Number | Date | Country | Kind |
---|---|---|---|
63-165812 | Jul 1988 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4401054 | Matsuo | Aug 1983 | |
4461783 | Yamazaki | Jul 1984 | |
4808258 | Otsubo | Feb 1989 |
Number | Date | Country |
---|---|---|
56-15535 | Dec 1981 | JPX |
Entry |
---|
Bruce, "Anisotropy Control in Dry Etching", Solid State Technology/Oct. 1981, pp. 64-68. |