Claims
- 1. A method of cleaning gas exhausting from a chamber; the method comprising the steps of:exhausting an exhaust gas which comprises hydrogen peroxide from the chamber along a flow path from the chamber to an exit port; passing the exhaust gas through oil absorbent media not coated with precious metal catalyst, thereby sorbing entrained lubricating oil out the exhaust gas; passing the exhaust gas over a bed of members disposed within the flow path, the members comprising alumina and being coated with a precious metal catalyst for hydrogen peroxide; and catalytically reacting hydrogen peroxide in the exhaust gas with the catalyst to convert said hydrogen peroxide to water and oxygen; whereby the exhaust gas reaching the exit has a substantially reduced amount of hydrogen peroxide compared to the chamber gas.
- 2. A method according to claim 1 wherein the precious metal catalyst is selected from the group consisting of palladium, platinum, rubidium and compounds and alloys thereof.
- 3. A method according to claim 1 wherein the step of exhausting the exhaust gas from the chamber comprises pumping the exhaust gas from the chamber with a vacuum pump in the flow path.
- 4. A method according to claim 3 wherein the bed is located between the vacuum pump and the exit.
- 5. A method according to claim 3 wherein the bed is disposed between the chamber and the vacuum pump.
- 6. A method according to claim 5 wherein the members are formed of a polymer.
- 7. A method according to claim 6 wherein the polymer is polyethylene.
- 8. A method according to claim 1 wherein the coating of precious metal catalyst on the members is sufficiently discontinuous to allow lubricating oil entrained within the exhaust gases to be absorbed into the alumina members whereby the amount of any such entrained lubricating oil available to deposit upon the catalyst and reduce an available surface area thereof is reduced.
- 9. A method according to claim 8, wherein the oil absorbent media comprises alumina members not coated with the precious metal catalyst, thereby to absorb entrained oil from the exhaust gases.
- 10. A method according to claim 8, wherein the oil absorbent media comprises metal wool.
- 11. A method according to claim 1 wherein the members are substantially spherical.
- 12. A method of cleaning gas exhausting from a chamber; the method comprising the steps of:exhausting an exhaust gas which comprises hydrogen peroxide from the chamber along a flow path from the chamber to an exit port; passing the exhaust gas through oil absorbent media not coated with precious metal catalyst, thereby sorbing entrained lubricating oil out of the exhaust gas; passing the exhaust gas over a bed of members disposed within the flow path, the members being coated with a precious metal catalyst for hydrogen peroxide; and catalytically reacting hydrogen peroxide in the exhaust gas with the catalyst to convert said hydrogen peroxide to water and oxygen; whereby the exhaust gas reaching the exit has a substantially reduced amount of hydrogen peroxide compared to the chamber gas; and wherein the members have bores therethrough and wherein the exhaust gas flows through the bores to induce and enhance turbulence thereby enhancing the catalytic reaction.
- 13. A method according to claim 12 wherein the members are tubular.
- 14. A method according to claim 12 wherein the precious metal catalyst is selected from the group consisting of palladium, platinum, rubidium and compounds and alloys thereof.
- 15. A method according to claim 12 wherein the step of exhausting the exhaust gas from the chamber comprises pumping the exhaust gas from the chamber with a vacuum pump in the flow path.
- 16. A method according to claim 15 wherein the bed is located between the vacuum pump and the exit.
- 17. A method according to claim 12, wherein the oil absorbent media comprises alumina members.
Parent Case Info
This application claims priority from provisional application No. 60/064,048 filed Nov. 3, 1997.
US Referenced Citations (12)
Foreign Referenced Citations (2)
Number |
Date |
Country |
0 110 609 |
Jun 1984 |
EP |
WO 9734682 |
Sep 1997 |
WO |
Provisional Applications (1)
|
Number |
Date |
Country |
|
60/064048 |
Nov 1997 |
US |