Substrate conveyer for a substrate processing device

Abstract

Description

FIG. 1 is a front view of a substrate conveyer for a substrate processing device of the present invention.

FIG. 2 is a rear view of the substrate conveyer for a substrate processing device of FIG. 1.

FIG. 3 is a top plan view of the substrate conveyer for a substrate processing device of FIG. 1.

FIG. 4 is a bottom view of the substrate conveyer for a substrate processing device of FIG. 1.

FIG. 5 is a right side view of the substrate conveyer for a substrate processing device of FIG. 1.

FIG. 6 is a left side view of the substrate conveyer for a substrate processing device of FIG. 1.

FIG. 7 is a perspective view of the substrate conveyer for a substrate processing device of FIG. 1.

FIG. 8 is a reference view showing the substrate conveyer for a substrate processing device of FIG. 1 in use, wherein the substrate conveyer conveys substrates from a loader module to process modules; and,

FIG. 9 is a reference view showing the substrate conveyer for a substrate processing device of FIG. 1 connected with a loader module.

The broken lines in the drawings depict unclaimed environmental subject matter.

Claims

The ornamental design for a substrate conveyer for a substrate processing device, as shown and described.