Number | Name | Date | Kind |
---|---|---|---|
3304787 | Chiku et al. | Feb 1967 | |
4071838 | Block | Jan 1978 | |
4244225 | Greenwood | Jan 1981 | |
4342227 | Petersen et al. | Aug 1982 | |
4430895 | Colton | Feb 1984 | |
4553436 | Hansson | Nov 1985 | |
4597003 | Aine et al. | Jun 1986 | |
4600934 | Aine et al. | Jul 1986 | |
4641539 | Vilimek | Feb 1987 | |
4653326 | Danel et al. | Mar 1987 | |
4670092 | Motamedi | Jun 1987 | |
4776924 | Delapierre | Oct 1988 |
Number | Date | Country |
---|---|---|
62-118260 | May 1987 | JPX |
Entry |
---|
"Tuning Forks in Silicon", by Rudolf A. Buser, Nico F. de Rooij; pp. 94 & 95 of IEEE Catalog Number 89TH0249-3, Micro Electro Mechanical Systems, dated Feb. 20-22, 1989. |
"Realization of a Mesa Array in (001) Oriented Silicon Wafers for Tactile Sensing Applications", by R. Buser, B. Stauffer, N. F. DeRooij; pp. 879 & 800 of Extended Abstracts of the Electrochemical Society, vol. 86-2, dated Oct. 19-24, 1986. |