Number | Date | Country | Kind |
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98 09662 | Jul 1998 | FR |
Filing Document | Filing Date | Country | Kind |
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PCT/FR99/01831 | WO | 00 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO00/07243 | 2/10/2000 | WO | A |
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3701249 | Bergey et al. | Oct 1972 | A |
5491571 | Williams et al. | Feb 1996 | A |
5511234 | Ha | Apr 1996 | A |
5599734 | Byun et al. | Feb 1997 | A |
5637187 | Takasu et al. | Jun 1997 | A |
5815126 | Fan et al. | Sep 1998 | A |
6187605 | Takasu et al. | Feb 2001 | B1 |
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0 474 474 | Mar 1992 | EP |
0 553 860 | Aug 1993 | EP |
01039733 | Feb 1989 | JP |
Entry |
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L.J. Spangler et al., “A Bulk Silicon SOI Process for Active Integrated Sensors,” 8253a Sensors and Actuators—A Physical A24 (1990) Jul., No. 2, pp. 117-122. |