Apparatus for fluid treatment

Industry

CPC
H01L21/67017

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67017Apparatus for fluid treatment

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for use with hydrogen radicals and method of using same
- Patent number 12,272,527
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Xing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Advanced temperature control for wafer carrier in plasma processing...
- Patent number 12,272,575
- Issue date Apr 8, 2025
- Applied Materials, Inc.
- Fernando M. Silveira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multiple process semiconductor processing system
- Patent number 12,266,550
- Issue date Apr 1, 2025
- Applied Materials, Inc.
- Nitin Pathak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method for venting a processing cha...
- Patent number 12,266,508
- Issue date Apr 1, 2025
- HITACHI HIGH-TECH CORPORATION
- Kazuyuki Ikenaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film thickness uniformity improvement using edge ring and bias elec...
- Patent number 12,266,560
- Issue date Apr 1, 2025
- Applied Materials, Inc.
- Kin Pong Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead with embedded nut
- Patent number 12,257,592
- Issue date Mar 25, 2025
- Applied Materials, Inc.
- Kenneth Brian Doering
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Component mounting system and component mounting method
- Patent number 12,261,070
- Issue date Mar 25, 2025
- BONDTECH CO., LTD.
- Akira Yamauchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Filter apparatus for semiconductor device fabrication process
- Patent number 12,251,786
- Issue date Mar 18, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chwen Yu
- B24 - GRINDING POLISHING
Information Patent Grant
Non-elastomeric, non-polymeric, non-metallic membrane valves for se...
- Patent number 12,253,190
- Issue date Mar 18, 2025
- Lam Research Corporation
- Mariusch Gregor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,249,503
- Issue date Mar 11, 2025
- Kokusai Electric Corporation
- Kiyohisa Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum valve for providing a symmetrical fluid flow
- Patent number 12,241,556
- Issue date Mar 4, 2025
- VAT Holding AG
- Florian Ehrne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Supporting shelf module and wafer container using same
- Patent number 12,237,190
- Issue date Feb 25, 2025
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vaporizer, processing apparatus and method of manufacturing semicon...
- Patent number 12,234,550
- Issue date Feb 25, 2025
- Kokusai Electric Corporation
- Gen Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ruthenium film forming method and substrate processing system
- Patent number 12,227,841
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum exhaust system
- Patent number 12,228,951
- Issue date Feb 18, 2025
- Edwards Japan Limited
- Manabu Nonaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate supporting apparatus, substrate processing apparatus incl...
- Patent number 12,230,531
- Issue date Feb 18, 2025
- ASM IP Holding B.V.
- Seung Woo Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Exhaust system and process equipment
- Patent number 12,230,517
- Issue date Feb 18, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsien-Chang Hsieh
- F23 - COMBUSTION APPARATUS COMBUSTION PROCESSES
Information Patent Grant
Capacitive sensor for monitoring gas concentration
- Patent number 12,228,534
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Xiaopu Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 12,224,185
- Issue date Feb 11, 2025
- Kokusai Electric Corporation
- Hideharu Itatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Guided flow valve assembly and system incorporating same
- Patent number 12,222,039
- Issue date Feb 11, 2025
- ICHOR SYSTEMS, INC.
- Stephen Carson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Assembly chamber for self-assembly of semiconductor light-emitting...
- Patent number 12,211,951
- Issue date Jan 28, 2025
- LG Electronics Inc.
- Inbum Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load lock device
- Patent number 12,211,735
- Issue date Jan 28, 2025
- Canon Anelva Corporation
- Jun Miura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid control device, fluid supply system, and fluid supply method
- Patent number 12,209,679
- Issue date Jan 28, 2025
- Fujikin Incorporated
- Masahiko Takimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Concentration control using a bubbler
- Patent number 12,209,310
- Issue date Jan 28, 2025
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing chamber deposition confinement
- Patent number 12,211,673
- Issue date Jan 28, 2025
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,211,708
- Issue date Jan 28, 2025
- SCREEN Holdings Co., Ltd.
- Shuichi Yasuda
- B08 - CLEANING
Information Patent Grant
Baking apparatus
- Patent number 12,211,711
- Issue date Jan 28, 2025
- Samsung Electronics Co., Ltd.
- Bumjin Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and non-tr...
- Patent number 12,202,016
- Issue date Jan 21, 2025
- Tokyo Electron Limited
- Yuki Ito
- B08 - CLEANING
Information Patent Grant
Equipment front end module
- Patent number 12,201,995
- Issue date Jan 21, 2025
- Sinfonia Technology Co., Ltd.
- Toshihiro Kawai
- B08 - CLEANING
Information Patent Grant
Temperature change rate control device, method, and semiconductor p...
- Patent number 12,205,836
- Issue date Jan 21, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Hongwei Geng
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FLOW MODIFICATION FIXTURE FOR AN EQUIPMENT FRONT END MODULE
- Publication number 20250118582
- Publication date Apr 10, 2025
- Entegris, Inc.
- Seong Chan Kim
- G05 - CONTROLLING REGULATING
Information Patent Application
CHAMBER KITS, PROCESSING CHAMBERS, AND METHODS FOR GAS ACTIVATION I...
- Publication number 20250118576
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Chen-Ying WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS CABINET WITH REDUCED GAS EMISSIONS AND EXHAUST FLOW RATE
- Publication number 20250108418
- Publication date Apr 3, 2025
- TOKYO ELECTRON LIMITED
- Ronald Nasman
- B08 - CLEANING
Information Patent Application
AIRBORNE CONTAMINANT MANAGEMENT METHOD AND SYSTEM
- Publication number 20250108417
- Publication date Apr 3, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Ming TSAO
- B08 - CLEANING
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250105000
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH PRESSURE GASEOUS HYDROGEN OXIDE PROVIDING DEVICE, AND HIGH PRE...
- Publication number 20250105027
- Publication date Mar 27, 2025
- HPSP Co., Ltd.
- Si Hyung LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL LIQUID PURIFICATION APPARATUS FOR SEMICONDUCTOR MANUFACTURING
- Publication number 20250105028
- Publication date Mar 27, 2025
- SANSUNG ELECTRONICS SO., LTD.
- Hee Jeong PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPORIZER AND LIQUID MATERIAL VAPORIZING DEVICE
- Publication number 20250099867
- Publication date Mar 27, 2025
- HORIBA STEC, CO., LTD.
- Keisuke NISHIWAKI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250105001
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
- Publication number 20250105026
- Publication date Mar 27, 2025
- Kyung Taek IM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO PERFORM IN-SITU VACUUM CONTAMINATION MEASUREMENT AND IDEN...
- Publication number 20250096010
- Publication date Mar 20, 2025
- KLA Corporation
- Santosh Kumar Sankar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS TRANSPORT SYSTEM
- Publication number 20250092892
- Publication date Mar 20, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jheng-Syun LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING CHAMBER LID COOLING
- Publication number 20250095970
- Publication date Mar 20, 2025
- Applied Materials, Inc.
- Rajinder Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGETED GAS DELIVERY VIA SIDE GAS INJECTION
- Publication number 20250087506
- Publication date Mar 13, 2025
- Applied Materials, Inc.
- Tobin Kaufman-Osborn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...
- Publication number 20250079195
- Publication date Mar 6, 2025
- SCREEN Holdings Co., Ltd.
- Tomomi HIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR A GAS LINE MATRIX AND INTERCHANGE ASSEMBLY
- Publication number 20250079194
- Publication date Mar 6, 2025
- ASM IP HOLDING B.V.
- Hannelore Azora Hemminger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250079193
- Publication date Mar 6, 2025
- TES CO., LTD.
- In-Il JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUID DELIVERY SYSTEM
- Publication number 20250079196
- Publication date Mar 6, 2025
- ICHOR SYSTEMS, INC.
- Randolph TREUR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, ROTATION STATE DETECTION METHOD, ME...
- Publication number 20250079231
- Publication date Mar 6, 2025
- Kokusai Electric Corporation
- Naofumi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPORIZER
- Publication number 20250075898
- Publication date Mar 6, 2025
- PROTERIAL, LTD.
- Akinori SAWADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Modular Fluid Delivery Assembly
- Publication number 20250079192
- Publication date Mar 6, 2025
- Applied Materials, Inc.
- Ricardo MARTINEZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPENSER FOR MICRO LED SUSPENSION AND METHOD OF TRANSFERRING MICRO...
- Publication number 20250069919
- Publication date Feb 27, 2025
- Samsung Electronics Co., Ltd.
- Joonyong Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS CONSTRUCTED AND ARRANGED TO PROCESS A PLURALITY OF SUBSTR...
- Publication number 20250069911
- Publication date Feb 27, 2025
- ASM IP HOLDING B.V.
- Lucian Jdira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND ASSEMBLIES FOR GAS FLOW RATIO CONTROL
- Publication number 20250069923
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Kevin Brashear
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-USE CARRIER
- Publication number 20250069924
- Publication date Feb 27, 2025
- Brillian Network & Automation Integrated System Co., Ltd.
- YI-JUN GU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANAGING TEMPERATURE IN SEMICONDUCTOR FABRICATION FACILITY
- Publication number 20250069904
- Publication date Feb 27, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- OTTO CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FURNACE INNER TUBE FOR PROCESS UNIFORMITY
- Publication number 20250062139
- Publication date Feb 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- De-Wei YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VALVE DEVICE
- Publication number 20250060049
- Publication date Feb 20, 2025
- Fujikin Incorporated
- Nobuo NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-PROCESSING METHOD
- Publication number 20250051920
- Publication date Feb 13, 2025
- TOKYO ELECTRON LIMITED
- Yudai FUKUSHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE AND EXHAUST SYSTEM THEREOF
- Publication number 20250054779
- Publication date Feb 13, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Lika WANG
- H01 - BASIC ELECTRIC ELEMENTS

Apparatus for fluid treatment

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus for use with hydrogen radicals and method of using same

Advanced temperature control for wafer carrier in plasma processing...

Multiple process semiconductor processing system

Plasma processing apparatus and method for venting a processing cha...

Film thickness uniformity improvement using edge ring and bias elec...

Showerhead with embedded nut

Component mounting system and component mounting method

Filter apparatus for semiconductor device fabrication process

Non-elastomeric, non-polymeric, non-metallic membrane valves for se...

Method of manufacturing semiconductor device, substrate processing...

Vacuum valve for providing a symmetrical fluid flow

Supporting shelf module and wafer container using same

Vaporizer, processing apparatus and method of manufacturing semicon...

Ruthenium film forming method and substrate processing system

Vacuum exhaust system

Substrate supporting apparatus, substrate processing apparatus incl...

Exhaust system and process equipment

Capacitive sensor for monitoring gas concentration

Method of manufacturing semiconductor device

Guided flow valve assembly and system incorporating same

Assembly chamber for self-assembly of semiconductor light-emitting...

Load lock device

Fluid control device, fluid supply system, and fluid supply method

Concentration control using a bubbler

Processing chamber deposition confinement

Substrate processing apparatus and substrate processing method

Baking apparatus

Substrate cleaning apparatus, substrate cleaning method, and non-tr...

Equipment front end module

Temperature change rate control device, method, and semiconductor p...

Patents Applicationslast 30 patents

FLOW MODIFICATION FIXTURE FOR AN EQUIPMENT FRONT END MODULE

CHAMBER KITS, PROCESSING CHAMBERS, AND METHODS FOR GAS ACTIVATION I...

GAS CABINET WITH REDUCED GAS EMISSIONS AND EXHAUST FLOW RATE

AIRBORNE CONTAMINANT MANAGEMENT METHOD AND SYSTEM

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

HIGH PRESSURE GASEOUS HYDROGEN OXIDE PROVIDING DEVICE, AND HIGH PRE...

CHEMICAL LIQUID PURIFICATION APPARATUS FOR SEMICONDUCTOR MANUFACTURING

VAPORIZER AND LIQUID MATERIAL VAPORIZING DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

METHOD TO PERFORM IN-SITU VACUUM CONTAMINATION MEASUREMENT AND IDEN...

GAS TRANSPORT SYSTEM

PLASMA PROCESSING CHAMBER LID COOLING

TARGETED GAS DELIVERY VIA SIDE GAS INJECTION

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...

METHODS AND APPARATUS FOR A GAS LINE MATRIX AND INTERCHANGE ASSEMBLY

SUBSTRATE PROCESSING APPARATUS

FLUID DELIVERY SYSTEM

SUBSTRATE PROCESSING APPARATUS, ROTATION STATE DETECTION METHOD, ME...

VAPORIZER

Modular Fluid Delivery Assembly

DISPENSER FOR MICRO LED SUSPENSION AND METHOD OF TRANSFERRING MICRO...

APPARATUS CONSTRUCTED AND ARRANGED TO PROCESS A PLURALITY OF SUBSTR...

METHODS AND ASSEMBLIES FOR GAS FLOW RATIO CONTROL

MULTI-USE CARRIER

METHOD FOR MANAGING TEMPERATURE IN SEMICONDUCTOR FABRICATION FACILITY

FURNACE INNER TUBE FOR PROCESS UNIFORMITY

VALVE DEVICE

SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-PROCESSING METHOD

SEMICONDUCTOR PROCESSING DEVICE AND EXHAUST SYSTEM THEREOF