Number | Name | Date | Kind |
---|---|---|---|
4724318 | Binnig | Feb 1988 | |
4806755 | Duerig et al. | Feb 1989 | |
5085070 | Miller et al. | Feb 1992 | |
5275047 | Zabler et al. | Jan 1994 | |
5431051 | Biebl et al. | Jul 1995 | |
5438870 | Zabler et al. | Aug 1995 |
Number | Date | Country |
---|---|---|
0619494 | Oct 1994 | EPX |
4032559 | Apr 1992 | DEX |
59-171141 | Jan 1985 | JPX |
03101127 | Apr 1991 | JPX |
4369418 | Dec 1992 | JPX |
Entry |
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Kobayashi et al. "An Integrated Lateral Tunneling Unit" Micro Electro Mechanical Systems, US, New York, IEEE, Feb. 4-7, 1992, pp. 214-219. |
T. W. Kenny, et al., "Micromachined tunneling displacement transducers for physical sensors", Journal of Vacuum Science & Technology, Jul./Aug., 1993, pp. 797-802. |
W. J. Kaiser, et al. "Tunnel-Effect Displacement Sensor", NTIS Tech Notes, Apr., 1990. |