a)-2(m) show schematic cross-sectional views illustrating a shape of the pillar portion of a single-photon generating device according to a first embodiment of the present invention.
a)-3(h) show schematic cross-sectional views illustrating an anti-reflection structure provided on a single-photon generating device, according to a first embodiment of the present invention.
a)-4(k) show schematic cross-sectional views illustrating a refection film provided on the pillar portion of a single-photon generating device, according to a first embodiment of the present invention.
a), 5(b) show schematic cross-sectional views illustrating a refection film provided on the pillar portion of a single-photon generating device, according to a first embodiment of the present invention.
c), 5(d) show schematic cross-sectional views illustrating a resonator (cavity) structure provided on the pillar portion of a single-photon generating device, according to a first embodiment of the present invention.
a)-6(i) show schematic cross-sectional views illustrating a manufacturing method of a single-photon generating device according to a first embodiment of the present invention.
a)-8(d) show schematic cross-sectional views illustrating a manufacturing method of a single-photon generating device according to a second embodiment of the present invention.
a)-9(d) show schematic cross-sectional views illustrating a position adjustment method of a quantum dot layer in a manufacturing method of a single-photon generating device, according to a second embodiment of the present invention.
a)-11(o) show schematic cross-sectional views illustrating a manufacturing method of a single-photon generating device according to a third embodiment of the present invention.
Number | Date | Country | Kind |
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2006-063054 | Mar 2006 | JP | national |