Number | Date | Country | Kind |
---|---|---|---|
4112967 | Apr 1991 | DEX |
Number | Name | Date | Kind |
---|---|---|---|
3732273 | Heine et al. | May 1973 | |
4197080 | Mee | Apr 1980 | |
4425424 | Altland et al. | Jan 1984 | |
4619998 | Buhr | Oct 1986 | |
4696888 | Buhr | Sep 1987 |
Number | Date | Country |
---|---|---|
0330386 | Aug 1989 | EPX |
Entry |
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Taylor et al., "Thallium in Organic Synthesis", J. Org. Chem., 35, 1672, 1970, p. 1568. |
Ueno et al., "Chemical Amplification Positive Resist Systems Using Novel Sulfonates as Acid Generators", in Polymers for Microelectronics-Science and Tech., edited by Y. Tabata et al., Kodansha-Weinheim-New York, 1989, pp. 66-67. |