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4561172 | Slawinski | Dec 1985 | |
4812418 | Pfiester et al. | Mar 1989 | |
4980317 | Koblinger | Dec 1990 | |
5432117 | Yamamoto | Jul 1995 |
Number | Date | Country |
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0091447 | Jul 1981 | JPX |
0283147 | Dec 1986 | JPX |
0242335 | Oct 1987 | JPX |
0136349 | May 1989 | JPX |
Entry |
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Silicon Processing For The VLSI ERA, vol. 2: Process Integration; Stanley Wolf, Ph.D., Lattice Press, pp. 16-27. |
Proceedings of the Tenth Symposium On Plasma Processing, Edited By G.S. Mathad and D.W. Hess, The Electrochemical Society, Proceedings vol. 94-20, pp. 280-291. |