Field of the Invention
The present invention relates to a sensing chip package and in particular relates to a proximity sensing chip package and a manufacturing method thereof.
Description of the Related Art
With the developments of technology, portable devices like PDA, smart phone or MP4 become more and more popular. Most of the portable devices are equipped with touch screens with proximity sensors to detect objects or obstacles in the front by an optical sensing way. The proximity sensor can be applied in smart phone or handset phone to judge if the user is close to telephone transmitter or the microphone, or be applied in a house-keeping robot to judge if there is any furniture or people in front of it.
In order to resolve above-mentioned problems, this invention provides a novel sensing chip package and a manufacturing method thereof, and in particular provides a proximity sensing chip package and a manufacturing thereof, which is characterized by forming a light blocking layer surrounding the light emitting device of the sensor to block the lateral light emitted by the light emitting device to reduce the interference of the lateral light and enhance the sensitivity of the light sensing device.
A feature of this invention provides a sensing chip package, comprising: a sensor, having a first top surface and a first bottom surface opposite to each other, comprising a light emitting device and a light sensing device are depicted adjacent to the first top surface and spaced with a pre-determined distance, and a first conductive pad adjacent to the light emitting device and a second conductive pad adjacent to the light sensing device, whereby the light sensing device having a second top surface and a second bottom opposite to each other; and a light blocking layer formed on the first top surface of the sensor and surrounded the light emitting device, comprising a cap layer having a third top surface and a third bottom surface opposite to each other formed on the first top surface of the sensor, and the cap layer having a trench with an inner wall and a bottom wall not higher than the second bottom surface of the light sensing device; a adhesive layer sandwiched between the cap layer and the first top surface of the sensor to bound the cap layer to the first top surface of the sensor; and a light blocking material layer overlaid the inner wall of the trench or gap-filled in the trench.
Another of this invention provides a sensing chip package as mentioned above, wherein the sensor is a proximity sensor.
Another of this invention provides a sensing chip package as mentioned above, wherein the light blocking material layer is a black resistant which can absorb light.
Another of this invention provides a sensing chip package as mentioned above, wherein the light blocking material layer is a metal with a high reflection coefficient or a distributed Bragg reflector.
Another of this invention provides a sensing chip package as mentioned above, wherein the light emitting device is a LED.
Another of this invention provides a sensing chip package as mentioned above, wherein the LED is a surface mounted LED selected from mesa-type LED, vertical-type LED and flip-chip LED mounted on the first top surface of the sensor by surface mounting technology.
Another of this invention provides a sensing chip package as mentioned above, wherein the LED is a non-surface mounted LED buried in the wafer and adjacent to the first top surface.
Another of this invention provides a sensing chip package as mentioned above, wherein the LED is an IR LED.
Another of this invention provides a sensing chip package as mentioned above, wherein the light sensing device is an IR sensor.
Another of this invention provides a sensing chip package as mentioned above, further comprising a first solder wire connecting to the first conductive pad and a second solder wire connecting to the second conductive pad.
Another of this invention provides a sensing chip package as mentioned above, further comprising: an insulating layer formed on the first bottom surface of the sensor, having a first through hole exposing the first conductive pad and a second through hole exposing the second conductive pad; a re-distribution layer formed on the insulating layer and interconnected the first conductive pad and the second conductive pad via the first through hole and the second through hole respectively; a passivation layer overlaid the re-distribution layer, the first through hole, the second through hole, wherein the passivation layer has a first opening and a second opening exposing the re-distribution layer; and a first conductive structure formed in the first opening and a second conductive structure formed in the second opening and respectively interconnected to the re-distribution layer.
Another of this invention provides a sensing chip package as mentioned above, wherein the first structure and the second structure comprise solder ball, solder bumps and conductive pillars.
Another of this invention provides a sensing chip package as mentioned above, further comprising: an insulating layer formed on the first bottom surface of the sensor, having a first notch exposing an edge of the first conductive pad and a second notch exposing an edge of the second conductive pad, and part of the third bottom surface of the cap layer; a re-distribution layer formed on the insulating layer, the first notch and the second notch to interconnect the exposed edges of the first and the second conductive pads respectively; a passivation layer overlaid the re-distribution layer, the first notch and the second notch, wherein the passivation layer has a third opening and a fourth opening exposing the re-distribution layer; and a third conductive structure formed in the third opening and a fourth conductive structure formed in the fourth opening and respectively interconnected to the re-distribution layer.
Another of this invention provides a sensing chip package as mentioned above, wherein the third structure and the fourth structure comprise solder ball, solder bumps and conductive pillars.
Another feature of this invention provides a method of manufacturing a sensing chip package, comprising the steps of: providing a wafer having a plurality of sensing areas, each sensing area comprising a sensor having a first top surface and a first bottom surface opposite to each other comprising a light emitting device and a light sensing device are depicted adjacent to the first top surface and spaced with a pre-determined distance, and a first conductive pad adjacent to the light emitting device and a second conductive pad adjacent to the light sensing device, whereby the light sensing device having a second top surface and a second bottom opposite to each other; providing a cap layer having a third top surface and a third bottom surface opposite to each other, and the third bottom surface corresponding to each of the sensing areas including a first cavity corresponding to the light emitting device and a second cavity corresponding to the light sensing device; bonding the third bottom surface of the cap layer to the first top surface of the wafer by sandwiched an adhesive layer therebetween; forming a trench passing through the cap layer, the adhesive layer and part of the first top surface of the wafer and surrounding the light emitting device, wherein the trench has an inner wall and a bottom wall not higher than the light sensing device; formed on the first top surface of the sensor, and the cap layer having a trench with an inner wall and a bottom wall not higher than the second bottom surface of the light sensing device; forming a light blocking material layer to overlay the inner wall of the trench or gap-fill into the trench; removing the third top surface of the cap layer and the light blocking layer above the first cavity and the second cavity to form a light blocking layer surrounding the light emitting device.
Another feature of this invention provides a method of manufacturing a sensing chip package as mentioned above, wherein the sensor is a proximity sensor.
Another feature of this invention provides a method of manufacturing a sensing chip package as mentioned above, wherein the light blocking material layer is a black resistant which can absorb light.
Another feature of this invention provides a method of manufacturing a sensing chip package as mentioned above, wherein the light blocking material layer is a metal with a high reflection coefficient or a distributed Bragg reflector.
Another feature of this invention provides a method of manufacturing a sensing chip package as mentioned above, wherein the light emitting device is a LED.
Another feature of this invention provides a method of manufacturing a sensing chip package as mentioned above, wherein the LED is a surface mounted LED selected from mesa-type LED, vertical-type LED and flip-chip LED mounted on the first top surface of the sensor by surface mounting technology.
Another feature of this invention provides a method of manufacturing a sensing chip package as mentioned above, wherein the LED is a non-surface mounted LED buried in the wafer and adjacent to the first top surface.
Another feature of this invention provides a method of manufacturing a sensing chip package as mentioned above, wherein the LED is an IR LED.
Another feature of this invention provides a method of manufacturing a sensing chip package as mentioned above, wherein the light sensing device is an IR sensor.
Another feature of this invention provides a method of manufacturing a sensing chip package as mentioned above, further comprising a first solder wire connecting to the first conductive pad and a second solder wire connecting to the second conductive pad.
Another feature of this invention provides a method of manufacturing a sensing chip package as mentioned above, further comprising a step of scribing the sensing areas to generate a plurality of sensing chip packages.
Another feature of this invention provides a method of manufacturing a sensing chip package as mentioned above, further comprising the steps of: thinning the first bottom surface of the wafer; forming an insulating layer on the first bottom surface of the wafer, and the insulating having a first through hole exposing the first conductive pad and a second through hole exposing the second conductive pad; forming a re-distribution layer on the insulating layer to interconnect the first conductive pad and the second conductive pad via the first through hole and second through hole respectively; forming a passivation layer to overlay the re-distribution layer, the first through hole and the second through hole, and the passivation having a first opening and a second opening; and forming a first conductive structure in the first opening and a second conductive structure in the second opening to interconnect the re-distribution layer respectively.
Another feature of this invention provides a method of manufacturing a sensing chip package as mentioned above, wherein the first structure and the second structure comprise solder ball, solder bumps and conductive pillars.
Another feature of this invention provides a method of manufacturing a sensing chip package as mentioned above, further comprising a step of scribing the sensing areas to generate a plurality of sensing chip packages.
Another feature of this invention provides a method of manufacturing a sensing chip package as mentioned above, further comprising the steps of: thinning the first bottom surface of the wafer; forming a third cavity exposing the first conductive pad and a fourth cavity exposing the second conductive pad on the first bottom surface of the wafer; forming an insulating layer on the first bottom surface of the wafer and overlaying the third cavity and the fourth cavity; removing the insulating in the third and the fourth cavities and part of the first and the second conductive pads, part of the adhesive layer and part of the cap layer above the third and the fourth cavities by notching to respectively form a first notch exposing an edge of the first conductive pad and a second notch exposing an edge of the second conductive pad; forming a re-distribution layer on the insulating layer, the first notch and the second notch to interconnect the exposed edges of the first and the second conductive pads respectively; forming a passivation layer to overlay the re-distribution layer, the first notch and the second notch, and the passivation having a third opening and a fourth opening; and forming a third conductive structure in the third opening and a fourth conductive structure in the fourth opening to interconnect the re-distribution layer respectively.
Another feature of this invention provides a method of manufacturing a sensing chip package as mentioned above, wherein the third structure and the fourth structure comprise solder ball, solder bumps and conductive pillars.
Another feature of this invention provides a method of manufacturing a sensing chip package as mentioned above, further comprising a steps of scribing the sensing areas to generate a plurality of sensing chip packages.
The making and using of the embodiments of the present disclosure are discussed in detail below. However, it should be noted that the embodiments provide many applicable inventive concepts that can be embodied in a variety of specific methods. The specific exemplary embodiments discussed are merely illustrative of specific methods to make and use the embodiments, and do not limit the scope of the disclosure.
A detailed description of the proximity sensing chip package 2000 and a method of manufacturing the same according to embodiment 1 of this invention is given below with reference to the accompany
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The light emitting device 220 can be a light emitting diode (LED), such as a surface mounted LED including mesa-type LED, vertical-type LED or flip-chip LED mounted on the first top surface 200a of the sensing chip area 205, or a non-surface mounted LED buried in the wafer 200 adjacent to the first top surface 200a of the sensing chip area 205. The light emitting device 220 of this embodiment is an IR LED, and the light sensing device 210 of this embodiment is an IR sensor.
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As the top view of the proximity sensing chip package 2000 illustrated in
A detailed description of the proximity sensing chip package 3000 and a method of manufacturing the same according to embodiment 2 of this invention is given below with reference to the accompany
The feature of this embodiment 2 is to treat the first bottom surface 200b of the wafer 200 of the structure as illustrated in
Finally, each sensing area 205 of the wafer 200 is scribed to form a plurality of sensing chip package 3000 as illustrated in
Similarly, the light sensing device 210 will not be interfered by the later light emitted by the light emitting device 220. Accordingly, the proximity sensing chip package 3000 according to the embodiment 2 of this invention is more sensitive than the conventional proximity sensing device 1000 illustrated in
A detailed description of the proximity sensing chip package 4000 and a method of manufacturing the same according to embodiment 3 of this invention is given below with reference to the accompany
The feature of this embodiment 3 is to treat the first bottom surface 200b of the wafer 200 of the structure as illustrated in
Finally, each sensing area 205 of the wafer 200 is scribed to form a plurality of sensing chip package 4000 as illustrated in
Similarly, the light sensing device 210 will not be interfered by the later light emitted by the light emitting device 220. Accordingly, the proximity sensing chip package 3000 according to the embodiment 2 of this invention is more sensitive than the conventional proximity sensing device 1000 illustrated in
A detailed description of the proximity sensing chip package 5000 and a method of manufacturing the same according to embodiment 4 of this invention is given below with reference to the accompany
As illustrated in
Similarly, the light sensing device 210 will not be interfered by the later light emitted by the light emitting device 220. Accordingly, the proximity sensing chip package 5000 according to the embodiment 4 of this invention is more sensitive than the conventional proximity sensing device 1000 illustrated in
A detailed description of the proximity sensing chip package 6000 and a method of manufacturing the same according to embodiment 5 of this invention is given below with reference to the accompany
As illustrated in
Similarly, the light sensing device 210 will not be interfered by the later light emitted by the light emitting device 220. Accordingly, the proximity sensing chip package 6000 according to the embodiment 5 of this invention is more sensitive than the conventional proximity sensing device 1000 illustrated in FIGS. 1A˜1B.
A detailed description of the proximity sensing chip package 6000 and a method of manufacturing the same according to embodiment 6 of this invention is given below with reference to the accompany
As illustrated in
Similarly, the light sensing device 210 will not be interfered by the later light emitted by the light emitting device 220. Accordingly, the proximity sensing chip package 5000 according to the embodiment 4 of this invention is more sensitive than the conventional proximity sensing device 1000 illustrated in
While the invention has been described by way of example and in terms of the preferred embodiments, it is to be understood that the invention is not limited to the disclosed embodiments. To the contrary, it is intended to cover various modifications and similar arrangements (as would be apparent to those skilled in the art). Therefore, the scope of the appended claims should be accorded the broadest interpretation so as to encompass all such modifications and similar arrangements.
This application claims the benefit of U.S. provisional application No. 62/204,175, filed on Aug. 12, 2015, and the entirety of which is incorporated by reference herein.
Number | Date | Country | |
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62204175 | Aug 2015 | US |