Claims
- 1. The combination with apparatus for cathodically sputtering thin films of a selected coating material from a cathode onto the upper surface of glass sheets in a coating chamber containing a low pressure ionized gas atmosphere, and a metal platen having a major upper supporting surface on which the glass sheet is freely supported horizontally in contact therewith during the coating of said glass sheet, the improvement which comprises a horizontally elongated substanially closed housing having an entrance end for receiving the glass sheets and an exit end positioned in line with and contiguous to the entrance end of said sputtering apparatus, one side wall of said housing being provided with a horizontally elongated opening through which the platens are introduced horizontally into said housing, a first conveyor means extending longitudinally within said housing for receiving the platens horizontally thereon and for delivering them through the exit end of said housing directly into the entrance end of said sputtering apparatus, means positioned exteriorly of and in close proximity to said opening in the side wall of said housing for cleaning the entire major supporting surface of said platens as said platens pass into said housing through said opening in the side wall thereof and before they are received on said conveyor means, a second conveyor means located in said housing for receiving the glass sheets to be coated horizontally thereon as they enter the entrance end thereof, said second conveyor means being located above said first conveyor means in spaced parallel relation thereto and terminating at its inner end short of the inner end of said first conveyor means, and means for driving the first and second conveyor means forwardly at substantially the same speed such that as the major portion of the leading end of the glass sheet passes beyond said second conveyor means it will drop onto the platen and when the trailing end of the glass sheet leaves the second conveyor means it will also drop onto said platen and be carried forwardly to said coating apparatus.
Parent Case Info
This is a continuation of application Ser. No. 822,736, filed Aug. 8, 1977, now abandoned, which is a continuation of application Ser. No. 674,911, filed Apr. 8, 1976, now abandoned.
US Referenced Citations (8)
Non-Patent Literature Citations (1)
Entry |
Western Electric Technical Dig. No. 19, 7' 1970, "Method of Improving the Quality on In-Line Sputtered Thin Films by Sonic Vacuuming", p. 3. |
Continuations (2)
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Number |
Date |
Country |
Parent |
822736 |
Aug 1977 |
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Parent |
674911 |
Apr 1976 |
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