Claims
- 1. A solution for cleaning a polished, aluminum-containing layer, comprising water and at least one corrosion-inhibiting agent.
- 2. The solution of claim 1, wherein the water is deionized water.
- 3. The solution of claim 2, further including at least one chelating agent.
- 4. The solution of claim 3, wherein the at least one chelating agent is citric acid, EDTA, or a salt thereof.
- 5. The solution of claim 2, further including at least one buffer.
- 6. The solution of claim 5, wherein the at least one buffer is carbonic acid, ammonium hydroxide, potassium hydroxide, or trimethylammoniumhydroxide.
- 7. The solution of claim 6, wherein the at least one buffer is trimethylammoniumhydroxide.
- 8. The solution of claim 2, further including at least one oxidant.
- 9. The solution of claim 8, wherein the at least one oxidant is ammonium persulfate.
- 10. The solution of claim 2, further including at least one antioxidant.
- 11. The solution of claim 10, wherein the at least one antioxidant is ascorbic acid.
- 12. The solution of claim 2, further including at least one surfactant.
- 13. The solution of claim 2, including adding ozone to the deionized water.
- 14. The solution of claim 1, wherein the at least one corrosion-inhibiting agent is citric acid, malic acid, tartaric acid, or a salt thereof.
- 15. The solution of claim 14, wherein the at least one corrosion-inhibiting agent is citric acid.
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a divisional of application Ser. No. 09/841,973, filed Apr. 25, 2001, pending, which is a divisional of application Ser. No. 09/153,053, filed Sep. 15, 1998, now U.S. Pat. No. 6,265,781 B1, issued Jul. 24, 2001.