Support of wafer boat for manufacturing semiconductor wafers

Information

  • Patent Grant
  • D616394
  • Patent Number
    D616,394
  • Date Filed
    Wednesday, September 2, 2009
    15 years ago
  • Date Issued
    Tuesday, May 25, 2010
    14 years ago
Abstract
Description


FIG. 1 is front perspective view of a support of wafer boat for manufacturing semiconductor wafers illustrating my new design;



FIG. 2 is a front view thereof;



FIG. 3 is a rear view thereof;



FIG. 4 is a right side view thereof;



FIG. 5 is a left side view thereof;



FIG. 6 is a top plan view thereof;



FIG. 7 is a bottom plan view thereof; and,



FIG. 8 is a cross-sectional view taken through line 88 of FIG. 2.


Claims
  • The ornamental design for a support of wafer boat for manufacturing semiconductor wafers, as shown and described.
Priority Claims (1)
Number Date Country Kind
2009-004989 Mar 2009 JP national
US Referenced Citations (8)
Number Name Date Kind
D404375 Shimazu Jan 1999 S
5897311 Nishi Apr 1999 A
6095806 Suzuki et al. Aug 2000 A
6716027 Kim et al. Apr 2004 B2
D570308 Sato Jun 2008 S
D574792 Sato Aug 2008 S
D579885 Sato Nov 2008 S
D601979 Sato Oct 2009 S