Apparatus specially adapted for continuous coating Arrangements for maintaining the vacuum

Industry

CPC
C23C14/56

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/56Apparatus specially adapted for continuous coating Arrangements for maintaining the vacuum

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Material deposition apparatus, method of depositing material on a s...
- Patent number 12,203,164
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Tamara Heintz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for preparing ultrathin metal lithium foil
- Patent number 12,195,824
- Issue date Jan 14, 2025
- SHENZHEN YANYI NEW MATERIALS CO., LTD.
- Kai Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum-coating system and method for coating a band-type material
- Patent number 12,195,838
- Issue date Jan 14, 2025
- SMS group GMBH
- Lutz Kümmel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cluster tool for production-worthy fabrication of Dolan bridge quan...
- Patent number 12,201,037
- Issue date Jan 14, 2025
- International Business Machines Corporation
- Stephen W. Bedell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas injection process kit to eliminate arcing and improve uniform g...
- Patent number 12,183,560
- Issue date Dec 31, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Versatile vacuum deposition sources and system thereof
- Patent number 12,157,942
- Issue date Dec 3, 2024
- Ascentool, Inc.
- George Xinsheng Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus, system and method to reduce crazing
- Patent number 12,159,772
- Issue date Dec 3, 2024
- Advanced Energy Industries, Inc.
- Joshua B. Pankratz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum processing device
- Patent number 12,152,299
- Issue date Nov 26, 2024
- IHI Corporation
- Akihiko Yoshimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum deposition facility and method for coating a substrate
- Patent number 12,139,784
- Issue date Nov 12, 2024
- Arcelormittal
- Eric Silberberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum deposition facility and method for coating a substrate with...
- Patent number 12,129,542
- Issue date Oct 29, 2024
- Arcelormittal
- Sergio Pace
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetic levitation system, base and carrier of a magnetic levitati...
- Patent number 12,119,173
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Henning Aust
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Analyte sensors and methods for fabricating analyte sensors
- Patent number 12,110,583
- Issue date Oct 8, 2024
- Medtronic MiniMed, Inc.
- Santhisagar Vaddiraju
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Dual reverse pulse sputtering system
- Patent number 12,112,931
- Issue date Oct 8, 2024
- Advanced Energy Industries, Inc.
- Doug Pelleymounter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems for depositing coatings on surfaces and associated methods
- Patent number 12,104,241
- Issue date Oct 1, 2024
- Continental Reifen Deutschland GmbH
- Andrew Grant
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Inverted cylindrical magnetron (ICM) system and methods of use
- Patent number 12,106,924
- Issue date Oct 1, 2024
- Vactronix Scientific, LLC.
- Tianzong Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum deposition facility and method for coating a substrate
- Patent number 12,091,739
- Issue date Sep 17, 2024
- Arcelormittal
- Eric Silberberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum deposition facility and method for coating a substrate
- Patent number 12,091,744
- Issue date Sep 17, 2024
- Arcelormittal
- Eric Silberberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carrier with vertical grid for supporting substrates in coater
- Patent number 12,068,142
- Issue date Aug 20, 2024
- View, Inc.
- Bo Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,065,725
- Issue date Aug 20, 2024
- Kioxia Corporation
- Yuta Konno
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Roller for transporting a flexible substrate, vacuum processing app...
- Patent number 12,060,634
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Stefan Bangert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum deposition facility and method for coating a substrate
- Patent number 12,054,821
- Issue date Aug 6, 2024
- Arcelormittal
- Eric Silberberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for manufacturing metal gate structures
- Patent number 12,054,823
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chen-Yu Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-patterned sputter traps and methods of making
- Patent number 12,051,573
- Issue date Jul 30, 2024
- Honeywell International Inc.
- James L. Koch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film formation apparatus and moisture removal method thereof
- Patent number 12,043,898
- Issue date Jul 23, 2024
- Shibaura Mechatronics Corporation
- Shohei Tanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum processing device
- Patent number 12,031,211
- Issue date Jul 9, 2024
- IHI Corporation
- Akihiko Yoshimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning of SIN with CCP plasma or RPS clean
- Patent number 12,027,354
- Issue date Jul 2, 2024
- Applied Materials, Inc.
- Jothilingam Ramalingam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport system
- Patent number 12,015,319
- Issue date Jun 18, 2024
- Canon Kabushiki Kaisha
- Takeshi Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition device
- Patent number 12,006,568
- Issue date Jun 11, 2024
- THERMALYTICA, INC.
- Kazuhide Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputter trap having a thin high purity coating layer and method of...
- Patent number 11,981,991
- Issue date May 14, 2024
- Honeywell International Inc.
- Jaeyeon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition equipment with shielding mechanism
- Patent number 11,981,990
- Issue date May 14, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER
- Publication number 20250014873
- Publication date Jan 9, 2025
- View, Inc.
- Bo Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING LINE FOR DEPOSITING THIN-FILM COATINGS
- Publication number 20250011919
- Publication date Jan 9, 2025
- The Batteries Sp. Z.O.O.
- Ayrat K. KHISAMOV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS
- Publication number 20240417848
- Publication date Dec 19, 2024
- CONTINENTAL REIFEN DEUTSCHLAND GMBH
- Andrew Grant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS
- Publication number 20240417847
- Publication date Dec 19, 2024
- CONTINENTAL REIFEN DEUTSCHLAND GMBH
- Andrew Grant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM DEPOSITION FACILITY AND METHOD FOR COATING A SUBSTRATE
- Publication number 20240401188
- Publication date Dec 5, 2024
- ARCELORMITTAL
- Eric SILBERBERG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM DEPOSITION FACILITY AND METHOD FOR COATING A SUBSTRATE
- Publication number 20240401183
- Publication date Dec 5, 2024
- ARCELORMITTAL
- Eric SILBERBERG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING A COATED PERFORATED STEEL STRIP
- Publication number 20240401187
- Publication date Dec 5, 2024
- VOESTALPINE STAHL GMBH
- Wolfgang Burgstaller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor cleaning step
- Publication number 20240401191
- Publication date Dec 5, 2024
- United Semiconductor (Xiamen) Co., Ltd.
- William Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20240392430
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao CHENG
- B08 - CLEANING
Information Patent Application
MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT
- Publication number 20240395514
- Publication date Nov 28, 2024
- Prashant AGARWAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION (PVD) SYSTEM AND METHOD OF PROCESSING TARGET
- Publication number 20240376592
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Sheng-Ying WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DYNAMIC SEAL SYSTEM FOR A VACUUM PROCESSING SYSTEM
- Publication number 20240368752
- Publication date Nov 7, 2024
- Plasma-Therm NES LLC
- Sarpangala Hariharakeshava Hegde
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS, AND METHOD FOR CLEANING FILM-FORMING APPARATUS
- Publication number 20240360543
- Publication date Oct 31, 2024
- TOKYO ELECTRON LIMITED
- Masato SHINADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR MANUFACTURING METAL GATE STRUCTURES
- Publication number 20240337012
- Publication date Oct 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Yu Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE TREATMENT APPARATUS
- Publication number 20240318303
- Publication date Sep 26, 2024
- SHIBAURA MACHINE CO., LTD.
- Kazuhiro FUKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING EQUIPMENT AND COATING METHOD THEREOF
- Publication number 20240287670
- Publication date Aug 29, 2024
- Zhejiang Shintown Industry Co., Ltd
- Mingwei Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRESSING TOOL AND METHOD FOR PRODUCING A PRESS PLATE
- Publication number 20240278523
- Publication date Aug 22, 2024
- Hueck Rheinische GmbH
- Ali KAOUK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING PLANT FOR COATING A PLANAR OBJECT AND A METHOD FOR COATING...
- Publication number 20240271268
- Publication date Aug 15, 2024
- ThyssenKrupp Steel Europe AG
- Christian Schwerdt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHOD FOR PRODUCING THIN-FILM CATALYST
- Publication number 20240261773
- Publication date Aug 8, 2024
- SUZHOU TAONE SINCERE NANOMATERIAL TECHNOLOGY CO., LTD.
- Ruoqi QIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS KIT HAVING TALL DEPOSITION RING FOR PVD CHAMBER
- Publication number 20240242947
- Publication date Jul 18, 2024
- Applied Materials, Inc.
- David GUNTHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITE FILM MANUFACTURING METHOD AND ORGANIC/INORGANIC HYBRID FI...
- Publication number 20240240305
- Publication date Jul 18, 2024
- RIKEN TECHNOS CORPORATION
- Kohei NAKASHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING AN ELECTROCHEMICAL COMPONENT COMPRISING A...
- Publication number 20240234676
- Publication date Jul 11, 2024
- Pulsedeon Oy
- Ville KEKKONEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR MANUFACTURING PLURALITY OF INTEGRATED CIRCUITS
- Publication number 20240234185
- Publication date Jul 11, 2024
- Pragmatic Printing Ltd.
- Richard David PRICE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETRON SPUTTER DEVICE
- Publication number 20240203715
- Publication date Jun 20, 2024
- DAEGU GYEONGBUK INSTITUTE OF SCIENCE & TECHNOLOGY
- June Seo KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLAT STEEL PRODUCT HAVING AN IMPROVED ZINC COATING
- Publication number 20240200184
- Publication date Jun 20, 2024
- ThyssenKrupp Steel Europe AG
- Stefan BIENHOLZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING DEVICE OF DISPLAY DEVICE
- Publication number 20240206307
- Publication date Jun 20, 2024
- Japan Display Inc.
- Takanobu TAKENAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STABLE GROUND ANODE APERTURE FOR THIN FILM PROCESSING
- Publication number 20240191341
- Publication date Jun 13, 2024
- INTEVAC, INC.
- Samuel D. Harkness
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACT...
- Publication number 20240186064
- Publication date Jun 6, 2024
- Evatec AG
- Claudiu Valentin FALUB
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES
- Publication number 20240183028
- Publication date Jun 6, 2024
- Applied Materials, Inc.
- Xiangjin XIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE
- Publication number 20240186160
- Publication date Jun 6, 2024
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Apparatus specially adapted for continuous coating Arrangements for maintaining the vacuum

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Material deposition apparatus, method of depositing material on a s...

Method and device for preparing ultrathin metal lithium foil

Vacuum-coating system and method for coating a band-type material

Cluster tool for production-worthy fabrication of Dolan bridge quan...

Gas injection process kit to eliminate arcing and improve uniform g...

Versatile vacuum deposition sources and system thereof

Apparatus, system and method to reduce crazing

Vacuum processing device

Vacuum deposition facility and method for coating a substrate

Vacuum deposition facility and method for coating a substrate with...

Magnetic levitation system, base and carrier of a magnetic levitati...

Analyte sensors and methods for fabricating analyte sensors

Dual reverse pulse sputtering system

Systems for depositing coatings on surfaces and associated methods

Inverted cylindrical magnetron (ICM) system and methods of use

Vacuum deposition facility and method for coating a substrate

Vacuum deposition facility and method for coating a substrate

Carrier with vertical grid for supporting substrates in coater

Film forming apparatus and film forming method

Roller for transporting a flexible substrate, vacuum processing app...

Vacuum deposition facility and method for coating a substrate

Apparatus and method for manufacturing metal gate structures

Multi-patterned sputter traps and methods of making

Film formation apparatus and moisture removal method thereof

Vacuum processing device

Cleaning of SIN with CCP plasma or RPS clean

Transport system

Vapor deposition device

Sputter trap having a thin high purity coating layer and method of...

Deposition equipment with shielding mechanism

Patents Applicationslast 30 patents

CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER

PROCESSING LINE FOR DEPOSITING THIN-FILM COATINGS

SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS

SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS

VACUUM DEPOSITION FACILITY AND METHOD FOR COATING A SUBSTRATE

VACUUM DEPOSITION FACILITY AND METHOD FOR COATING A SUBSTRATE

METHOD FOR PRODUCING A COATED PERFORATED STEEL STRIP

Semiconductor cleaning step

DEPOSITION SYSTEM AND METHOD

MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT

PHYSICAL VAPOR DEPOSITION (PVD) SYSTEM AND METHOD OF PROCESSING TARGET

DYNAMIC SEAL SYSTEM FOR A VACUUM PROCESSING SYSTEM

FILM-FORMING APPARATUS, AND METHOD FOR CLEANING FILM-FORMING APPARATUS

APPARATUS AND METHOD FOR MANUFACTURING METAL GATE STRUCTURES

SURFACE TREATMENT APPARATUS

COATING EQUIPMENT AND COATING METHOD THEREOF

PRESSING TOOL AND METHOD FOR PRODUCING A PRESS PLATE

COATING PLANT FOR COATING A PLANAR OBJECT AND A METHOD FOR COATING...

DEVICE AND METHOD FOR PRODUCING THIN-FILM CATALYST

PROCESS KIT HAVING TALL DEPOSITION RING FOR PVD CHAMBER

COMPOSITE FILM MANUFACTURING METHOD AND ORGANIC/INORGANIC HYBRID FI...

METHOD FOR MANUFACTURING AN ELECTROCHEMICAL COMPONENT COMPRISING A...

SYSTEM AND METHOD FOR MANUFACTURING PLURALITY OF INTEGRATED CIRCUITS

MAGNETRON SPUTTER DEVICE

FLAT STEEL PRODUCT HAVING AN IMPROVED ZINC COATING

MANUFACTURING DEVICE OF DISPLAY DEVICE

STABLE GROUND ANODE APERTURE FOR THIN FILM PROCESSING

SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACT...

METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES

MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE