Ellipsometry

Industry

CPC
G01N21/211

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GPHYSICS G01Measuring instruments G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES G01N21/00Investigating or analysing materials by the use of optical means

Current Industry

G01N21/211Ellipsometry

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Gallium arsenide substrate comprising a surface oxide layer with im...
- Patent number 12,205,815
- Issue date Jan 21, 2025
- Freiberger Compound Materials GmbH
- Wolfram Fliegel
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Device and method for multi-reflection solution immersed silicon-ba...
- Patent number 12,152,982
- Issue date Nov 26, 2024
- Korea Research Institute of Standards and Science
- Hyun Mo Cho
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 12,138,742
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Prayudi Lianto
- B24 - GRINDING POLISHING
Information Patent Grant
Cooperative polarization skylight background radiation measurement...
- Patent number 12,135,277
- Issue date Nov 5, 2024
- Hefei Institutes of Physical Science, CAS
- Congming Dai
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Apparatus for generating model for spectroscopic ellipsometry const...
- Patent number 12,105,028
- Issue date Oct 1, 2024
- AUROS TECHNOLOGY, INC.
- Sang Jun Kim
- G01 - MEASURING TESTING
Information Patent Grant
Method for measuring optical constants of thin film of fluorine-con...
- Patent number 12,105,018
- Issue date Oct 1, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takashi Uchida
- G01 - MEASURING TESTING
Information Patent Grant
Annular apodizer for small target overlay measurement
- Patent number 12,105,431
- Issue date Oct 1, 2024
- KLA Corporation
- Itay Gdor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical metrology models for in-line film thickness measurements
- Patent number 12,062,583
- Issue date Aug 13, 2024
- Applied Materials Israel Ltd.
- Eric Chin Hong Ng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Effective cell approximation model for logic structures
- Patent number 12,013,350
- Issue date Jun 18, 2024
- Onto Innovation Inc.
- Kevin Eduard Heidrich
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Imaging ellipsometry (IE)-based inspection method and method of fab...
- Patent number 11,972,960
- Issue date Apr 30, 2024
- Samsung Electronics Co., Ltd.
- Myungjun Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for determining properties of a sample by ellipsometry
- Patent number 11,959,852
- Issue date Apr 16, 2024
- Park Systems GmbH
- Matthias Duwe
- G01 - MEASURING TESTING
Information Patent Grant
Reconstruction of frequency registration for quantitative spectroscopy
- Patent number 11,953,427
- Issue date Apr 9, 2024
- Endress+Hauser Optical Analysis, Inc.
- Alfred Feitisch
- G01 - MEASURING TESTING
Information Patent Grant
Second Harmonic Generation (SHG) optical inspection system designs
- Patent number 11,946,863
- Issue date Apr 2, 2024
- FemtoMetrix, Inc.
- Ming Lei
- G01 - MEASURING TESTING
Information Patent Grant
Multiple reflectometry for measuring etch parameters
- Patent number 11,927,543
- Issue date Mar 12, 2024
- Applied Materials, Inc.
- Blake Erickson
- G01 - MEASURING TESTING
Information Patent Grant
Optical metrology in machine learning to characterize features
- Patent number 11,921,433
- Issue date Mar 5, 2024
- Lam Research Corporation
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Optical metrology tool equipped with modulated illumination sources
- Patent number 11,913,874
- Issue date Feb 27, 2024
- KLA Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Grant
Method for extracting a transverse magneto-optic effect signal
- Patent number 11,906,604
- Issue date Feb 20, 2024
- ASOCIACIÓN CENTRO DE INVESTIGACIÓN COOPERATIVA EN NANOCIENCIAS “CIC NANOGUNE”
- Eva Oblak
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for optical characterization of patterned samples
- Patent number 11,885,737
- Issue date Jan 30, 2024
- Nova Ltd.
- Dror Shafir
- G01 - MEASURING TESTING
Information Patent Grant
Reflectometer, spectrophotometer, ellipsometer or polarimeter syste...
- Patent number 11,885,738
- Issue date Jan 30, 2024
- J. A. Woollam Co., Inc.
- Martin M. Liphardt
- G01 - MEASURING TESTING
Information Patent Grant
Method for measuring film thickness of semiconductor device
- Patent number 11,867,497
- Issue date Jan 9, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Yongshang Sheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for predicting properties of structures, imager system, and...
- Patent number 11,869,178
- Issue date Jan 9, 2024
- Micron Technology, Inc.
- Amitava Majumdar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Fountain solution thickness measurement system and method using ell...
- Patent number 11,835,446
- Issue date Dec 5, 2023
- Xerox Corporation
- Donald Thresh
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Method for measuring characteristic of thin film
- Patent number 11,835,447
- Issue date Dec 5, 2023
- AUROS TECHNOLOGY, INC.
- Tae Dong Kang
- G01 - MEASURING TESTING
Information Patent Grant
Fast and accurate Mueller matrix infrared ellipsometer
- Patent number 11,821,833
- Issue date Nov 21, 2023
- J. A. Woollam Co., Inc.
- Stefan Schoeche
- G01 - MEASURING TESTING
Information Patent Grant
Metrology apparatus and a method of determining a characteristic of...
- Patent number 11,822,254
- Issue date Nov 21, 2023
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Single ion detection method and device
- Patent number 11,808,695
- Issue date Nov 7, 2023
- INSTITUTE OF MECHANICS, CHINESE ACADEMY OF SCIENCES
- Wei Liu
- G01 - MEASURING TESTING
Information Patent Grant
Part quality monitoring in a stereolithographic additive manufactur...
- Patent number 11,794,411
- Issue date Oct 24, 2023
- Stratasys, Inc.
- J. Samuel Batchelder
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Grant
Fast and accurate mueller matrix infrared spectroscopic ellipsometer
- Patent number 11,740,176
- Issue date Aug 29, 2023
- J. A. Woollam Co., Inc.
- Stefan Schoeche
- G01 - MEASURING TESTING
Information Patent Grant
Liquid immersion micro-channel measurement device and measurement m...
- Patent number 11,719,624
- Issue date Aug 8, 2023
- Korea Research Institute of Standards and Science
- Hyun Mo Cho
- G01 - MEASURING TESTING
Information Patent Grant
Techniques for characterizing films on optically clear substrates u...
- Patent number 11,714,045
- Issue date Aug 1, 2023
- Meta Platforms Technologies, LLC
- Gangadhara Raja Muthinti
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
AUTOMATED THIN FILM DEPOSITION SYSTEM AND THIN FILM DEPOSITION METH...
- Publication number 20250011918
- Publication date Jan 9, 2025
- Seoul National University R&DB Foundation
- Gyu Chul Yi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHEMICAL SENSORS USING COPPER HIGH-ASPECT STRUCTURES (CuHARS) AND M...
- Publication number 20250003867
- Publication date Jan 2, 2025
- Louisiana Tech Research Corporation
- Mark A. DECOSTER
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING OPTICAL PROPERTIES AND GEOMETRIC PROPERTIES OF...
- Publication number 20250003866
- Publication date Jan 2, 2025
- HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Xiuguo Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
COMBINATION OF MULTIWAVELENGTH RAMAN AND SPECTROSCOPIC ELLIPSOMETRY...
- Publication number 20240418633
- Publication date Dec 19, 2024
- KLA Corporation
- Shova Subedi
- G01 - MEASURING TESTING
Information Patent Application
QUASI-DYNAMIC IN SITU ELLIPSOMETRY METHOD AND SYSTEM FOR MEASURING...
- Publication number 20240402614
- Publication date Dec 5, 2024
- HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Hao Jiang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ANGLE-RESOLVED SPECTROSCOPIC ELLIPSOMETER USING SPATIAL LIGHT MODUL...
- Publication number 20240369473
- Publication date Nov 7, 2024
- Seoul National University R&DB Foundation
- Heui Jae PAHK
- G01 - MEASURING TESTING
Information Patent Application
Combined Spectroscopic Reflectometry And Pattern Recognition Based...
- Publication number 20240353321
- Publication date Oct 24, 2024
- KLA Corporation
- David Y. Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
WAFER ABNORMALITY DETECTION METHOD AND A SEMICONDUCTOR DEVICE MANUF...
- Publication number 20240353350
- Publication date Oct 24, 2024
- Samsung Electronics Co., Ltd.
- Kihong CHUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPLIT PRISM SILICON-BASED LIQUID IMMERSION MICROCHANNEL MEASURING D...
- Publication number 20240337591
- Publication date Oct 10, 2024
- Korea Research Institute of Standards and Science
- Dong Hyung KIM
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR OPTICAL CHARACTERIZATION OF PATTERNED SAMPLES
- Publication number 20240337590
- Publication date Oct 10, 2024
- NOVA LTD
- Dror SHAFIR
- G01 - MEASURING TESTING
Information Patent Application
DEVICES AND METHODS FOR DETERMINING POLARIZATION CHARACTERISTICS FR...
- Publication number 20240240986
- Publication date Jul 18, 2024
- Arizona Board of Regents on behalf of The University of Arizona
- Meredith Kupinski
- G01 - MEASURING TESTING
Information Patent Application
Methods And Systems For Scatterometry Based Metrology Of Structures...
- Publication number 20240201073
- Publication date Jun 20, 2024
- KLA Corporation
- Shankar Krishnan
- G01 - MEASURING TESTING
Information Patent Application
COMBINED MODELING AND MACHINE LEARNING IN OPTICAL METROLOGY
- Publication number 20240159656
- Publication date May 16, 2024
- ONTO INNOVATION INC.
- Pei Fen Teh
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM FOR PREDICTING PROPERTIES OF STRUCTURES, IMAGER SYSTEM, AND...
- Publication number 20240153062
- Publication date May 9, 2024
- Micron Technology, Inc.
- Amitava Majumdar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF INSPECTING LITHIUM ION SECONDARY BATTERY SEPARATOR AND ME...
- Publication number 20240027330
- Publication date Jan 25, 2024
- ZEON CORPORATION
- Tomofumi YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PART QUALITY MONITORING IN A STEREOLITHOGRAPHIC ADDITIVE MANUFACTUR...
- Publication number 20240025123
- Publication date Jan 25, 2024
- Stratasys, Inc.
- J. Samuel Batchelder
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
SUBSTRATE INSPECTION METHOD
- Publication number 20240019380
- Publication date Jan 18, 2024
- Samsung Electronics Co., Ltd.
- Kihong Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METASURFACE POLARIZATION FILTERING FOR CHARACTERIZATION OF SAMPLES
- Publication number 20240019358
- Publication date Jan 18, 2024
- The Board of Trustees of the Leland Stanford Junior University
- Jonathan A. Fan
- G01 - MEASURING TESTING
Information Patent Application
MUELLER MATRIX ELLIPSOMETER
- Publication number 20240011894
- Publication date Jan 11, 2024
- Government of the United States of America, as Represented by the Secretary o...
- Thomas Avery Germer
- G01 - MEASURING TESTING
Information Patent Application
IMAGING ELLIPSOMETER AND METHOD OF MEASURING AN OVERLAY ERROR USING...
- Publication number 20230408401
- Publication date Dec 21, 2023
- Samsung Electronics Co., Ltd.
- Jaehyeon Son
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL METROLOGY WITH NUISANCE FEATURE MITIGATION
- Publication number 20230402328
- Publication date Dec 14, 2023
- ONTO INNOVATION INC.
- Jonathan Andrew Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Metrology Apparatus and a Method of Determining a Characteristic of...
- Publication number 20230393490
- Publication date Dec 7, 2023
- ASML NETHERLANDS B.V.
- Arie Jeffrey DEN BOEF
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING CHARACTHERISTIC OF THIN FILM
- Publication number 20230384213
- Publication date Nov 30, 2023
- AUROS TECHNOLOGY, INC.
- Tae Dong KANG
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR MEASUREMENT APPARATUS
- Publication number 20230375463
- Publication date Nov 23, 2023
- Samsung Electronics Co., Ltd.
- Seoyeon JEONG
- G02 - OPTICS
Information Patent Application
SPECTROSCOPIC ELLIPSOMETRY SYSTEM FOR THIN FILM IMAGING
- Publication number 20230324283
- Publication date Oct 12, 2023
- Bruker Nano, Inc.
- Emad Zawaideh
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING THICKNESS AND OPTICAL PROPERTIES OF MULTI-LAYE...
- Publication number 20230304788
- Publication date Sep 28, 2023
- HUAQIAO UNIVERSITY
- Changcai Cui
- G01 - MEASURING TESTING
Information Patent Application
INFRARED MEASUREMENT METHOD AND APPARATUS, COMPUTER DEVICE AND STOR...
- Publication number 20230304921
- Publication date Sep 28, 2023
- NANKAI UNIVERSITY
- MENG-XIN REN
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING THICKNESS AND OPTICAL CONSTANTS OF DIAMOND FILM
- Publication number 20230236007
- Publication date Jul 27, 2023
- HUAQIAO UNIVERSITY
- Changcai Cui
- G01 - MEASURING TESTING
Information Patent Application
ANNULAR APODIZER FOR SMALL TARGET OVERLAY MEASUREMENT
- Publication number 20230236113
- Publication date Jul 27, 2023
- KLA Corporation
- Itay GDOR
- G01 - MEASURING TESTING
Information Patent Application
IN-SITU CONTAMINATION MONITORING
- Publication number 20230228672
- Publication date Jul 20, 2023
- The Aerospace Corporation
- Rocky G. MORALES
- B64 - AIRCRAFT AVIATION COSMONAUTICS

Ellipsometry

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Gallium arsenide substrate comprising a surface oxide layer with im...

Device and method for multi-reflection solution immersed silicon-ba...

Methods and apparatus for processing a substrate

Cooperative polarization skylight background radiation measurement...

Apparatus for generating model for spectroscopic ellipsometry const...

Method for measuring optical constants of thin film of fluorine-con...

Annular apodizer for small target overlay measurement

Optical metrology models for in-line film thickness measurements

Effective cell approximation model for logic structures

Imaging ellipsometry (IE)-based inspection method and method of fab...

Method for determining properties of a sample by ellipsometry

Reconstruction of frequency registration for quantitative spectroscopy

Second Harmonic Generation (SHG) optical inspection system designs

Multiple reflectometry for measuring etch parameters

Optical metrology in machine learning to characterize features

Optical metrology tool equipped with modulated illumination sources

Method for extracting a transverse magneto-optic effect signal

Method and system for optical characterization of patterned samples

Reflectometer, spectrophotometer, ellipsometer or polarimeter syste...

Method for measuring film thickness of semiconductor device

System for predicting properties of structures, imager system, and...

Fountain solution thickness measurement system and method using ell...

Method for measuring characteristic of thin film

Fast and accurate Mueller matrix infrared ellipsometer

Metrology apparatus and a method of determining a characteristic of...

Single ion detection method and device

Part quality monitoring in a stereolithographic additive manufactur...

Fast and accurate mueller matrix infrared spectroscopic ellipsometer

Liquid immersion micro-channel measurement device and measurement m...

Techniques for characterizing films on optically clear substrates u...

Patents Applicationslast 30 patents

AUTOMATED THIN FILM DEPOSITION SYSTEM AND THIN FILM DEPOSITION METH...

CHEMICAL SENSORS USING COPPER HIGH-ASPECT STRUCTURES (CuHARS) AND M...

METHOD FOR MEASURING OPTICAL PROPERTIES AND GEOMETRIC PROPERTIES OF...

COMBINATION OF MULTIWAVELENGTH RAMAN AND SPECTROSCOPIC ELLIPSOMETRY...

QUASI-DYNAMIC IN SITU ELLIPSOMETRY METHOD AND SYSTEM FOR MEASURING...

ANGLE-RESOLVED SPECTROSCOPIC ELLIPSOMETER USING SPATIAL LIGHT MODUL...

Combined Spectroscopic Reflectometry And Pattern Recognition Based...

WAFER ABNORMALITY DETECTION METHOD AND A SEMICONDUCTOR DEVICE MANUF...

SPLIT PRISM SILICON-BASED LIQUID IMMERSION MICROCHANNEL MEASURING D...

METHOD AND SYSTEM FOR OPTICAL CHARACTERIZATION OF PATTERNED SAMPLES

DEVICES AND METHODS FOR DETERMINING POLARIZATION CHARACTERISTICS FR...

Methods And Systems For Scatterometry Based Metrology Of Structures...

COMBINED MODELING AND MACHINE LEARNING IN OPTICAL METROLOGY

SYSTEM FOR PREDICTING PROPERTIES OF STRUCTURES, IMAGER SYSTEM, AND...

METHOD OF INSPECTING LITHIUM ION SECONDARY BATTERY SEPARATOR AND ME...

PART QUALITY MONITORING IN A STEREOLITHOGRAPHIC ADDITIVE MANUFACTUR...

SUBSTRATE INSPECTION METHOD

METASURFACE POLARIZATION FILTERING FOR CHARACTERIZATION OF SAMPLES

MUELLER MATRIX ELLIPSOMETER

IMAGING ELLIPSOMETER AND METHOD OF MEASURING AN OVERLAY ERROR USING...

OPTICAL METROLOGY WITH NUISANCE FEATURE MITIGATION

Metrology Apparatus and a Method of Determining a Characteristic of...

METHOD FOR MEASURING CHARACTHERISTIC OF THIN FILM

SEMICONDUCTOR MEASUREMENT APPARATUS

SPECTROSCOPIC ELLIPSOMETRY SYSTEM FOR THIN FILM IMAGING

METHOD FOR MEASURING THICKNESS AND OPTICAL PROPERTIES OF MULTI-LAYE...

INFRARED MEASUREMENT METHOD AND APPARATUS, COMPUTER DEVICE AND STOR...

METHOD FOR MEASURING THICKNESS AND OPTICAL CONSTANTS OF DIAMOND FILM

ANNULAR APODIZER FOR SMALL TARGET OVERLAY MEASUREMENT

IN-SITU CONTAMINATION MONITORING