An embodiment of the present disclosure relates generally to integrated circuits, semiconductor devices, and methods, and more particularly to an electrostatic discharge (ESD) protection device and a method of protecting an integrated circuit against electrostatic discharge.
As electronic components of integrated circuits continue to become smaller, it has become easier to either completely destroy or otherwise impair the electronic components. In particular, many integrated circuits are highly susceptible to damage from the unintended discharge of static electricity, generally as a result of handling or from physical contact with another charged body. Electrostatic discharge (ESD) is the transfer of an electric charge between bodies at different electrostatic potentials or voltages, caused by direct contact, or induced by an electrostatic field. The discharge of static electricity has become a critical problem for the electronics industry.
Device failures that result from ESD events are not always immediately catastrophic or apparent. Often, the device is only slightly weakened but is less able to withstand normal operating stresses and, hence, may result in a reliability problem. Therefore, various ESD protection circuits should be included in the device to protect the various components.
When an ESD discharge occurs onto a transistor or other semiconductor element, the high voltage and current of the ESD pulse relative to the voltage- and current-sustaining capabilities of structures within the device can break down the transistor and potentially cause permanent damage. Consequently, circuits associated with input/output pads of an integrated circuit need to be protected from ESD pulses so that they are not damaged by such discharges.
According to an embodiment, an electrostatic discharge (ESD) protection circuit includes a first transistor having a first source/drain coupled to a first input/output terminal, a second source/drain coupled to a first reference voltage terminal, and a gate coupled to a second reference voltage terminal. The ESD protection circuit further includes a direct current (DC) blocking circuit having a first input/output node coupled to the first input/output terminal, a second input/output node configured to be coupled to a useful circuit, and a third input/output node coupled a gate of the first transistor.
For a more complete understanding of the present invention, and the advantages thereof, reference is now made to the following descriptions taken in conjunction with the accompanying drawings, in which:
Corresponding numerals and symbols in the different figures generally refer to corresponding parts unless otherwise indicated. The figures are drawn to clearly illustrate the relevant aspects of the embodiments and are not necessarily drawn to scale.
The making and using of various embodiments are discussed in detail below. It should be appreciated, however, that the various embodiments described herein are applicable in a wide variety of specific contexts. The specific embodiments discussed are merely illustrative of specific ways to make and use various embodiments, and should not be construed in a limited scope.
Description is made with respect to various embodiments in a specific context, namely integrated circuits, semiconductor devices, and methods, and more particularly to electrostatic discharge (ESD) protection devices and methods of protecting integrated circuits from ESD events. The integrated circuits are particularly vulnerable to ESD events in a switched-off state while handling such as, for example, during soldering components of the integrated circuits or during soldering the integrated circuits to a printed circuit board.
One of the issues with respect to implementing radio frequency (RF) circuits in a semiconductor process is providing a good RF environment in addition to ensuring adequate protection against ESD events. In some cases this may lead to a tradeoff between RF performance and ESD protection. For example, a resistance of the ESD device may add noise to the system and a capacitive loading of the ESD device may lead to attenuation of the RF signal and distortion due to non-linearity of semiconductor junctions that make up the ESD device. In embodiments of the present invention, an ESD device coupled to an RF input/output pin of an integrated circuit includes an N-type metal-oxide-semiconductor (NMOS) device having a source/drain connected to the RF input/output pin of the integrated circuit. The gate of this NMOS device is connected to a negative voltage generator, such as a charge pump, so that during operation of the integrated circuit, the RF input/output pin has an increased input range before the NMOS device turns on. However, when the integrated circuit is powered down or is not installed on a printed circuit board (PCB), the gate of the NMOS device assumes a potential of the ground pin so that that the NMOS device becomes conductive at a voltage level that preserves the circuitry coupled to the ESD device. In some embodiments, the RF input/output pin is capacitively coupled to the gate of the NMOS device, as well as to a useful circuit on the integrated circuit. While the various embodiments are described with reference to NMOS transistors, one of the ordinary skill in the art would appreciate that various embodiments such as those described herein may be also implemented using P-type metal-oxide-semiconductor (PMOS) transistors.
The integrated circuit 100 may further include a second level clamp circuit 103 coupled between the exemplary ESD protection circuit 101 and the useful circuit 105. The exemplary ESD protection circuit 101 provides rough clamping and may clamp the input/output terminal of the useful circuit 105 at a higher voltage than tolerated by the useful circuit 105. In such an event, the second level clamp circuit 103 may further reduce a voltage at the input/output terminal of the useful circuit 105. For example, the second level clamp circuit 103 may include a transistor similar to a transistor of the useful circuit 105 in order to better protect circuits prone to damage at relatively low voltage levels.
During operation of the useful circuit 105, the gate of the transistor 213 is biased to a negative voltage using a voltage source 217 coupled to the gate of the transistor 213 through a resistor 215. By biasing the gate of the transistor 213 to a negative voltage, a larger input voltage swing may be tolerated at the input pin 203 of the integrated circuit without turning on the transistor 213, thereby increasing the linearity of the system. Moreover, in some embodiments in which a bulk silicon process is used to implement the transistor 213, a substrate of the integrated circuit and/or a bulk node of the transistor 213 may also be biased to a negative voltage respect to the ground in order to turn off a substrate/bulk diode of the transistor. By disabling the substrate/bulk diode, a non-linear capacitance of the substrate/bulk diode is reduced, thereby reducing non-linearities due to the non-linear capacitance of the substrate/bulk diode. In some embodiments, a silicon-on-insulator (SOI) process may be used to form the transistor 213 and to avoid biasing the substrate/bulk diode.
In some embodiments, the ESD protection circuit 201 includes a direct current (DC) blocking circuit 207 coupled between the input pin 203 and an input/output terminal of the useful circuit 105. The direct current (DC) blocking circuit 207 provides an AC signal path from the input pin 203 to useful circuit 105, as well as a coupling path to the gate of the transistor 213. In some embodiments, the DC blocking circuit 207 includes a first capacitor 209 connected to a second capacitor 211. In some embodiments, the first capacitor 209 and the second capacitor 211 are high quality factor (high-Q) metal-insulator-metal (MIM) capacitors, or the like. Capacitances of the first capacitor 209 and the second capacitor 211 are chosen depending on a frequency band used by the useful circuit 105. In some embodiments in which the frequency band of about 1 GHz is used, a capacitance of the first capacitor 209 is between about 1 pF and about 20 pF, such as about 2 pF, and a capacitance of the second capacitor 211 is between about 10 pF and about 100 pF, such as about 56 pF. In other embodiments in which the useful circuit 105 is configured for higher frequency applications, the capacitances of the first capacitor 209 and the second capacitor 211 are further reduced.
In some embodiments, the transistor 213 may be a field effect transistor (FET) such a MOS transistor formed using a bulk silicon process, a MOS transistor formed using a silicon-on-insulator (SOI) process, a high electron mobility transistor (HEMT) such as a GaAs-HEMT, or the like. In the illustrated embodiment, the transistor 213 is an NMOS transistor having a gate length L1 between about 22 nm and about 500 nm, such as about 120 nm, a gate width W1 between about 100 μm and about 1 mm, such as about 500 μm, a threshold voltage between about 0.2 V and about 0.5 V, and an ON-mode channel resistance Ron between about 0.5Ω and about 3Ω. In some embodiments, the ON-mode channel resistance Ron may tuned by changing, for example, the gate width W1. In some embodiments in which the gate length L1 is about 120 nm and the width W1 is about 500 μm, the ON-mode channel resistance Ron is about 1Ω.
Referring further to
During an ESD event a voltage pulse occurs at the input pin 203 of the integrated circuit 200. The voltage pulse may have the positive polarity or the negative polarity. The ESD protection circuit 201 protects the useful circuit 105 independent of the polarity of the voltage pulse. The voltage pulse starts to charge the first capacitor 209 and the second capacitor 211 of the DC blocking circuit 207 and affects a voltage seen by the gate of the transistor 213. In some embodiments in which the voltage pulse and the reference voltage of the voltage source 217 have a same polarity that is different from a polarity of the threshold voltage of the transistor 213, the transistor 213 remains turned off and the channel of the transistor 213 does not conduct. Instead, a substrate diode of the transistor 213 starts to conduct and clamps a voltage at the input/output terminal of the useful circuit 105 to a desired value that is lower than a damaging voltage value for the useful circuit 105. In some embodiments in which the voltage pulse and the threshold voltage of the transistor 213 have a same polarity that is different from a polarity of the reference voltage of the voltage source 217, the transistor 213 turns on as a gate voltage of the transistor 213 reaches the threshold voltage. In the On mode, the channel of the transistor 213 starts conducting and the input/output terminal of the useful circuit 105 is clamped to a desired voltage that is lower than a damaging voltage for the useful circuit 105. In some embodiment in which the transistor 213 is an NMOS transistor, the threshold voltage of the transistor 213 has the positive polarity and the reference voltage of the voltage source 217 has the negative polarity. Accordingly, the substrate diode of the transistor 213 conducts when a negative voltage pulse arrives at the input pin 203 of the integrated circuit 200, and the channel of the transistor 213 conducts when a positive voltage pulse arrives at the input pin 203 of the integrated circuit 200.
In some embodiments, the transistor 505 may be a FET such a MOS transistor formed using a bulk silicon process, a MOS transistor formed using an SOI process, a HEMT such as a GaAs-HEMT, or the like. In some embodiments, an OFF-mode capacitance of the transistor 505 may be tuned by tuning a gate width W2 of the transistor 505. In some embodiments in which the transistor 505 is an NMOS transistor with a gate length L2 of about 120 nm, the overlap capacitances of the transistor 505, such as gate-drain and gate-source capacitances, have a capacitance of about 0.92*W2 pF, where the gate width W2 of the transistor 505 is measured in millimeters. For example, an NMOS transistor having a gate length of about 120 nm and a gate width of about 4400 μm may be used to replace the first capacitor 209 having a capacitance of about 2 pF. The ESD protection circuit 501 further includes a resistor 507 coupled between the gate of the transistor 505 and the voltage source 217. In some embodiments, a resistance of the resistor 507 is between about 20 kΩ and about 1 MΩ, such as about 200 kΩ. In some embodiments, a capacitor implemented using a gate-overlap capacitance of a transistor may have a greater capacitance per area than a MIM capacitor and may provide an additional substrate diode for negative ESD pulses. By implementing capacitors of ESD protection circuits using gate-overlap capacitances of transistors, the footprint of the ESD protection circuits may be further reduced. During an ESD event, the ESD protection circuit 501 operates similar to the ESD protection circuit 201, described above with reference to
Various embodiments described above have a single transistor (such the transistor 213 illustrated in
In some embodiments, the ESD protection circuit 901 includes a stack of series coupled transistors 903i that replaces the transistor 213 (see
According to various embodiments described herein, advantages may include an efficient ESD protection without adversely affecting a noise performance and linearity of a useful circuit, and without adversely affecting a chip footprint. Other advantages include ability to tune a clamping voltage of an ESD protection circuit according to requirements of the useful circuit and ability to use an ESD protection circuit as a switch.
Embodiments of the present invention are summarized here. Other embodiments can also be understood form the entirety of the specification and the claims filed herein. One general aspect includes an electrostatic discharge (ESD) protection circuit including: a first transistor having a first source/drain coupled to a first input/output terminal, a second source/drain coupled to a first reference voltage terminal, and a gate coupled to a second reference voltage terminal; and a direct current (DC) blocking circuit having a first input/output node coupled to the first input/output terminal, a second input/output node configured to be coupled to a useful circuit, and a third input/output node coupled a gate of the first transistor. Other embodiments of this aspect include corresponding circuits and systems configured to perform the various actions of the methods.
Implementations may include one or more of the following features. The ESD protection circuit where the DC blocking circuit includes: a first capacitor coupled between the first input/output node and the third input/output node; and a second capacitor coupled between the third input/output node and the second input/output node. The ESD protection circuit where the DC blocking circuit includes: a second transistor having a first source/drain coupled to the first input/output terminal and a gate coupled to the second reference voltage terminal; and a first capacitor coupled between a second source/drain of the second transistor and the second input/output node. The ESD protection circuit further including a second capacitor coupled between the first source/drain of the second transistor and the second source/drain of the second transistor. The ESD protection circuit where the first reference voltage terminal is coupled to the ground. The ESD protection circuit further including a voltage source having an output coupled to the second reference voltage terminal, the voltage source configured to provide a voltage having an opposite polarity of a threshold voltage of the first transistor. The ESD protection circuit further including a resistor coupled between the gate of the first transistor and the second reference voltage terminal. The ESD protection circuit further including a second transistor having a first source/drain coupled to the second source/drain of the first transistor, a second source/drain coupled to the first reference voltage terminal, and a gate coupled to the second reference voltage terminal. The ESD protection circuit further including the useful circuit.
A further general aspect includes an integrated circuit including: an input pad; a useful circuit; and an electrostatic discharge (ESD) protection circuit coupled between the input pad and an input/output terminal of the useful circuit. The ESD protection circuit including: a direct current (DC) blocking circuit coupled between the input pad and the input/output terminal of the useful circuit, and a first transistor having a first source/drain coupled to the input pad, a second source/drain coupled to the ground, and a gate coupled to the dc blocking circuit at a first node. The integrated circuit further including a reference voltage source coupled to the gate of the first transistor at the first node, the reference voltage source providing a reference voltage to turn the first transistor off.
Implementations may include one or more of the following features. The integrated circuit where the reference voltage source is configured to provide a voltage having an opposite polarity of a threshold voltage of the first transistor. The integrated circuit where the ESD protection circuit further includes a second transistor having a first source/drain coupled to the second source/drain of the first transistor, a second source/drain coupled to the ground, and a gate coupled to the reference voltage source. The integrated circuit where the DC blocking circuit includes: a first capacitor coupled between the input pad and the first node; and a second capacitor coupled between the first node and the input/output terminal of the useful circuit. The integrated circuit where the DC blocking circuit includes: a second transistor having a first source/drain coupled to the input pad and a gate coupled to the reference voltage source; and a capacitor coupled between a second source/drain of the second transistor and the input/output terminal of the useful circuit. The integrated circuit where the ESD protection circuit further includes a plurality of transistors coupled in series between the first transistor and the ground, a gate of each transistor of the plurality of transistors being coupled to the reference voltage source. The integrated circuit where the ESD protection circuit further includes a plurality of resistors, each resistor of the plurality of resistors being coupled between a corresponding gate of a corresponding transistor of the plurality of transistors and the reference voltage source. The integrated circuit where the ESD protection circuit further includes a plurality of resistors coupled in series between the input pad and the reference voltage source, each resistor of the plurality of resistors being coupled between gates of adjacent transistors of the plurality of transistors. The integrated circuit further including a resistor coupled between the gate of the first transistor and the reference voltage source. The integrated circuit where the first transistor is an n-type metal-oxide semiconductor field effect transistor. The integrated circuit where the reference voltage source includes a charge pump.
A further general aspect includes a method including: applying a first voltage between a gate terminal and a first source/drain terminal of a first transistor, the first transistor having the first source/drain terminal coupled to a first power supply node and a second source/drain terminal coupled to an input pad of an integrated circuit, where the first voltage an a threshold voltage of the first transistor have opposite polarities; receiving an ESD pulse of a first polarity at the input pad of the integrated circuit; and turning-on the first transistor upon receipt of the ESD pulse of the first polarity, turning-on the first transistor including capacitively coupling the ESD pulse of the first polarity from the input pad of the integrated circuit to the gate terminal of the first transistor.
Implementations may include one or more of the following features. The method further including: applying an AC voltage to the input pad of the integrated circuit; and capacitively coupling the AC voltage from the input pad to an input of a useful circuit disposed on the integrated circuit. The method where: capacitively coupling the ESD pulse of the first polarity includes coupling via a first capacitor coupled between the input pad and the gate terminal of the first transistor; and capacitively coupling the AC voltage includes coupling via the first capacitor, and via a second capacitor coupled between the gate terminal of the first transistor and the input of the useful circuit. The method further including: receiving an ESD pulse of a second polarity opposite the first polarity at the input pad of the integrated circuit; and clamping the input pad to the first power supply node via a bulk diode of the first transistor.
While this invention has been described with reference to illustrative embodiments, this description is not intended to be construed in a limiting sense. Various modifications and combinations of the illustrative embodiments, as well as other embodiments of the invention, will be apparent to persons skilled in the art upon reference to the description. It is therefore intended that the appended claims encompass any such modifications or embodiments.
This application is a continuation of U.S. patent application Ser. No. 14/871,007, entitled “Semiconductor ESD Protection Device and Method,” filed on Sep. 30, 2015, which application is hereby incorporated herein by reference in its entirety.
Number | Date | Country | |
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Parent | 14871007 | Sep 2015 | US |
Child | 16434479 | US |