BRIEF DESCRIPTION OF THE DRAWINGS/FIGURES
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention. In the drawings:
FIG. 1 illustrates a cross sectional view of one embodiment of the accelerometer of the present invention.
FIG. 2 illustrates a cross sectional view in the direction of the arrow E in FIG. 1.
FIGS. 3A and 3B illustrate the construction of the sensing element of the accelerometer of one embodiment of the present invention.
FIG. 4 illustrates a cross section along the line G-G of FIG. 2.
FIG. 5 illustrates a view along the arrow C in FIG. 1, which shows a base mounting surface A of the accelerometer.
FIG. 6 illustrates a view in the direction of the arrow D in FIG. 1, which shows a base mounting surface B of the accelerometer.
FIG. 7 illustrates an exemplary electrical schematic of the accelerometer of FIG. 1.
FIG. 8 illustrates a structural schematic of mechanical tuning of the zero bias drift of the angular displacement sensor.
FIGS. 9A and 9B illustrate the principle of kinematic tuning of the zero bias drift of the angular displacement sensor.