Number | Date | Country | Kind |
---|---|---|---|
6-330158 | Dec 1994 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4825278 | Hillenius et al. | Apr 1989 |
Number | Date | Country |
---|---|---|
6-37106 | Feb 1994 | JPX |
7-201967 | Aug 1995 | JPX |
Entry |
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Wakamiya et al., Fully Planarized 0.5um Technologies For 16M DRAM, IEDM-88, pp.246-249, 1988. |