- In-Il JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPORIZER
- Publication number 20250075898
- Publication date Mar 6, 2025
- PROTERIAL, LTD.
- Akinori SAWADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUID DELIVERY SYSTEM
- Publication number 20250079196
- Publication date Mar 6, 2025
- ICHOR SYSTEMS, INC.
- Randolph TREUR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, ROTATION STATE DETECTION METHOD, ME...
- Publication number 20250079231
- Publication date Mar 6, 2025
- Kokusai Electric Corporation
- Naofumi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Modular Fluid Delivery Assembly
- Publication number 20250079192
- Publication date Mar 6, 2025
- Applied Materials, Inc.
- Ricardo MARTINEZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPENSER FOR MICRO LED SUSPENSION AND METHOD OF TRANSFERRING MICRO...
- Publication number 20250069919
- Publication date Feb 27, 2025
- Samsung Electronics Co., Ltd.
- Joonyong Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS CONSTRUCTED AND ARRANGED TO PROCESS A PLURALITY OF SUBSTR...
- Publication number 20250069911
- Publication date Feb 27, 2025
- ASM IP HOLDING B.V.
- Lucian Jdira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND ASSEMBLIES FOR GAS FLOW RATIO CONTROL
- Publication number 20250069923
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Kevin Brashear
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-USE CARRIER
- Publication number 20250069924
- Publication date Feb 27, 2025
- Brillian Network & Automation Integrated System Co., Ltd.
- YI-JUN GU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANAGING TEMPERATURE IN SEMICONDUCTOR FABRICATION FACILITY
- Publication number 20250069904
- Publication date Feb 27, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- OTTO CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FURNACE INNER TUBE FOR PROCESS UNIFORMITY
- Publication number 20250062139
- Publication date Feb 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- De-Wei YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VALVE DEVICE
- Publication number 20250060049
- Publication date Feb 20, 2025
- Fujikin Incorporated
- Nobuo NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-PROCESSING METHOD
- Publication number 20250051920
- Publication date Feb 13, 2025
- TOKYO ELECTRON LIMITED
- Yudai FUKUSHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE AND EXHAUST SYSTEM THEREOF
- Publication number 20250054779
- Publication date Feb 13, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Lika WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPROVED THERMAL AND ELECTRICAL INTERFACE BETWEEN PARTS IN AN ETCH...
- Publication number 20250054778
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Anthony DE LA LLERA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING CHAMBER, SUBSTRATE PROCESSING SYSTEM INCLUDING...
- Publication number 20250054805
- Publication date Feb 13, 2025
- SAMSUNG ELECTRONICS CoO., LTD.
- Yongmyung JUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VALVE DEVICE, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURI...
- Publication number 20250043879
- Publication date Feb 6, 2025
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF WAFER BONDING
- Publication number 20250046650
- Publication date Feb 6, 2025
- WAFER WORKS CORPORATION
- Wei-Jing CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSFER PADDLES WITH MINIMUM CONTACT AREA STRUCTURES FOR RED...
- Publication number 20250046644
- Publication date Feb 6, 2025
- LAM RESEARCH CORPORATION
- Andrew Borth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT DEVICE, SUBSTRATE TREATMENT SYSTEM, AND METHOD...
- Publication number 20250046645
- Publication date Feb 6, 2025
- Tokyo Electron Limited
- Tamihiro KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SUBSTRATE COOLING AND/OR HEATING USING COOL...
- Publication number 20250038012
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Samer Banna
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD OF TREATING SUBSTRATE
- Publication number 20250034719
- Publication date Jan 30, 2025
- SEMES CO., LTD.
- Pil Kyun HEO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING TOOL WITH RAPID AND SELECTIVE CONTROL OF PARTI...
- Publication number 20250038011
- Publication date Jan 30, 2025
- LAM RESEARCH CORPORATION
- Richard H. GOULD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DISTRIBUTION ASSEMBLIES FOR SEMICONDUCTOR DEVICES
- Publication number 20250037978
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Sanjeev Baluja
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Actively Controlled gas inject FOR PROCESS Temperature CONTROL
- Publication number 20250037975
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER BOAT TEMPORARY STORAGE DEVICE AND SEMICONDUCTOR PROCESSING DE...
- Publication number 20250038015
- Publication date Jan 30, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jinlong LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL AND MONITORING SYSTEM FOR GAS DELIVERY SYSTEM
- Publication number 20250038020
- Publication date Jan 30, 2025
- WATLOW ELECTRIC MANUFACTURING COMPANY
- Miranda PIZZELLA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND PROCESS GAS SUPPLY CONTROL VERIFICA...
- Publication number 20250029851
- Publication date Jan 23, 2025
- SEMES CO., LTD.
- Tae Sung KIM
- B08 - CLEANING

Apparatus for fluid treatment

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of manufacturing semiconductor device, substrate processing...

Vacuum valve for providing a symmetrical fluid flow

Supporting shelf module and wafer container using same

Vaporizer, processing apparatus and method of manufacturing semicon...

Ruthenium film forming method and substrate processing system

Vacuum exhaust system

Substrate supporting apparatus, substrate processing apparatus incl...

Exhaust system and process equipment

Capacitive sensor for monitoring gas concentration

Method of manufacturing semiconductor device

Guided flow valve assembly and system incorporating same

Assembly chamber for self-assembly of semiconductor light-emitting...

Load lock device

Fluid control device, fluid supply system, and fluid supply method

Concentration control using a bubbler

Processing chamber deposition confinement

Substrate processing apparatus and substrate processing method

Baking apparatus

Substrate cleaning apparatus, substrate cleaning method, and non-tr...

Equipment front end module

Temperature change rate control device, method, and semiconductor p...

Airborne contaminant management method and system

Method of manufacturing semiconductor device, substrate processing...

Substrate processing apparatus, method of manufacturing semiconduct...

Member for semiconductor manufacturing apparatus, method for manufa...

Substrate processing apparatus, process fluid treating apparatus, a...

High pressure wafer processing systems and related methods

Temperature adjustment apparatus for high temperature oven

Substrate processing chamber, substrate processing system including...

Method and apparatus for cleaning substrates using high temperature...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...

METHODS AND APPARATUS FOR A GAS LINE MATRIX AND INTERCHANGE ASSEMBLY

SUBSTRATE PROCESSING APPARATUS

VAPORIZER

FLUID DELIVERY SYSTEM

SUBSTRATE PROCESSING APPARATUS, ROTATION STATE DETECTION METHOD, ME...

Modular Fluid Delivery Assembly

DISPENSER FOR MICRO LED SUSPENSION AND METHOD OF TRANSFERRING MICRO...

APPARATUS CONSTRUCTED AND ARRANGED TO PROCESS A PLURALITY OF SUBSTR...

METHODS AND ASSEMBLIES FOR GAS FLOW RATIO CONTROL

MULTI-USE CARRIER

METHOD FOR MANAGING TEMPERATURE IN SEMICONDUCTOR FABRICATION FACILITY

FURNACE INNER TUBE FOR PROCESS UNIFORMITY

VALVE DEVICE

SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-PROCESSING METHOD

SEMICONDUCTOR PROCESSING DEVICE AND EXHAUST SYSTEM THEREOF

IMPROVED THERMAL AND ELECTRICAL INTERFACE BETWEEN PARTS IN AN ETCH...

SUBSTRATE PROCESSING CHAMBER, SUBSTRATE PROCESSING SYSTEM INCLUDING...

VALVE DEVICE, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURI...

METHOD OF WAFER BONDING

WAFER TRANSFER PADDLES WITH MINIMUM CONTACT AREA STRUCTURES FOR RED...

SUBSTRATE TREATMENT DEVICE, SUBSTRATE TREATMENT SYSTEM, AND METHOD...

SYSTEMS AND METHODS FOR SUBSTRATE COOLING AND/OR HEATING USING COOL...

APPARATUS AND METHOD OF TREATING SUBSTRATE

SUBSTRATE PROCESSING TOOL WITH RAPID AND SELECTIVE CONTROL OF PARTI...

GAS DISTRIBUTION ASSEMBLIES FOR SEMICONDUCTOR DEVICES

Actively Controlled gas inject FOR PROCESS Temperature CONTROL

WAFER BOAT TEMPORARY STORAGE DEVICE AND SEMICONDUCTOR PROCESSING DE...

CONTROL AND MONITORING SYSTEM FOR GAS DELIVERY SYSTEM

SUBSTRATE PROCESSING SYSTEM AND PROCESS GAS SUPPLY CONTROL VERIFICA...