Claims
- 1. A semiconductor imaging system, comprising:
a sensor having one or more receptors to generate digital output for an image, the one or more receptors associated with a pitch parameter; an image transfer medium having a diffraction-limited parameter adapted to the pitch parameter; and a semiconductor workstation that analyzes critical dimensions from the image.
- 2. The system of claim 1, further comprising an excitation source including at least one of about a 248 nm source, about a 193 nm source, about a 157 nm source, and about a 90 nm source.
- 3. The system of claim 2, further comprising a material that acts as a down-converter for the excitation source.
- 4. The system of claim 1, further comprising an epi-illumination source that is employed to analyze the critical dimensions.
- 5. The system of claim 2, further comprising a pulsed source that is associated with a component to enable at least one of synchronous and asynchronous capture of the image.
- 6. The system of claim 1, further comprising a robotic component to facilitate handling of a semiconductor specimen or a mask specimen.
- 7. The system of claim 1, further comprising an industrial control system to facilitate processing of an image specimen.
- 8. The system of claim 1, further comprising an application program that performs at least one of a comparative analysis, a correlative analysis, a cause and effect analysis, a learning system analysis, and a parametric analysis to identify or analyze a specimen.
- 9. The system of claim 1, further comprising a display to present the image to a user, the display including at least one of a computer monitor, a CRT, an LCD display, a TV, an organic light emitting device display (OLED), a semi-conductor image display device, a head-mount display, a flexible display, a monocular display, a binocular display, a projection display, a retinal display, and a Head-Up display.
- 10. The system of claim 1, the image is transferred across a network for analysis by at least one of a user and a computer.
- 11. The system of claim 10, the network is at least one of a local area network, an Internet, an Intranet, and a wireless network.
RELATED APPLICATION
[0001] This application is a continuation-in-part of U.S. patent application of Ser. No. 10/616,829 which was filed Jul. 10, 2003 entitled IMAGING SYSTEM, METHODOLOGY, AND APPLICATIONS EMPLOYING RECIPROCAL SPACE OPTICAL DESIGN, which is a continuation-in-part of U.S. patent application Ser. No. 10/189,326 which was filed Jul. 2,2002 entitled IMAGING SYSTEM AND METHODOLOGY EMPLOYING RECIPROCAL SPACE OPTICAL DESIGN, which is a continuation-in-part of U.S. patent application Ser. No. 09/900,218, which was filed Jul. 6, 2001, entitled IMAGING SYSTEM AND METHODOLOGY EMPLOYING RECIPROCAL SPACE OPTICAL DESIGN, all of which are incorporated herein by reference.
Continuation in Parts (3)
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Number |
Date |
Country |
Parent |
10616829 |
Jul 2003 |
US |
Child |
10758837 |
Jan 2004 |
US |
Parent |
10189326 |
Jul 2002 |
US |
Child |
10616829 |
Jul 2003 |
US |
Parent |
09900218 |
Jul 2001 |
US |
Child |
10189326 |
Jul 2002 |
US |