Number | Date | Country | Kind |
---|---|---|---|
4106288 | Feb 1991 | DEX |
Number | Name | Date | Kind |
---|---|---|---|
3859575 | Lee et al. | Jan 1975 | |
4507973 | Barr et al. | Apr 1985 | |
4562742 | Bell | Jan 1986 | |
4719538 | Cox | Jan 1988 | |
4741214 | Vidmantas | May 1988 | |
4951510 | Holm-Kennedy et al. | Aug 1990 |
Number | Date | Country |
---|---|---|
1622788 | Feb 1989 | SUX |
Entry |
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H. Guckel et al. of Univ. of Wisconsin Center for Applied Microelectronics, "Fine Grained Polysilicon and its Application to Planar Pressure Transducers", in Transducers '87 pp. 277-282. |