Number | Date | Country | Kind |
---|---|---|---|
6-179239 | Jul 1994 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
5180469 | Abe | Jan 1993 | |
5261966 | Mashimo et al. | Nov 1993 | |
5423944 | Wong | Jun 1995 | |
5489557 | Jolley | Feb 1996 | |
5494849 | Iyer et al. | Feb 1996 | |
5516730 | Saeed et al. | May 1996 | |
5567244 | Lee et al. | Oct 1996 | |
5589422 | Bhat | Dec 1996 | |
5601656 | Li | Feb 1997 | |
5603849 | Li | Feb 1997 | |
5626681 | Nakano et al. | May 1997 | |
5665168 | Nakano et al. | Sep 1997 |
Number | Date | Country |
---|---|---|
4144131 | May 1992 | JPX |
4367593 | Dec 1992 | JPX |
5243195 | Sep 1993 | JPX |
7297163 | Nov 1995 | JPX |
Entry |
---|
Donohue, J.A., et al., "Gas Chromatographic Determination of Ozone and Other Products from the Electrolysis of Wet Hydrogen Fluoride", Analytical Chemistry, 38(13), 1858-1860, Dec. 1966. |
Wong, M., et al., "Silicon Etch Using Vapor Phas HF/H2O and O3", Journal of the Electrochemical Society, 140(2), 567-570, Feb. 1993. |
Foller, Peter C., et al., "The Anodic Evolution of Ozone", Journal of the Electrochemical Society, 129(3), 506-515, Mar. 1992. |
Kirk-Othmer, Encyclopedia of Chemical Technology, 3rd ed., vol. 10, pp. 733-753. (Month unknown.), 1980. |