This application is related to (1) U.S. patent application Ser. No. 11/238,991, titled “Ultra-Small Resonating Charged Particle Beam Modulator,” and filed Sep. 30, 2005, (2) U.S. patent application Ser. No. 10/917,511, filed on Aug, 13, 2004, entitled “Patterning Thin Metal Film by Dry Reactive Ion Etching,” and to U.S. application Ser. No. 11/203,407, filed on Aug. 15, 2005, entitled “Method Of Patterning Ultra-Small Structures,” (3) U.S. application Ser. No. 11/243,476, titled “Structures And Methods For Coupling Energy From An Electromagnetic Wave,” filed on Oct. 5, 2005, and (4) U.S. application Ser. No. 11/243,477, entitled “Electron Beam Induced Resonance,” filed on Oct. 5, 2005, all of which are commonly owned with the present application at the time of filing, and the entire contents of each of which are incorporated herein by reference.
1. Field of the Invention
The present invention is directed to a device or system for removing stray charged particles during the detection of photons in a high frequency system, and in one embodiment to a reflector-based system with a stray electron absorbing structure between a source of photons and a photo-multiplier.
2. Discussion of the Background
In systems that utilize photo-multipliers to detect the arrival of photo-emissions, known photo-multipliers can produce false detection readings when stray electrons, either instead of or in addition to the desired photons, strike a detector surface in a photo-multiplier. Such a false detection may lead the photo-multiplier to incorrectly indicate the number of photons that were incident on the detector surface.
It is an object of the present invention to reduce the number of stray electrons that are incident on the detector surface of a photo-multiplier when utilizing a resonant structure resonating at a frequency in excess of the microwave frequency.
According to a first embodiment of the present invention, the detector surface of a photo-multiplier is protected from exposure to stray charged particles emitted from or near a resonant structure resonating at a frequency in excess of the microwave frequency by creating an indirect path between the resonant structure and the detector surface.
According to one implementation of such an embodiment, the present invention includes a structure for absorbing stray charged particles (e.g., electrons) while reflecting electromagnetic radiation (e.g., photons) off of a reflective surface. In one configuration the reflective surface is a mirror.
According to another implementation of the first embodiment, the present invention includes an electrically-biased structure for attracting and absorbing stray charged particles while reflecting photons off of a reflective surface. In one configuration the reflective surface is a mirror.
In at least one exemplary embodiment, the reflective surface is coated with a layer of material that enhances absorption of the stray charged particles.
According to a second embodiment of the present invention, the detector surface of a photo-multiplier is protected from exposure to stray charged particles emitted from or near a resonant structure resonating at a frequency in excess of the microwave frequency by creating a particle barrier between the resonant structure and the detector surface where the particle barrier allows the transmission or passage of electromagnetic radiation (e.g., photons).
As used throughout this document:
The phrase “ultra-small resonant structure” shall mean any structure of any material, type or microscopic size that by its characteristics causes electrons to resonate at a frequency in excess of the microwave frequency.
The term “ultra-small” within the phrase “ultra-small resonant structure” shall mean microscopic structural dimensions and shall include so-called “micro” structures, “nano” structures, or any other very small structures that will produce resonance at frequencies in excess of microwave frequencies.
The following description, given with respect to the attached drawings, may be better understood with reference to the non-limiting examples of the drawings, wherein:
As illustrated in
However, in addition to the electromagnetic radiation striking the detector surface 180 of the photo-multiplier 160, stray charged particles, illustrated in
In order to reduce the exposure of the detector surface 180 of the photo-multiplier 160 to stray charged particles, various protective measures can be taken according to the present invention. In a first exemplary embodiment of the present invention, illustrated in
As shown in
As shown in
As shown in
As shown in
As shown in
While certain configurations of structures for protecting a photo-multiplier 160 from stray charged particles have been illustrated for the purposes of presenting the basic structures of the present invention, one of ordinary skill in the art will appreciate that other variations are possible which would still fall within the scope of the appended claims.
Number | Name | Date | Kind |
---|---|---|---|
1948384 | Lawrence | Feb 1934 | A |
2307086 | Varian et al. | Jan 1943 | A |
2431396 | Hansell | Nov 1947 | A |
2473477 | Smith | Jun 1949 | A |
2634372 | Salisbury | Apr 1953 | A |
2932798 | Kerst et al. | Apr 1960 | A |
2944183 | Drexler | Jul 1960 | A |
2966611 | Sandstrom | Dec 1960 | A |
3231779 | White | Jan 1966 | A |
3297905 | Rockwell et al. | Jan 1967 | A |
3315117 | Udelson | Apr 1967 | A |
3387169 | Farney | Jun 1968 | A |
3543147 | Kovarik | Nov 1970 | A |
3546524 | Stark | Dec 1970 | A |
3560694 | White | Feb 1971 | A |
3571642 | Westcott | Mar 1971 | A |
3586899 | Fleisher | Jun 1971 | A |
3761828 | Pollard et al. | Sep 1973 | A |
3886399 | Symons | May 1975 | A |
3923568 | Bersin | Dec 1975 | A |
3989347 | Eschler | Nov 1976 | A |
4053845 | Gould | Oct 1977 | A |
4282436 | Kapetanakos et al. | Aug 1981 | A |
4450554 | Steensma et al. | May 1984 | A |
4453108 | Freeman, Jr. | Jun 1984 | A |
4482779 | Anderson | Nov 1984 | A |
4528659 | Jones, Jr. | Jul 1985 | A |
4589107 | Middleton et al. | May 1986 | A |
4598397 | Nelson et al. | Jul 1986 | A |
4630262 | Callens et al. | Dec 1986 | A |
4652703 | Lu et al. | Mar 1987 | A |
4661783 | Gover et al. | Apr 1987 | A |
4704583 | Gould | Nov 1987 | A |
4712042 | Hamm | Dec 1987 | A |
4713581 | Haimson | Dec 1987 | A |
4727550 | Chang et al. | Feb 1988 | A |
4740963 | Eckley | Apr 1988 | A |
4740973 | Madey | Apr 1988 | A |
4746201 | Gould | May 1988 | A |
4761059 | Yeh et al. | Aug 1988 | A |
4782485 | Gollub | Nov 1988 | A |
4789945 | Niijima | Dec 1988 | A |
4806859 | Hetrick | Feb 1989 | A |
4809271 | Kondo et al. | Feb 1989 | A |
4813040 | Futato | Mar 1989 | A |
4819228 | Baran et al. | Apr 1989 | A |
4829527 | Wortman et al. | May 1989 | A |
4838021 | Beattie | Jun 1989 | A |
4841538 | Yanabu et al. | Jun 1989 | A |
4864131 | Rich et al. | Sep 1989 | A |
4866704 | Bergman | Sep 1989 | A |
4866732 | Carey et al. | Sep 1989 | A |
4873715 | Shibata | Oct 1989 | A |
4887265 | Felix | Dec 1989 | A |
4890282 | Lambert et al. | Dec 1989 | A |
4898022 | Yumoto et al. | Feb 1990 | A |
4912705 | Paneth et al. | Mar 1990 | A |
4932022 | Keeney et al. | Jun 1990 | A |
4981371 | Gurak et al. | Jan 1991 | A |
5023563 | Harvey et al. | Jun 1991 | A |
5036513 | Greenblatt | Jul 1991 | A |
5065425 | Lecomte et al. | Nov 1991 | A |
5113141 | Swenson | May 1992 | A |
5121385 | Tominaga et al. | Jun 1992 | A |
5127001 | Steagall et al. | Jun 1992 | A |
5128729 | Alonas et al. | Jul 1992 | A |
5130985 | Kondo et al. | Jul 1992 | A |
5150410 | Bertrand | Sep 1992 | A |
5155726 | Spinney et al. | Oct 1992 | A |
5157000 | Elkind et al. | Oct 1992 | A |
5163118 | Lorenzo et al. | Nov 1992 | A |
5185073 | Bindra | Feb 1993 | A |
5187591 | Guy et al. | Feb 1993 | A |
5199918 | Kumar | Apr 1993 | A |
5214650 | Renner et al. | May 1993 | A |
5233623 | Chang | Aug 1993 | A |
5235248 | Clark et al. | Aug 1993 | A |
5262656 | Blondeau et al. | Nov 1993 | A |
5263043 | Walsh | Nov 1993 | A |
5268693 | Walsh | Dec 1993 | A |
5268788 | Fox et al. | Dec 1993 | A |
5282197 | Kreitzer | Jan 1994 | A |
5283819 | Glick et al. | Feb 1994 | A |
5293175 | Hemmie et al. | Mar 1994 | A |
5302240 | Hori et al. | Apr 1994 | A |
5305312 | Fornek et al. | Apr 1994 | A |
5341374 | Lewen et al. | Aug 1994 | A |
5354709 | Lorenzo et al. | Oct 1994 | A |
5446814 | Kuo et al. | Aug 1995 | A |
5504341 | Glavish | Apr 1996 | A |
5578909 | Billen | Nov 1996 | A |
5604352 | Schuetz | Feb 1997 | A |
5608263 | Drayton et al. | Mar 1997 | A |
5663971 | Carlsten | Sep 1997 | A |
5666020 | Takemura | Sep 1997 | A |
5668368 | Sakai et al. | Sep 1997 | A |
5705443 | Stauf et al. | Jan 1998 | A |
5737458 | Wojnarowski et al. | Apr 1998 | A |
5744919 | Mishin et al. | Apr 1998 | A |
5757009 | Walstrom | May 1998 | A |
5767013 | Park | Jun 1998 | A |
5780970 | Singh et al. | Jul 1998 | A |
5790585 | Walsh | Aug 1998 | A |
5811943 | Mishin et al. | Sep 1998 | A |
5821836 | Katehi et al. | Oct 1998 | A |
5821902 | Keen | Oct 1998 | A |
5825140 | Fujisawa | Oct 1998 | A |
5831270 | Nakasuji | Nov 1998 | A |
5847745 | Shimizu et al. | Dec 1998 | A |
5889449 | Fiedziuszko | Mar 1999 | A |
5889797 | Nguyen | Mar 1999 | A |
5902489 | Yasuda et al. | May 1999 | A |
5963857 | Greywall | Oct 1999 | A |
5972193 | Chou et al. | Oct 1999 | A |
6005347 | Lee | Dec 1999 | A |
6008496 | Winefordner et al. | Dec 1999 | A |
6040625 | Ip | Mar 2000 | A |
6060833 | Velazco | May 2000 | A |
6080529 | Ye et al. | Jun 2000 | A |
6117784 | Uzoh | Sep 2000 | A |
6139760 | Shim et al. | Oct 2000 | A |
6180415 | Schultz et al. | Jan 2001 | B1 |
6195199 | Yamada | Feb 2001 | B1 |
6222866 | Seko | Apr 2001 | B1 |
6278239 | Caporaso et al. | Aug 2001 | B1 |
6281769 | Fiedziuszko | Aug 2001 | B1 |
6297511 | Syllaios et al. | Oct 2001 | B1 |
6301041 | Yamada | Oct 2001 | B1 |
6309528 | Taylor et al. | Oct 2001 | B1 |
6316876 | Tanabe | Nov 2001 | B1 |
6338968 | Hefti | Jan 2002 | B1 |
6370306 | Sato et al. | Apr 2002 | B1 |
6373194 | Small | Apr 2002 | B1 |
6376258 | Hefti | Apr 2002 | B2 |
6407516 | Victor | Jun 2002 | B1 |
6441298 | Thio | Aug 2002 | B1 |
6448850 | Yamada | Sep 2002 | B1 |
6453087 | Frish et al. | Sep 2002 | B2 |
6470198 | Kintaka et al. | Oct 2002 | B1 |
6504303 | Small | Jan 2003 | B2 |
6525477 | Small | Feb 2003 | B2 |
6534766 | Abe et al. | Mar 2003 | B2 |
6545425 | Victor | Apr 2003 | B2 |
6552320 | Pan | Apr 2003 | B1 |
6577040 | Nguyen | Jun 2003 | B2 |
6580075 | Kametani et al. | Jun 2003 | B2 |
6603781 | Stinson et al. | Aug 2003 | B1 |
6603915 | Glebov et al. | Aug 2003 | B2 |
6624916 | Green et al. | Sep 2003 | B1 |
6636185 | Spitzer et al. | Oct 2003 | B1 |
6636534 | Madey et al. | Oct 2003 | B2 |
6636653 | Miracky et al. | Oct 2003 | B2 |
6640023 | Miller et al. | Oct 2003 | B2 |
6642907 | Hamada et al. | Nov 2003 | B2 |
6687034 | Wine et al. | Feb 2004 | B2 |
6700748 | Cowles et al. | Mar 2004 | B1 |
6724486 | Shull et al. | Apr 2004 | B1 |
6738176 | Rabinowitz et al. | May 2004 | B2 |
6741781 | Furuyama | May 2004 | B2 |
6777244 | Pepper et al. | Aug 2004 | B2 |
6782205 | Trisnadi et al. | Aug 2004 | B2 |
6791438 | Takahashi et al. | Sep 2004 | B2 |
6800877 | Victor et al. | Oct 2004 | B2 |
6801002 | Victor et al. | Oct 2004 | B2 |
6819432 | Pepper et al. | Nov 2004 | B2 |
6829286 | Guilfoyle et al. | Dec 2004 | B1 |
6834152 | Gunn et al. | Dec 2004 | B2 |
6870438 | Shino et al. | Mar 2005 | B1 |
6871025 | Maleki et al. | Mar 2005 | B2 |
6885262 | Nishimura et al. | Apr 2005 | B2 |
6900447 | Gerlach et al. | May 2005 | B2 |
6909092 | Nagahama | Jun 2005 | B2 |
6909104 | Koops | Jun 2005 | B1 |
6924920 | Zhilkov | Aug 2005 | B2 |
6936981 | Gesley | Aug 2005 | B2 |
6943650 | Ramprasad et al. | Sep 2005 | B2 |
6944369 | Deliwala | Sep 2005 | B2 |
6952492 | Tanaka et al. | Oct 2005 | B2 |
6953291 | Liu | Oct 2005 | B2 |
6954515 | Bjorkholm et al. | Oct 2005 | B2 |
6965284 | Maekawa et al. | Nov 2005 | B2 |
6965625 | Mross et al. | Nov 2005 | B2 |
6972439 | Kim et al. | Dec 2005 | B1 |
6995406 | Tojo et al. | Feb 2006 | B2 |
7010183 | Estes et al. | Mar 2006 | B2 |
7064500 | Victor et al. | Jun 2006 | B2 |
7068948 | Wei et al. | Jun 2006 | B2 |
7092588 | Kondo | Aug 2006 | B2 |
7092603 | Glebov et al. | Aug 2006 | B2 |
7122978 | Nakanishi et al. | Oct 2006 | B2 |
7130102 | Rabinowitz | Oct 2006 | B2 |
7177515 | Estes et al. | Feb 2007 | B2 |
7194798 | Bonhote et al. | Mar 2007 | B2 |
7230201 | Miley et al. | Jun 2007 | B1 |
7253426 | Gorrell et al. | Aug 2007 | B2 |
7267459 | Matheson | Sep 2007 | B2 |
7267461 | Kan et al. | Sep 2007 | B2 |
7309953 | Tiberi et al. | Dec 2007 | B2 |
7342441 | Gorrell et al. | Mar 2008 | B2 |
7362972 | Yavor et al. | Apr 2008 | B2 |
7375631 | Moskowitz et al. | May 2008 | B2 |
7436177 | Gorrell et al. | Oct 2008 | B2 |
7442940 | Gorrell et al. | Oct 2008 | B2 |
7443358 | Gorrell et al. | Oct 2008 | B2 |
7470920 | Gorrell et al. | Dec 2008 | B2 |
7473917 | Singh | Jan 2009 | B2 |
7586097 | Gorrell et al. | Sep 2009 | B2 |
7586167 | Gorrell et al. | Sep 2009 | B2 |
20010002315 | Schultz et al. | May 2001 | A1 |
20010025925 | Abe et al. | Oct 2001 | A1 |
20020009723 | Hefti | Jan 2002 | A1 |
20020027481 | Fiedziuszko | Mar 2002 | A1 |
20020036121 | Ball et al. | Mar 2002 | A1 |
20020036264 | Nakasuji et al. | Mar 2002 | A1 |
20020053638 | Winkler et al. | May 2002 | A1 |
20020068018 | Pepper et al. | Jun 2002 | A1 |
20020070671 | Small | Jun 2002 | A1 |
20020071457 | Hogan | Jun 2002 | A1 |
20020122531 | Whitham | Sep 2002 | A1 |
20020135665 | Gardner | Sep 2002 | A1 |
20020139961 | Kinoshita et al. | Oct 2002 | A1 |
20020158295 | Armgarth et al. | Oct 2002 | A1 |
20020191650 | Madey et al. | Dec 2002 | A1 |
20030010979 | Pardo et al. | Jan 2003 | A1 |
20030012925 | Gorrell | Jan 2003 | A1 |
20030016421 | Small | Jan 2003 | A1 |
20030034535 | Barenburu et al. | Feb 2003 | A1 |
20030103150 | Catrysse et al. | Jun 2003 | A1 |
20030106998 | Colbert et al. | Jun 2003 | A1 |
20030155521 | Feuerbaum | Aug 2003 | A1 |
20030158474 | Scherer et al. | Aug 2003 | A1 |
20030164947 | Vaupel | Sep 2003 | A1 |
20031017997 | Estes et al. | Sep 2003 | |
20030206708 | Estes et al. | Nov 2003 | A1 |
20030214695 | Abramson et al. | Nov 2003 | A1 |
20040061053 | Taniguchi et al. | Apr 2004 | A1 |
20040080285 | Victor et al. | Apr 2004 | A1 |
20040085159 | Kubena et al. | May 2004 | A1 |
20040092104 | Gunn, III et al. | May 2004 | A1 |
20040108471 | Luo et al. | Jun 2004 | A1 |
20040108473 | Melnychuk et al. | Jun 2004 | A1 |
20040108823 | Amaldi et al. | Jun 2004 | A1 |
20040136715 | Kondo | Jul 2004 | A1 |
20040150991 | Ouderkirk et al. | Aug 2004 | A1 |
20040171272 | Jin et al. | Sep 2004 | A1 |
20040180244 | Tour et al. | Sep 2004 | A1 |
20040184270 | Halter | Sep 2004 | A1 |
20040213375 | Bjorkholm et al. | Oct 2004 | A1 |
20040217297 | Moses et al. | Nov 2004 | A1 |
20040218651 | Iwasaki et al. | Nov 2004 | A1 |
20040231996 | Webb | Nov 2004 | A1 |
20040240035 | Zhilkov | Dec 2004 | A1 |
20040264867 | Kondo | Dec 2004 | A1 |
20050023145 | Cohen et al. | Feb 2005 | A1 |
20050045821 | Noji et al. | Mar 2005 | A1 |
20050045832 | Kelly et al. | Mar 2005 | A1 |
20050054151 | Lowther et al. | Mar 2005 | A1 |
20050067286 | Ahn et al. | Mar 2005 | A1 |
20050082469 | Carlo | Apr 2005 | A1 |
20050092929 | Schneiker | May 2005 | A1 |
20050104684 | Wojcik et al. | May 2005 | A1 |
20050105690 | Pau et al. | May 2005 | A1 |
20050145882 | Taylor et al. | Jul 2005 | A1 |
20050152635 | Paddon et al. | Jul 2005 | A1 |
20050162104 | Victor et al. | Jul 2005 | A1 |
20050190637 | Ichimura et al. | Sep 2005 | A1 |
20050194258 | Cohen et al. | Sep 2005 | A1 |
20050201707 | Glebov et al. | Sep 2005 | A1 |
20050201717 | Matsumura et al. | Sep 2005 | A1 |
20050212503 | Deibele | Sep 2005 | A1 |
20050231138 | Nakanishi et al. | Oct 2005 | A1 |
20050249451 | Baehr-Jones et al. | Nov 2005 | A1 |
20050285541 | LeChevalier | Dec 2005 | A1 |
20060007730 | Nakamura et al. | Jan 2006 | A1 |
20060018619 | Helffrich et al. | Jan 2006 | A1 |
20060035173 | Davidson et al. | Feb 2006 | A1 |
20060045418 | Cho et al. | Mar 2006 | A1 |
20060050269 | Brownell | Mar 2006 | A1 |
20060060782 | Khursheed | Mar 2006 | A1 |
20060062258 | Brau et al. | Mar 2006 | A1 |
20060131176 | Hsu | Jun 2006 | A1 |
20060131695 | Kuekes et al. | Jun 2006 | A1 |
20060159131 | Liu et al. | Jul 2006 | A1 |
20060164496 | Tokutake et al. | Jul 2006 | A1 |
20060187794 | Harvey et al. | Aug 2006 | A1 |
20060208667 | Lys et al. | Sep 2006 | A1 |
20060216940 | Gorrell et al. | Sep 2006 | A1 |
20060243925 | Barker et al. | Nov 2006 | A1 |
20060274922 | Ragsdale | Dec 2006 | A1 |
20070003781 | de Rochemont | Jan 2007 | A1 |
20070013765 | Hudson et al. | Jan 2007 | A1 |
20070075263 | Gorrell et al. | Apr 2007 | A1 |
20070075264 | Gorrell et al. | Apr 2007 | A1 |
20070085039 | Gorrell et al. | Apr 2007 | A1 |
20070086915 | LeBoeuf et al. | Apr 2007 | A1 |
20070116420 | Estes et al. | May 2007 | A1 |
20070146704 | Schmidt et al. | Jun 2007 | A1 |
20070152176 | Gorrell et al. | Jul 2007 | A1 |
20070154846 | Gorrell et al. | Jul 2007 | A1 |
20070194357 | Oohashi | Aug 2007 | A1 |
20070200940 | Gruhlke et al. | Aug 2007 | A1 |
20070238037 | Wuister et al. | Oct 2007 | A1 |
20070252983 | Tong et al. | Nov 2007 | A1 |
20070258492 | Gorrell | Nov 2007 | A1 |
20070258689 | Gorrell et al. | Nov 2007 | A1 |
20070258690 | Gorrell et al. | Nov 2007 | A1 |
20070259641 | Gorrell | Nov 2007 | A1 |
20070264023 | Gorrell et al. | Nov 2007 | A1 |
20070264030 | Gorrell et al. | Nov 2007 | A1 |
20070282030 | Anderson et al. | Dec 2007 | A1 |
20070284527 | Zani et al. | Dec 2007 | A1 |
20080069509 | Gorrell et al. | Mar 2008 | A1 |
20080302963 | Nakasuji et al. | Dec 2008 | A1 |
Number | Date | Country |
---|---|---|
0237559 | Dec 1991 | EP |
2004-32323 | Jan 2004 | JP |
WO 8701873 | Mar 1987 | WO |
WO 9321663 | Oct 1993 | WO |
WO 0072413 | Nov 2000 | WO |
WO 02025785 | Mar 2002 | WO |
WO 02077607 | Oct 2002 | WO |
WO 2004086560 | Oct 2004 | WO |
WO 2005015143 | Feb 2005 | WO |
WO 2005098966 | Oct 2005 | WO |
WO 2006042239 | Apr 2006 | WO |
WO 2007081389 | Jul 2007 | WO |
WO 2007081390 | Jul 2007 | WO |
WO 2007081391 | Jul 2007 | WO |
Number | Date | Country | |
---|---|---|---|
20070262234 A1 | Nov 2007 | US |