This application is a continuation of prior application Ser. No. 08/537,378, filed Oct. 2, 1995, now abandoned.
Number | Name | Date | Kind |
---|---|---|---|
4621413 | Lowe et al. | Nov 1986 | |
4755478 | Abernathey et al. | Jul 1988 | |
4807016 | Douglas | Feb 1989 | |
4837179 | Foster et al. | Jun 1989 | |
4892753 | Wang et al. | Jan 1990 | |
4948744 | Kita | Aug 1990 | |
5166101 | Lee et al. | Nov 1992 | |
5314845 | Lee et al. | May 1994 | |
5354387 | Lee et al. | Oct 1994 | |
5393704 | Huang et al. | Feb 1995 |
Number | Date | Country |
---|---|---|
0594298 | Apr 1994 | EPX |
WO8707763 | Dec 1987 | WOX |
Entry |
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Wolf, S., Silicon Processing, vol. 1, Lattice Press, 1986, pp. 182-187. |
Pillote, C., et al., "Characterization of Phosphosilicate . . . ", Thin Solid Films, vol. 236, 1993, pp. 287-293. |
Wolf, S., Silicon Processing, vol. 1, Lattice Press, 1986, pp. 187-191, 397-399. |
Wolf, S., Silicon Processing, vol. 2, Lattice Press, 1990, pp. 222-228, 238-239. |
Number | Date | Country | |
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Parent | 537378 | Oct 1995 |