Number | Date | Country | Kind |
---|---|---|---|
86 14124 | Oct 1986 | FRX |
Number | Name | Date | Kind |
---|---|---|---|
4210401 | Batten | Jul 1980 |
Entry |
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Gardner et al., "Automatic Infrared Ellipsometer for Characterizing Films on Multilayer Surfaces", IBM Tech. Discl. Bull., vol. 16, No. 6, p. 1959, 11/73. |