Claims
- 1. A method for producing a photo-detecting device comprising the steps of:growing a light absorption layer and a window layer on a semiconductor substrate in this order; forming an island-like diffusion region in the window layer by diffusing an impurity therein; depositing a lower metal film on a portion of the window layer excluding the island-like diffusion region; depositing an insulative film on the window layer and the lower metal film; forming an opening over the island-like diffusion region by partially etching away the insulative film; depositing and lifting off a thin metal film so as to simultaneously form a negative electrode, a pad, wiring, and an upper metal film.
- 2. A method for producing a photo-detecting device according to claim 1, wherein the lower metal film is a lamination film comprising Cr, Pt, and Au.
Priority Claims (1)
Number |
Date |
Country |
Kind |
10-330065 |
Nov 1998 |
JP |
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BACKGROUND OF THE INVENTION
This application is a Divisional of U.S. patent application Ser. No. 09/442,548, filed Nov. 18, 1999 now U.S. Pat. No. 6,384,489 Bi.
US Referenced Citations (9)
Foreign Referenced Citations (1)
Number |
Date |
Country |
3276769 |
Dec 1991 |
JP |