Number | Date | Country | Kind |
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58-138312 | Jul 1983 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4040083 | Saiki et al. | Aug 1977 | |
4123565 | Sumitomo et al. | Oct 1978 | |
4396934 | Nishida | Aug 1983 |
Entry |
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Mukai et al, IEEE J. of S.S.C. , vol. SC-13, No. 4, Aug. 1978, "Planar Multilevel., Polyimide", pp. 462-467. |