Number | Date | Country | Kind |
---|---|---|---|
361296 | Oct 1980 | CAX |
Number | Name | Date | Kind |
---|---|---|---|
3670153 | Rempert et al. | Jun 1972 | |
3683273 | Behr et al. | Aug 1972 | |
3720818 | Spragg et al. | Mar 1973 | |
3968681 | Cornforth et al. | Jul 1976 | |
4126036 | Nilan et al. | Nov 1978 | |
4133204 | Mittleman | Jan 1979 | |
4154530 | Connolly, Jr. et al. | May 1979 | |
4162528 | Maldonado et al. | Jul 1979 | |
4328553 | Fredriksen et al. | May 1982 |
Entry |
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"A Comparison of Methods for Accurate Film Thickness Measurement" by King et al., Published in Journal of Physics E. Scientific Instruments 1972, vol. 5, pp. 445-449. |