Patent Application
20120212250
1. Field of the Invention
The present invention relates to a semiconductor element testing system, and more particularly, to a semiconductor element testing system having an air filter.
2. Description of Related Art
Normally semiconductor elements are necessary to be tested by testing facilities so as to test and verify the function of the semiconductor elements. Then based on the test results, the semiconductor elements are screened and classified such that those being evaluated as good are selected and bad are eliminated. However, environmental air quality, during the test, significantly affects the test results of chips. Therefore, maintaining the testing facilities in an environment of good air quality is an essential requirement for testing semiconductor elements.
Referring to
Therefore, it is understood that even if the conventional semiconductor element testing system 90 is arranged in the so-called clean room, there are still plenty of particles in the air of the environment, making the degree of cleanness fail to reach to the requirement. As such, the conventional art is undesirable, and there is still room for improvement.
In view of the above, “a semiconductor element testing system having an air filter” originated from innovative concept of the present invention is developed and accomplished, after persistent research and experiments, so as to solve the problems given above.
A primary object of the present invention is to provide a semiconductor element testing system having an air filter characterized by using the air filter to filter, with positive pressure, the air introduced into a testing apparatus, and into a testing area, so as to reduce floating particles in the testing area, and to maintain satisfactory cleanness in the testing area. This will lower the possibility of contamination for semiconductor elements so as to enhance testing yield rate.
A secondary object of the present invention is to provide a semiconductor element testing system having an air filter, so that the air filter can be assembled to the testing apparatus easily and that time and manpower be saved.
To achieve the object, the testing system comprises a testing apparatus, a first hollow frame, a fan assemble, a second hollow frame, and an air filter. The testing apparatus includes a housing having an opening. The first hollow frame is fixedly arranged on the housing of the testing apparatus and located around the opening. The first hollow frame includes a flange, a bottom surface, and a side portion, wherein a plurality of hooks are fixedly arranged on the side portion. The fan assembly is fixed on the flange of the first hollow frame such that a forced airflow can be supplied toward inside of the housing. The second hollow frame includes an inner bottom surface and an outer side portion, wherein the outer side portion is fixedly arranged with a plurality of loop fasteners corresponding to the plural hooks of the first hollow frame. The air filter is interposed between the bottom surface of the first hollow frame and the inner bottom surface of the second hollow frame, and covers on the opening of the housing.
Further, according to the present invention, the housing may be provided, at its sides, with a plurality of slits or through holes acting as vents of the testing apparatus for flowing air in the testing area.
According to the present invention, the air filter may relate to a high efficiency particulate air filter (HEPA filter), or other equivalent air filters.
The second hollow frame may have a L-shaped cross-section such that the whole second hollow frame can be formed as a trough, and that the air filter can be disposed on the inner bottom surface of the second hollow frame without the possibility of falling.
According to the present invention, when the plural loop fasteners of the second hollow frame and the plural hooks of the first hollow frame are correspondingly engaged with one another, the air filter can be pressed against by the bottom surface of the first hollow frame and the inner bottom surface of the second hollow frame without the possibility of sliding up and down.
Further, according to the present invention, the fan assembly may be fixed on the first hollow frame by a plurality of fastening screws or other equivalents. The first hollow frame, the fan assembly, the second hollow frame, and the air filter can be assembled together so as to form a unitary fan-filter assembly which can be installed on the housing of the testing apparatus conveniently.
Still further, according to the present invention, the opening can be provided at the top, or one side, of the housing. A through hole is provided on the housing, opposite to the opening at the side of the housing, for introducing airflow. In addition, an exhaust fan can be arranged at the through hole for drawing airflow and introducing the same out of the testing apparatus. To avoid causing a turbulent flow and contaminating cleanness of the environment of the testing apparatus, the exhaust fan can be provided to introduce the drawn airflow to the ground.
Other objects, advantages, and novel features of the present invention will become more apparent from the following detailed descriptions when taken in conjunction with the accompanying drawings.
Referring to
As shown in
As shown in
In the present embodiment, the second hollow frame 40 includes an inner bottom surface 401 and an outer side portion 402, wherein the outer side portion 402 is fixedly arranged with a plurality of loop fasteners 42 corresponding to the plural hooks 22 of the first hollow frame 20. Each loop fastener 42 consists of a seat 421, an axle 422, two spring arms 423, a fastening rod 424, and an operating piece 425. The seat 421 is fixed on the outer side portion 402, and that the two spring arms 423 are connected with each other and pivot, together with the fastening rod 424, at the axle 422. By using the operating piece 425, the loop fastener 42 and the hook 22 can be engaged with each other easily. As shown in
The air filter 50 is interposed between the bottom surface 202 of the first hollow frame 20 and the inner bottom surface 401 of the second hollow frame 40. In the present embodiment, the air filter 50 relates to a high efficiency particulate air filter (HEPA filter).
Further, as shown in
In the present embodiment, when the plural loop fasteners 42 of the second hollow frame 40 and the plural hooks 22 of the first hollow frame 20 are correspondingly engaged with one another, the air filter 50 is pressed against by the bottom surface 202 of the first hollow frame 20 and the inner bottom surface 401 of the second hollow frame 40 without the possibility of sliding up and down.
Now referring to
Further referring to
The semiconductor element testing system having an air filter, according to the present invention, can arrange appropriately the air filter on the top, or at one side, of the testing apparatus in compliance with actual structural requirement so as to produce an optimal dust-removal effect. Besides, the testing apparatus may be a wafer tester or a semiconductor handler.
In view of the above, the present invention may use the air filter to filter, with positive pressure, the air introduced into the testing apparatus, and into the testing area, so as to decrease floating particles in the testing area, and to maintain satisfactory cleanness in the testing area. This will lower the possibility of contamination to semiconductor elements, particularly CMOS elements which are easily contaminated, so as to enhance testing yield rate.
Although the present invention has been explained in relation to its preferred embodiments, it is to be understood that many other possible modifications and variations can be made without departing from the scope of the invention as hereinafter claimed.
| Number | Date | Country | Kind |
|---|---|---|---|
| 100203036 | Feb 2011 | TW | national |
