Patent Grant
9153697
1. Field of the Invention
This application relates generally to a semiconductor device and a method of producing such.
2. Description of the Related Art
Semiconductor devices, particularly integrated circuits using MOS transistors, are increasingly being highly integrated. MOS transistors in integrated circuits have been downsized to nano sizes as the integration level is increased. As MOS transistors are downsized, problems arise such as difficulty in leaking current control. For that reason, further downsizing is difficult. In order to resolve these problems, a surrounding gate transistor (SGT) structure has been proposed in which the source, gate and drain are provided on a substrate in the vertical direction and the gate surrounds an island-shaped semiconductor layer.
In order to reduce power consumption in SGTs, it is preferable for resistance to be reduced in the source, gate and drain. In particular, in reducing the resistance of the gate electrode, it is desirable to use metal in the gate electrode. However, contamination of manufacturing equipment by metal and contamination of semiconductor devices produced by that manufacturing equipment is not desirable. Accordingly, processes subsequent to the forming of the metal gate electrode need to be special processes such as those that constantly control such metal contamination.
Patent Literature 1 discloses a method for producing an SGT satisfying to a certain extent the various conditions stated above.
However, in Patent Literature 1 the protection of semiconductor manufacturing equipment and semiconductor devices from metal contamination is imperfect. For example, in Patent Literature 1 the gate electrode is formed by planarizing the gate metal using CMP (Chemical Mechanical Polishing) and then etching this material. At this time, the gate metal is not covered by other materials and is exposed. In addition, the gate metal is similarly exposed during the process of wet etching the nitride film hard mask and nitride film sidewall. Consequently, there is a concern that the CMP device, the gate etching device and the nitride film wet etching device could be contaminated by metal in the course of producing the SGT. Hence, there is a possibility that a semiconductor device produced through such a metal device could be contaminated by metal.
In addition, when forming a metal-semiconductor compound through etching in Patent Literature 1, the gate metal is exposed. Consequently, per Patent Literature 1, the gate metal needs to be tantalum or some other material that is not etched by the chemicals used when forming the metal-semiconductor compound.
In addition, another problem is that similar to MOS transistors, as SGTs are downsized parasitic capacitance occurs in the multi-layered wiring and through this the operating speed of the SGT declines.
In consideration of the foregoing, it is an objective of the present invention to provide a semiconductor device having a structure that controls metal contamination of semiconductor manufacturing equipment and semiconductor devices in semiconductor manufacturing processes while having good characteristics, and a method of producing such a device.
The semiconductor device according to a first aspect of the present invention is a semiconductor device provided with:
a first planar semiconductor layer;
a first columnar semiconductor layer formed on the first planar semiconductor layer;
a first high concentration semiconductor layer formed on the first planar semiconductor layer and the lower region of the first columnar semiconductor layer;
a second high concentration semiconductor layer of the same conductive type as the first high concentration semiconductor layer, formed on the upper region of the first columnar semiconductor layer;
a first gate insulating film formed on the sidewall of the first columnar semiconductor layer between the first high concentration semiconductor layer and the second high concentration semiconductor layer, so as to surround the first columnar semiconductor layer;
a first metal film formed on the first gate insulating film so as to surround the first gate insulating film;
a first semiconductor film formed on the first metal film so as to surround the first metal film;
a first gate electrode composed of the first metal film and the first semiconductor film;
a first insulating film formed between the first gate electrode and the first planar semiconductor layer;
a second insulating film formed in sidewall shape contacting the upper sidewall of the first columnar semiconductor layer and the top surface of the first gate electrode so as to surround the upper region of the first columnar semiconductor layer;
a third insulating film formed in a sidewall shape contacting the sidewall of the first insulating film and the first gate electrode so as to surround the first gate electrode and the first insulating film;
a first contact formed above the first columnar semiconductor layer;
a second contact formed above the first planar semiconductor layer; and
a third contact formed above the first gate electrode;
wherein the first gate insulating film and the first metal film are covered by the first columnar semiconductor layer, the first semiconductor film, the first insulating film and the second insulating film.
It is preferable for the thickness of the second insulating film to be thicker than the sum of the thickness of the first gate insulating film and the thickness of the first metal film.
It is preferable for the semiconductor device to further have a first metal-semiconductor compound formed on the upper surface of the first high concentration semiconductor layer.
It is preferable for the length from the center of the first columnar semiconductor layer to the edge of the first planar semiconductor layer to be larger than the sum of the length from the center to the sidewall of the first columnar semiconductor layer, the thickness of the first gate insulating film, the thickness of the first gate electrode and the thickness of the third insulating film.
It is also possible for the semiconductor device to further have a third metal-semiconductor compound formed on the top surface of the first gate electrode.
It is also possible for the semiconductor device to further have a second metal-semiconductor compound formed on the top surface of the second high concentration semiconductor layer.
The semiconductor device according to a second aspect of the present invention is provided with a first transistor and a second transistor, wherein:
the first transistor has:
a first planar semiconductor layer;
a first columnar semiconductor layer formed on the first planar semiconductor layer;
a first high concentration semiconductor layer of second conductive type formed on the lower region of the first columnar semiconductor layer and on the region of the first planar semiconductor layer below the first columnar semiconductor layer;
a second high concentration semiconductor layer of second conductive type formed on the upper region of the first columnar semiconductor layer;
a first gate insulating film formed on the sidewall of the first columnar semiconductor layer between the first high concentration semiconductor layer and the second high concentration semiconductor layer, so as to surround the first columnar semiconductor layer;
a first metal film formed on the first gate insulating film so as to surround the first gate insulating film;
a first semiconductor film formed on the first metal film so as to surround the first metal film;
a first gate electrode composed of the first metal film and the first semiconductor film;
a first insulating film formed between the first gate electrode and the first planar semiconductor layer;
a second insulating film formed in sidewall shape contacting the upper sidewall of the first columnar semiconductor layer and the top surface of the first gate electrode so as to surround upper region of the first columnar semiconductor layer;
a third insulating film formed in a sidewall shape contacting the sidewall of the first insulating film and the first gate electrode so as to surround the first gate electrode and the first insulating film;
a first metal-semiconductor compound formed on the top surface of the portion of the first high concentration semiconductor layer formed in the region below the first columnar semiconductor layer;
a third metal-semiconductor compound formed on the top surface of the first gate electrode; and,
a second metal-semiconductor compound formed on the top surface of the second high concentration semiconductor layer;
and the second transistor has:
a second planar semiconductor layer;
a second columnar semiconductor layer formed on the second planar semiconductor layer;
a third high concentration semiconductor layer of first conductive type formed on the lower region of the second columnar semiconductor layer and on the region of the second planar semiconductor layer below the second columnar semiconductor layer;
a fourth high concentration semiconductor layer of first conductive type formed on the upper region of the second columnar semiconductor layer;
a second gate insulating film formed on the sidewall of the second columnar semiconductor layer between the third high concentration semiconductor layer and the fourth high concentration semiconductor layer, so as to surround the second columnar semiconductor layer;
a second metal film formed on the second gate insulating film so as to surround the second gate insulating film;
a second semiconductor film formed on the second metal film so as to surround the second metal film;
a second gate electrode composed of the second metal film and the second semiconductor film;
a fourth insulating film formed between the second gate electrode and the second planar semiconductor layer;
a fifth insulating film formed in sidewall shape contacting the upper sidewall of the second columnar semiconductor layer and the top surface of the second gate electrode so as to surround the top region of the second columnar semiconductor layer;
a sixth insulating film formed in a sidewall shape contacting the sidewall of the fourth insulating film and the second gate electrode so as to surround the second gate electrode and the fourth insulating film;
a fourth metal-semiconductor compound formed on the top surface of the portion of the third high concentration semiconductor layer formed in the region below the second columnar semiconductor layer;
a fifth metal-semiconductor compound formed on the top surface of the second gate electrode; and,
a sixth metal-semiconductor compound formed on the top surface of the fourth high concentration semiconductor layer;
wherein the first gate insulating film and the first metal film are covered by the first columnar semiconductor layer, the first semiconductor film, the first insulating film and the second insulating film, and
the second gate insulating film and the second metal film are covered by the second columnar semiconductor layer, the second semiconductor film, the fourth insulating film and the fifth insulating film.
It is preferable for the first gate insulating film and the first metal film to be formed from materials that make the first transistor enhancement-type, and
the second gate insulating film and the second metal film to be formed from materials that make the second transistor enhancement-type.
It is preferable for the thickness of the second insulating film to be thicker than the sum of the thickness of the first gate insulating film and the thickness of the first metal film.
It is also possible for the semiconductor device to be such that the length from the center of the first columnar semiconductor layer to the edge of the first planar semiconductor layer is larger than the sum of the length from the center to the sidewall of the first columnar semiconductor layer, the thickness of the first gate insulating film, the thickness of the first gate electrode and the thickness of the third insulating film.
It is also possible for the semiconductor device to be such that:
the first conductive type is n+ type,
the second conductive type is p+ type, and
the first and second columnar semiconductor layers and the first and second planar semiconductor layers are made of silicon
The method of producing a semiconductor device according to a third aspect of the present invention is a method of producing the semiconductor device according to the present invention and includes:
a process for preparing a first structure having:
a first planar semiconductor layer;
a first columnar semiconductor layer formed on the first planar semiconductor layer and a hard mask formed on the top surface of the first columnar semiconductor;
a first high concentration semiconductor layer formed on the lower region of the first columnar semiconductor layer and on the region of the first planar semiconductor layer below the first columnar semiconductor layer; and
a first insulating film formed on the first planar semiconductor layer;
a process for forming a seventh insulating film, a third metal film and a third semiconductor film, in that order, on the first structure;
a process for etching the third semiconductor film and leaving a sidewall shape on the sidewall on the first columnar semiconductor layer;
a process for etching the third metal film and leaving a sidewall shape on the sidewall of the first columnar semiconductor layer;
a seventh insulating film etching process for etching the seventh insulating film and leaving a sidewall shape on the sidewall of the first columnar semiconductor layer; and
a fourth semiconductor film formation process for forming a fourth semiconductor film on the result of the seventh insulating film etching process.
It is also possible for the semiconductor device production method according to the present invention to include:
a process for planarizing the fourth semiconductor film and the third semiconductor film in the result of the fourth semiconductor film formation process and exposing the upper region of the first metal film;
a first metal film and first gate insulating film formation process for etching the third metal film and the seventh insulating film so that the upper sidewall of the first columnar semiconductor layer is exposed to form the first metal film and the first gate insulating film; and,
a process for forming a first oxide film on the result of the first metal film and first gate insulating film formation process.
The method of producing a semiconductor device according to a fourth aspect of the present invention is a method of producing the semiconductor device according to the present invention and includes:
a process for preparing a second structure having:
a first planar semiconductor layer;
a first columnar semiconductor layer formed on the first planar semiconductor layer;
a first high concentration semiconductor layer formed on the lower region of the first columnar semiconductor layer and on the region of the first planar semiconductor layer below the first columnar semiconductor layer;
a first gate insulating film formed on the sidewall in the middle region of the first columnar semiconductor layer so as to surround the first columnar semiconductor layer;
a first metal film formed on the first gate insulating film so as to surround the first gate insulating film;
a first semiconductor film formed on the first metal film so as to surround the first metal film;
a first gate electrode composed of the first metal film and the first semiconductor film; and
a first insulating film formed between the first gate electrode and the first planar semiconductor layer; and
a process for forming a second high concentration semiconductor layer of the same conductive type as the first high concentration semiconductor layer on the upper region of the first columnar semiconductor layer on the second structure by injecting a dopant at an angle of 10 degrees to 60 degrees, with a line orthogonal to the substrate being 0 degrees.
The method of producing a semiconductor device according to a fifth aspect of the present invention is a method of producing the semiconductor device according to the present invention and includes:
a process for preparing a third structure having:
a first planar semiconductor layer;
a first columnar semiconductor layer formed on the first planar semiconductor layer;
a first high concentration semiconductor layer formed on the lower region of the first columnar semiconductor layer and on the region of the first planar semiconductor layer below the first columnar semiconductor layer;
a second high concentration semiconductor layer of the same conductive type as the first semiconductor layer, formed on the upper region of the first columnar semiconductor layer;
a first gate insulating film formed on the sidewall of the first columnar semiconductor layer between the first high concentration semiconductor layer and the second high concentration semiconductor layer, so as to surround the first columnar semiconductor layer;
a first metal film formed on the first gate insulating film so as to surround the first gate insulating film;
a first semiconductor film formed on the first metal film so as to surround the first metal film;
a first gate electrode composed of the first metal film and the first semiconductor film; and
a first insulating film formed between the first gate electrode and the first planar semiconductor layer;
a process for forming an eighth insulating film on the third structure; and
a process for forming a second insulating film by etching the eighth insulating film in a sidewall shape so the eighth insulating film remains on the top surface of the first gate electrode and the upper sidewall of the first columnar semiconductor layer.
The method of producing a semiconductor device according to a fifth aspect of the present invention is a method of producing the semiconductor device according to the present invention and includes:
a process for preparing a fourth structure having:
a first planar semiconductor layer;
a first columnar semiconductor layer formed on the first planar semiconductor layer;
a first high concentration semiconductor layer formed on the lower region of the first columnar semiconductor layer and on the region of the first planar semiconductor layer below the first columnar semiconductor layer;
a second high concentration semiconductor layer of the same conductive type as the first semiconductor layer, formed on the upper region of the first columnar semiconductor layer;
a first gate insulating film formed on the sidewall of the first columnar semiconductor layer between the first high concentration semiconductor layer and the second high concentration semiconductor layer, so as to surround the first columnar semiconductor layer;
a first metal film formed on the first gate insulating film so as to surround the first gate insulating film;
a first semiconductor film formed on the first metal film so as to surround the first metal film;
a first gate electrode composed of the first metal film and the first semiconductor film;
a first insulating film formed between the first gate electrode and the first planar semiconductor layer;
a second insulating film formed in sidewall shape contacting the upper sidewall of the first columnar semiconductor layer and the top surface of the first gate electrode so as to surround the top region of the first columnar semiconductor layer;
a third insulating film formed in a sidewall shape contacting the sidewall of the first insulating film and the first gate electrode so as to surround the first gate electrode and the first insulating film; and
a first gate wire connected to the first gate electrode;
a contact stopper formation process for forming a contact stopper on the fourth structure;
a process for forming an interlayer insulating film so as to bury the result of the contact stopper formation process;
a process for forming a first resist on the interlayer insulating film, excluding on top of the first columnar semiconductor layer;
a process for etching the interlayer insulating film and forming a first contact hole on the interlayer insulating film;
a first resist removal process for removing the first resist;
a process for forming a second resist on the result of the first resist removal process, excluding on the first planar semiconductor layer and on the first gate wire;
a process for etching the interlayer insulating film and forming a second contact hole on top of the first planar semiconductor layer and forming a third contact hole on top of the first gate wire, on the interlayer insulating film;
a process for removing the second resist; and
a process for forming a first contact positioned above the first columnar semiconductor layer, a second contact positioned above the first planar semiconductor layer and a third contact positioned above the first gate wire on the first contact hole, the second contact hole and the third contact hole, respectively.
In the present invention, the semiconductor device is provided with:
a first planar semiconductor layer;
a first columnar semiconductor layer formed on the first planar semiconductor layer;
a first high concentration semiconductor layer formed on the first planar semiconductor layer and the lower region of the first columnar semiconductor layer;
a second high concentration semiconductor layer of the same conductive type as the first high concentration semiconductor layer, formed on the upper region of the first columnar semiconductor layer;
a first gate insulating film formed on the sidewall of the first columnar semiconductor layer between the first high concentration semiconductor layer and the second high concentration semiconductor layer, so as to surround the first columnar semiconductor layer;
a first metal film formed on the first gate insulating film so as to surround the first gate insulating film;
a first semiconductor film formed on the first metal film so as to surround the first metal film;
a first gate electrode composed of the first metal film and the first semiconductor film;
a first insulating film formed between the first gate electrode and the first planar semiconductor layer;
a second insulating film formed in sidewall shape contacting the upper sidewall of the first columnar semiconductor layer and the top surface of the first gate electrode so as to surround the upper region of the first columnar semiconductor layer;
a third insulating film formed in a sidewall shape contacting the sidewall of the first insulating film and the first gate electrode so as to surround the first gate electrode and the first insulating film;
a first contact formed above the first columnar semiconductor layer;
a second contact formed above the first planar semiconductor layer; and
a third contact formed above the first gate electrode;
and the first gate insulating film and the first metal film are covered by the first columnar semiconductor layer, the first semiconductor film, the first insulating film and the second insulating film.
Through this, an SGT structure is provided that uses metal in the gate electrode while controlling metal contamination, lowers the resistance of the gate, source and drain, and reduces parasitic capacitance.
The first gate insulating film and the first metal film are covered by the first columnar semiconductor layer, the first semiconductor film, the first insulating film and the second insulating film.
If the metal film is exposed when the metal-semiconductor compound is formed, the metal film is etched by a mixture, such as, a sulfuric acid hydrogen peroxide mixture or an ammonia hydrogen peroxide mixture when the metal-semiconductor compound is formed. However, in the structure of the present invention, the first gate insulating film and the first metal film are covered by the first columnar semiconductor layer, the first semiconductor film, the first insulating film and the second insulating film, so the first metal film is not etched by the sulfuric acid hydrogen peroxide mixture or the ammonia hydrogen peroxide mixture when the compound of metal and semiconductor is formed. Through this, it is possible to form a metal-semiconductor compound on the first high concentration semiconductor layer, the first gate electrode and the second high concentration semiconductor layer, it is possible to control depletion of the channel region by using metal in the gate electrode, to reduce gate electrode resistance and to reduce the resistance of the gate, source and drain through a compound of metal and silicon. In addition, it is possible to reduce parasitic capacitance between the gate electrode and the planar semiconductor layer by means of the first insulating film.
In addition, the first gate insulating film and the first metal film are formed only surrounding the first columnar semiconductor layer, and the first metal film is covered by a semiconductor film such as polysilicon, so when the semiconductor film is planarized using a CMP device during gate formation, it is possible to prevent metal contamination of the CMP device.
In addition, the first gate insulating film and the first metal film are formed only surrounding the first columnar semiconductor layer, and the first metal film is covered by a semiconductor film such as polysilicon, so when the semiconductor film is etched during gate etching, it is possible to prevent metal contamination of the gate etching device.
In addition, the first gate insulating film and the first metal film are formed only surrounding the first columnar semiconductor layer, and the first metal film is covered by a semiconductor film such as polysilicon, so when the nitride film hard mask and the nitride film sidewalls are wet etched, it is possible to prevent metal contamination of the nitride film wet etching device.
In addition, with the present invention the thickness of the second insulating film is thicker than the sum of the thickness of the first gate insulating film and the thickness of the first metal film.
Through this, the first gate insulating film and the first metal film are covered by the first columnar semiconductor layer, the first semiconductor film, the first insulating film and the second insulating film, so the first metal film is not etched by the sulfuric acid hydrogen peroxide mixture or the ammonia hydrogen peroxide mixture when the compound of metal and semiconductor is formed. Through this, it is possible to form a metal-semiconductor compound on the first high concentration semiconductor layer, the first gate electrode and the second high concentration semiconductor layer without any special additional processes.
By having a first metal-semiconductor compound formed on the upper surface of the first high concentration semiconductor layer, it is possible to lower the resistance of the first high concentration semiconductor layer.
Here, the length from the center of the first columnar semiconductor layer to the edge of the first planar semiconductor layer is larger than the sum of the length from the center to the sidewall of the first columnar semiconductor layer, the thickness of the first gate insulating film, the thickness of the first gate electrode and the thickness of the third insulating film.
Through this, it is possible to form the first metal-semiconductor compound on the first high concentration semiconductor layer formed on the first planar semiconductor layer, and to lower the resistance of the first high concentration semiconductor layer.
Here, by having a third metal-semiconductor compound formed on the top surface of the first gate electrode, it is possible to lower the resistance of the first gate electrode.
Here, by having a second metal-semiconductor compound formed on the top surface of the second high concentration semiconductor layer, it is possible to lower the resistance of the second high concentration semiconductor layer.
The semiconductor device according to a second aspect of the present invention is provided with a first transistor and a second transistor, wherein:
the first transistor has:
a first planar semiconductor layer;
a first columnar semiconductor layer formed on the first planar semiconductor layer;
a first high concentration semiconductor layer of second conductive type formed on the lower region of the first columnar semiconductor layer and on the region of the first planar semiconductor layer below the first columnar semiconductor layer;
a second high concentration semiconductor layer of second conductive type formed on the upper region of the first columnar semiconductor layer;
a first gate insulating film formed on the sidewall of the first columnar semiconductor layer between the first high concentration semiconductor layer and the second high concentration semiconductor layer, so as to surround the first columnar semiconductor layer;
a first metal film formed on the first gate insulating film so as to surround the first gate insulating film;
a first semiconductor film formed on the first metal film so as to surround the first metal film;
a first gate electrode composed of the first metal film and the first semiconductor film;
a first insulating film formed between the first gate electrode and the first planar semiconductor layer;
a second insulating film formed in sidewall shape contacting the upper sidewall of the first columnar semiconductor layer and the top surface of the first gate electrode so as to surround upper region of the first columnar semiconductor layer;
a third insulating film formed in a sidewall shape contacting the sidewall of the first insulating film and the first gate electrode so as to surround the first gate electrode and the first insulating film;
a first metal-semiconductor compound formed on the top surface of the portion of the first high concentration semiconductor layer formed in the region below the first columnar semiconductor layer;
a third metal-semiconductor compound formed on the top surface of the first gate electrode; and,
a second metal-semiconductor compound formed on the top surface of the second high concentration semiconductor layer;
and the second transistor has:
a second planar semiconductor layer;
a second columnar semiconductor layer formed on the second planar semiconductor layer;
a third high concentration semiconductor layer of first conductive type formed on the lower region of the second columnar semiconductor layer and on the region of the second planar semiconductor layer below the second columnar semiconductor layer;
a fourth high concentration semiconductor layer of first conductive type formed on the upper region of the second columnar semiconductor layer;
a second gate insulating film formed on the sidewall of the second columnar semiconductor layer between the third high concentration semiconductor layer and the fourth high concentration semiconductor layer, so as to surround the second columnar semiconductor layer;
a second metal film formed on the second gate insulating film so as to surround the second gate insulating film;
a second semiconductor film formed on the second metal film so as to surround the second metal film;
a second gate electrode composed of the second metal film and the second semiconductor film;
a fourth insulating film formed between the second gate electrode and the second planar semiconductor layer;
a fifth insulating film formed in sidewall shape contacting the upper sidewall of the second columnar semiconductor layer and the top surface of the second gate electrode so as to surround the top region of the second columnar semiconductor layer;
a sixth insulating film formed in a sidewall shape contacting the sidewall of the fourth insulating film and the second gate electrode so as to surround the second gate electrode and the fourth insulating film;
a fourth metal-semiconductor compound formed on the top surface of the portion of the third high concentration semiconductor layer formed in the region below the second columnar semiconductor layer;
a fifth metal-semiconductor compound formed on the top surface of the second gate electrode; and,
a sixth metal-semiconductor compound formed on the top surface of the fourth high concentration semiconductor layer;
wherein the first gate insulating film and the first metal film are covered by the first columnar semiconductor layer, the first semiconductor film, the first insulating film and the second insulating film, and
the second gate insulating film and the second metal film are covered by the second columnar semiconductor layer, the second semiconductor film, the fourth insulating film and the fifth insulating film.
Through this, an SGT structure is provided that uses metal in the gate electrode while controlling metal contamination, lowers the resistance of the gate, source and drain, and reduces parasitic capacitance.
The first gate insulating film and the first metal film are covered by the first columnar semiconductor layer, the first semiconductor film, the first insulating film and the second insulating film.
If the metal film is exposed when the metal-semiconductor compound is formed, the metal film is etched by a sulfuric acid hydrogen peroxide mixture or an ammonia hydrogen peroxide mixture when the metal-semiconductor compound is formed. However, in the structure of the present invention, the first gate insulating film and the first metal film are covered by the first columnar semiconductor layer, the first semiconductor film, the first insulating film and the second insulating film, so the first metal film is not etched by the sulfuric acid hydrogen peroxide mixture or the ammonia hydrogen peroxide mixture when the compound of metal and semiconductor is formed. Through this, it is possible to form a metal-semiconductor compound on the first high concentration semiconductor layer, the first gate electrode and the second high concentration semiconductor layer, and it is possible to control depletion of the channel region by using metal in the first gate electrode to reduce the resistance of the first gate electrode and to reduce the resistance of the gate, source and drain through a compound of metal and silicon. In addition, it is possible to reduce parasitic capacitance between the first gate electrode and the first planar semiconductor layer by means of the first insulating film.
In addition, the second gate insulating film and the second metal film are covered by the second columnar semiconductor layer, the second semiconductor film, the fourth insulating film and the fifth insulating film. If the metal film is exposed when the metal-semiconductor compound is formed, the metal film is etched by a sulfuric acid hydrogen peroxide mixture or an ammonia hydrogen peroxide mixture when the metal-semiconductor compound is formed. However, in the structure of the present invention, the second gate insulating film and the second metal film are covered by the second columnar semiconductor layer, the second semiconductor film, the fourth insulating film and the fifth insulating film, so the second metal film is not etched by the sulfuric acid hydrogen peroxide mixture or the ammonia hydrogen peroxide mixture when the metal-semiconductor compound is formed. Through this, it is possible to form a metal-semiconductor compound on the third high concentration semiconductor layer, the second gate electrode and the fourth high concentration semiconductor layer, to control depletion of the channel region by using metal in the second gate electrode, to reduce the resistance of the second gate electrode and to reduce the resistance of the gate, source and drain through a compound of metal and silicon. In addition, it is possible to reduce parasitic capacitance between the second gate electrode and the second planar semiconductor layer by means of the fourth insulating film.
Here, the first gate insulating film and the first metal film are formed from materials that make the first transistor enhancement-type, and
the second gate insulating film and the second metal film are formed from materials that make the second transistor enhancement-type.
Through this, it is possible to reduce penetrating current that flows during operation of a semiconductor device composed of a first transistor and a second transistor.
Here, by having the thickness of the second insulating film be thicker than the sum of the thickness of the first gate insulating film and the thickness of the first metal film, the first gate insulating film and the first metal film are covered by the first columnar semiconductor layer, the first semiconductor film, the first insulating film and the second insulating film, so the first metal film is not etched by the sulfuric acid hydrogen peroxide mixture or the ammonia hydrogen peroxide mixture when the compound of metal and semiconductor is formed.
Through this, it is possible to form a metal-semiconductor compound on the third high concentration semiconductor layer, the first gate electrode and the fourth high concentration semiconductor layer.
Here, by having the length from the center of the first columnar semiconductor layer to the edge of the first planar semiconductor layer be larger than the sum of the length from the center to the sidewall of the first columnar semiconductor layer, the thickness of the first gate insulating film, the thickness of the first gate electrode and the thickness of the third insulating film, it is possible to form the first metal-semiconductor compound on the third high concentration semiconductor layer formed on the first planar semiconductor layer, and to lower the resistance of the third high concentration semiconductor layer.
It is also possible for the semiconductor device to be such that:
the first conductive type is n+ type,
the second conductive type is p+ type, and
the first and second columnar semiconductor layers and the first and second planar semiconductor layers are made of silicon.
Through this, it is possible to form an inverter with the first transistor being an nMOS SGT and the second transistor being a pMOS SGT.
The method of producing a semiconductor device according to the present invention includes:
a process for preparing a first structure having:
a first planar semiconductor layer;
a first columnar semiconductor layer formed on the first planar semiconductor layer and a hard mask formed on the top surface of the first columnar semiconductor;
a first high concentration semiconductor layer formed on the lower region of the first columnar semiconductor layer and on the region of the first planar semiconductor layer below the first columnar semiconductor layer; and
a first insulating film formed on the first planar semiconductor layer;
a process for forming a seventh insulating film, a third metal film and a third semiconductor film, in that order, on the first structure;
a process for etching the third semiconductor film and leaving a sidewall shape on the sidewall on the first columnar semiconductor layer;
a process for etching the third metal film and leaving a sidewall shape on the sidewall of the first columnar semiconductor layer;
a seventh insulating film etching process for etching the seventh insulating film and leaving a sidewall shape on the sidewall of the first columnar semiconductor layer; and
a fourth semiconductor film formation process for forming a fourth semiconductor film on the result of the seventh insulating film etching process.
Through this, the first gate insulating film and the first metal film are covered by the first columnar semiconductor layer, the first semiconductor film, the first insulating film and the hard mask. When a high-k film is used for the first gate insulating film, the high-k film is a source of metal contamination, so it is possible to control metal contamination by the first gate insulating film and the first metal film, which are sources of contamination, being covered by the first columnar semiconductor layer, the fourth semiconductor film, the first insulating film and the hard mask.
In addition, the semiconductor device production method according to the present invention may include:
a process for planarizing the fourth semiconductor film and the third semiconductor film in the result of the fourth semiconductor film formation process and exposing the upper region of the first metal film;
a first metal film and first gate insulating film formation process for etching the third metal film and the seventh insulating film so that the upper sidewall of the first columnar semiconductor layer is exposed to form the first metal film and the first gate insulating film; and,
a process for forming a first oxide film on the result of the first metal film and first gate insulating film formation process.
Through this, it is possible to control metal contamination of the CMP device used in the planarization process because metal is not exposed during the process of planarizing the fourth semiconductor film and the third semiconductor film, it is possible to determine the gate length of the SGT through etching of the semiconductor film, and it is possible to control fluctuations in gate length, that is to say variances in gate length, and damage to the first gate insulating film and the first metal film from the gate electrode top surface because the gate electrode top surface is protected by the deposited first oxide film from wet processes and dry processes performed in later procedures.
In addition, the first gate insulating film and the first metal film are formed only around the first columnar silicon layer and the first metal film is covered by polysilicon, so it is possible to reduce metal contamination of the gate etching device by etching the polysilicon during gate etching.
In addition, the first gate insulating film and the first metal film are formed only around the columnar semiconductor layer and the first metal film is covered by the first columnar semiconductor layer and the third and fourth semiconductor films, so it is possible to reduce metal contamination of the nitride film wet etching device when wet etching the nitride film hard mask and the nitride film sidewall.
In addition, the method of producing a semiconductor device according to the present invention includes:
a process for preparing a second structure having:
a first planar semiconductor layer;
a first columnar semiconductor layer formed on the first planar semiconductor layer;
a first high concentration semiconductor layer formed on the lower region of the first columnar semiconductor layer and on the region of the first planar semiconductor layer below the first columnar semiconductor layer;
a first gate insulating film formed on the sidewall in the middle region of the first columnar semiconductor layer so as to surround the first columnar semiconductor layer;
a first metal film formed on the first gate insulating film so as to surround the first gate insulating film;
a first semiconductor film formed on the first metal film so as to surround the first metal film;
a first gate electrode composed of the first metal film and the first semiconductor film; and
a first insulating film formed between the first gate electrode and the first planar semiconductor layer; and
a process for forming a second high concentration semiconductor layer of the same conductive type as the first high concentration semiconductor layer on the upper region of the first columnar semiconductor layer on the second structure by injecting a dopant at an angle of 10 degrees to 60 degrees, with a line orthogonal to the substrate being 0 degrees.
Through this, it is possible to cover the first gate insulating film and the first metal film with the first columnar semiconductor layer, the first semiconductor layer, the first insulating film and the second insulating film.
In addition, the method of producing a semiconductor device according to the present invention includes:
a process for preparing a third structure having:
a first planar semiconductor layer;
a first columnar semiconductor layer formed on the first planar semiconductor layer;
a first high concentration semiconductor layer formed on the lower region of the first columnar semiconductor layer and on the region of the first planar semiconductor layer below the first columnar semiconductor layer;
a second high concentration semiconductor layer of the same conductive type as the first high concentration semiconductor layer, formed on the upper region of the first columnar semiconductor layer;
a first gate insulating film formed on the sidewall of the first columnar semiconductor layer between the first high concentration semiconductor layer and the second high concentration semiconductor layer, so as to surround the first columnar semiconductor layer;
a first metal film formed on the first gate insulating film so as to surround the first gate insulating film;
a first semiconductor film formed on the first metal film so as to surround the first metal film;
a first gate electrode composed of the first metal film and the first semiconductor film; and
a first insulating film formed between the first gate electrode and the first planar semiconductor layer;
a process for forming an eighth insulating film on the third structure; and
a process for forming a second insulating film by etching the eighth insulating film in a sidewall shape so the eighth insulating film remains on the top surface of the first gate electrode and the upper sidewall of the first columnar semiconductor layer.
Through this, it is possible for the second high concentration silicon layer and the first gate electrode to be separated from the first gate insulating film, to have an overlap and to minimize that overlap.
In addition, the method of producing a semiconductor device according to the present invention includes:
a process for preparing a fourth structure having:
a first planar semiconductor layer;
a first columnar semiconductor layer formed on the first planar semiconductor layer;
a first high concentration semiconductor layer formed on the lower region of the first columnar semiconductor layer and on the region of the first planar semiconductor layer below the first columnar semiconductor layer;
a second high concentration semiconductor layer of the same conductive type as the first high concentration semiconductor layer, formed on the upper region of the first columnar semiconductor layer;
a first gate insulating film formed on the sidewall of the first columnar semiconductor layer between the first high concentration semiconductor layer and the second high concentration semiconductor layer, so as to surround the first columnar semiconductor layer;
a first metal film formed on the first gate insulating film so as to surround the first gate insulating film;
a first semiconductor film formed on the first metal film so as to surround the first metal film;
a first gate electrode composed of the first metal film and the first semiconductor film;
a first insulating film formed between the first gate electrode and the first planar semiconductor layer;
a second insulating film formed in sidewall shape contacting the upper sidewall of the first columnar semiconductor layer and the top surface of the first gate electrode so as to surround the top region of the first columnar semiconductor layer;
a third insulating film formed in a sidewall shape contacting the sidewall of the first insulating film and the first gate electrode so as to surround the first gate electrode and the first insulating film; and
a first gate wire connected to the first gate electrode;
a contact stopper formation process for forming a contact stopper on the fourth structure;
a process for forming an interlayer insulating film so as to bury the result of the contact stopper formation process;
a process for forming a first resist on the interlayer insulating film, excluding on top of the first columnar semiconductor layer;
a process for etching the interlayer insulating film and forming a first contact hole on the interlayer insulating film;
a first resist removal process for removing the first resist;
a process for forming a second resist on the result of the first resist removal process, excluding on the first planar semiconductor layer and on the first gate wire;
a process for etching the interlayer insulating film and forming a second contact hole on top of the first planar semiconductor layer and forming a third contact hole on top of the first gate wire, on the interlayer insulating film;
a process for removing the second resist; and
a process for forming a first contact positioned above the first columnar semiconductor layer, a second contact positioned above the first planar semiconductor layer and a third contact positioned above the first gate wire on the first contact hole, the second contact hole and the third contact hole, respectively.
Through this, the contact holes on the first planar semiconductor layer and the first gate wiring are formed through different processes, so it is possible to optimize etching conditions for forming the first contact hole on the first columnar semiconductor layer and etching conditions for forming the second contact hole on the first planar semiconductor layer and the third contact hole on the first gate wiring.
A more complete understanding of this application can be obtained when the following detailed description is considered in conjunction with the following drawings, in which:
The embodiments of the present invention are described below with reference to
This SGT 220 is an nMOS SGT and is provided with a first planar silicon layer 234 and a first columnar silicon layer 232 formed on top of the first planar silicon layer 234.
A first n+ type silicon layer 113 is formed on the lower region of the first columnar silicon layer 232 and the region of the first planar silicon layer 234 positioned below the first columnar silicon layer 232, and a second n+ type silicon layer 157 is formed on the upper region of the first columnar silicon layer 232. In this embodiment, the first n+ type silicon layer 113, for example, functions as a source scattering layer and the second n+ type silicon layer 157 functions as a drain scattering layer. In addition, the area between the source scattering layer and the drawing scattering layer functions as a channel region. The first columnar silicon layer 232 between the first n+ type silicon layer 113 and the second n+ type silicon layer 157 functioning as this channel region is called a first silicon layer 114.
A gate insulating film 140 is formed surrounding the first columnar silicon layer 232 functioning as the channel region. The gate insulating film 140 may be, for example, an oxide film, a nitride film or a high-k film. Furthermore, a first metal film 138 is formed surrounding this gate insulating film 140. The first metal film 138 may be, for example, titanium, titanium nitride, tantalum or tantalum nitride. First polysilicon films 136 and 152 are formed surrounding this first metal film 138. The first metal film 138 and the first polysilicon films 136 and 152 constitute a first gate electrode 236. Thus, by using metal as the gate electrode, it is possible to control depletion of the channel region while also lowering the resistance of the gate electrode.
In the present embodiment, a channel is formed in the first silicon layer 114 by impressing a voltage on the first gate electrode 236 during operation.
In addition, a first metal-silicon compound 172, a third metal-silicon compound 170 and a second metal-silicon compound 171 are formed on the first n+ type silicon layer 113, the gate electrode 236 and the second n+ type silicon layer 157, respectively. As the metal comprising the metal-silicon compounds, Ni or Co may be used, for example. Through these metal-silicon compounds, the first n+ type silicon layer 113, the gate electrode 236 and the second n+ type silicon layer 157 are connected to below-described contacts. Through this, the resistances of the gate, source and drain are lowered.
The first n+ type silicon layer 113 is connected to a contact 230 via the first metal-silicon compound 172. The contact 230 is formed from a barrier metal layer 189 and metal layers 194 and 199. The contact 230 is further connected to a power source wire 225. The power source wire 225 is composed of a barrier metal layer 216, a metal layer 217 and a barrier metal layer 218.
The second n+ type silicon layer 157 is connected to a contact 229 via the second metal-silicon compound 171. The contact 229 is composed of a barrier metal layer 188 and metal layers 193 and 198. The contact 229 is further connected to an output wire 223. The output wire 223 is composed of a barrier metal layer 213, a metal 214 and a barrier metal layer 215.
Furthermore, a first insulating film 129 is formed between the first gate electrode 236 and the first planar silicon layer 234, a second insulating film 162 is formed in a sidewall shape on the upper sidewall of the first columnar silicon layer 232 and above the first gate electrode 236, and a third insulating film 164 is formed in a sidewall shape on the sidewall of the first gate electrode 236 and the first insulating film 129. The first insulating film 129 is preferably a low-k insulating film such as SiOF, SiOH or the like, for example. The second insulating film 162 and the third insulating film 164 are oxide films, nitride films or high-k films, for example.
The parasitic capacitance between the gate electrode and the planar silicon layer is reduced by the first insulating film 129.
With the above composition, downsizing and lowering of resistance in the semiconductor device are realized in the nMOS SGT according to the present embodiment, and in addition parasitic capacitance between multi-layer wiring is reduced. Through this, it is possible to avoid lowering of operation speeds accompanying downsizing of the SGT.
In the nMOS SGT according to this embodiment, the thickness of the second insulating film 162 is preferably thicker than the sum of the thickness of the first gate insulating film 140 and the thickness of the first metal film 138. In this case, the first gate insulating film 140 and the first metal film 138 are covered by the first columnar silicon layer 232, the first polysilicon films 136 and 152, the first insulating film 129 and the second insulating film 162.
By using the above-described composition, the entirety of the first metal film 138 is protected, so this film is not etched by a sulfuric acid hydrogen peroxide mixture or an ammonia hydrogen peroxide mixture when forming the metal-silicon compound.
In addition, the length from the center of the first columnar silicon layer 232 to the end of the first planar silicon layer 234 in the nMOS SGT according to the present embodiment is preferably larger than the sum of the length from the center to the sidewall of the first columnar silicon layer 232, the thickness of the first gate insulating film 140, the thickness of the first gate electrode 236 formed by the first metal film 138 and the first polysilicon films 136 and 152 and the thickness of the third insulating film 164.
When the above-described composition is used, it is possible to form the first metal-silicon compound 172 on the first n+ type silicon layer 113 without the special addition of manufacturing processes.
In the first embodiment, an example was shown of a single columnar semiconductor layer, but in the second embodiment, an example is shown of a circuit composed of multiple columnar semiconductor layers.
An inverter according to the second embodiment is provided with a pMOS SGT and an nMOS SGT.
The nMOS SGT 220 is provided with a first planar silicon layer 234 and a first columnar silicon layer 232 formed on top of the first planar silicon layer 234.
A first n+ type silicon layer 113 is formed on the lower region of the first columnar silicon layer 232 and the region of the first planar silicon layer 234 positioned below the first columnar silicon layer 232, and a second n+ type silicon layer 157 is formed on the upper region of the first columnar silicon layer 232. In this embodiment, the first n+ type silicon layer 113, for example, functions as a source scattering layer and the second n+ type silicon layer 157 functions as a drain scattering layer. In addition, the area between the source scattering layer and the drawing scattering layer functions as a channel region. The first columnar silicon layer 232 between the first n+ type silicon layer 113 and the second n+ type silicon layer 157 functioning as this channel region is called a first silicon layer 114.
A first gate insulating film 140 is formed surrounding the first columnar silicon layer 232 functioning as the channel region. The gate insulating film 140 may be, for example, an oxide film, a nitride film or a high-k film. Furthermore, a first metal film 138 is formed surrounding this first gate insulating film 140. The first metal film 138 may be, for example, titanium, titanium nitride, tantalum or tantalum nitride. First polysilicon films 136 and 152 are formed surrounding this first metal film 138. The first metal film 138 and the first polysilicon films 136 and 152 constitute a first gate electrode 236. Thus, by using metal as the gate electrode, it is possible to control depletion of the channel region while also lowering the resistance of the gate electrode.
In the present embodiment, a channel is formed in the first silicon layer 114 by impressing a voltage on the first gate electrode 236 during operation.
In addition, a first metal-silicon compound 172, a third metal-silicon compound 170 and a second metal-silicon compound 171 are formed on the first n+ type silicon layer 113, the first gate electrode 236 and the second n+ type silicon layer 157, respectively. The metal comprising the metal-silicon compounds may be Ni or Co, for example. Through these metal-silicon compounds, the first n+ type silicon layer 113, the gate electrode 236 and the second n+ type silicon layer 157 are connected to below-described contacts. Through this, the resistances of the gate, source and drain are lowered.
Furthermore, a first insulating film 129 is formed between the first gate electrode 236 and the first planar silicon layer 234, a second insulating film 162 is formed in a sidewall shape on the upper sidewall of the first columnar silicon layer 232 and above the first gate electrode 236, and a third insulating film 164 is formed in a sidewall shape on the sidewall of the first gate electrode 236 and the first insulating film 129. The first insulating film 129 is preferably a low-k insulating film such as SiOF, SiOH or the like, for example. The second insulating film 162 and the third insulating film 164 are oxide films, nitride films or high-k films, for example.
The parasitic capacitance between the gate electrode and the planar silicon layer is reduced by the first insulating film 129.
The pMOS SGT 219 and is provided with a second planar silicon layer 233 and a second columnar silicon layer 231 formed on top of the second planar silicon layer 233.
A first p+ type silicon layer 119 is formed on the lower region of the second columnar silicon layer 231 and the region of the second planar silicon layer 233 positioned below the second columnar silicon layer 231, and a second p+ type silicon layer 159 is formed on the upper region of the second columnar silicon layer 231. In this embodiment, the first p+ type silicon layer 119, for example, functions as a source scattering layer and the second p+ type silicon layer 159 functions as a drain scattering layer. In addition, the area between the source scattering layer and the drawing scattering layer functions as a channel region. The second columnar silicon layer 231 between the first p+ type silicon layer 119 and the second p+ type silicon layer 159 functioning as this channel region is called a second silicon layer 120.
A second gate insulating film 139 is formed surrounding the second columnar silicon layer 231 functioning as the channel region. The second gate insulating film 139 may be, for example, an oxide film, a nitride film or a high-k film. Furthermore, a second metal film 137 is formed surrounding this second gate insulating film 139. The second metal film 137 may be, for example, titanium, titanium nitride, tantalum or tantalum nitride. Second polysilicon films 135 and 151 are formed surrounding this second metal film 137. The second metal film 137 and the second polysilicon films 135 and 151 constitute a second gate electrode 235. Thus, by using metal as the gate electrode, it is possible to control depletion of the channel region while also lowering the resistance of the gate electrode.
In the present embodiment, a channel is formed in the second silicon layer 120 by impressing a voltage on the second gate electrode 235 during operation.
In addition, a fourth metal-silicon compound 168, a fifth metal-silicon compound 170 and a sixth metal-silicon compound 169 are respectively formed on the first p+ type silicon layer 119, the second gate electrode 235 and the second p+ type silicon layer 159. As the metal comprising the metal-silicon compounds, Ni or Co may be used, for example. Through these metal-silicon compounds, the first p+ type silicon layer 119, the second gate electrode 235 and the second p+ type silicon layer 159 are connected to below-described contacts. Through this, the resistances of the gate, source and drain are lowered.
Furthermore, a fourth insulating film 129 is formed between the second gate electrode 235 and the second planar silicon layer 233, a fifth insulating film 161 is formed in a sidewall shape on the upper sidewall of the second columnar silicon layer 231 and above the second gate electrode 235, and a sixth insulating film 164 is formed in a sidewall shape on the sidewall of the second gate electrode 235 and the fourth insulating film 129. The fourth insulating film 129 is preferably a low-k insulating film such as SiOF, SiOH or the like, for example.
The parasitic capacitance between the gate electrode and the planar silicon layer is reduced by the fourth insulating film 129.
The first n+ type silicon layer 113 is connected to a contact 230 via the first metal-silicon compound 172. The contact 230 is formed from a barrier metal layer 189 and metal layers 194 and 199. The contact 230 is further connected to a power source wire 225. The power source wire 225 is composed of a barrier metal layer 216, a metal layer 217 and a barrier metal layer 218.
The second n+ type silicon layer 157 is connected to a contact 229 via the second metal-silicon compound 171. The contact 229 is composed of a barrier metal layer 188 and metal layers 193 and 198. The contact 229 is further connected to an output wire 223. The output wire 223 is composed of a barrier metal layer 213, a metal layer 214 and a barrier metal layer 215.
The first gate electrode 236 is connected to a contact 228 via the third metal-silicon compound 170 and the second gate electrode 235 is connected to the contact 228 via the fifth metal-silicon compound 170. The contact 228 is composed of a barrier metal layer 187 and metal layers 192 and 197. The contact 228 is further connected to an input wire 224. The input wire 224 is composed of a barrier metal layer 213, a metal layer 214 and a barrier metal layer 215.
The first p+ type silicon layer 119 is connected to a contact 226 via the fourth metal-silicon compound 168. The contact 226 is formed from a barrier metal layer 185 and metal layers 190 and 195. The contact 226 is further connected to a power source wire 222. The power source wire 222 is composed of a barrier metal layer 207, a metal layer 208 and a barrier metal layer 209.
The second p+ type silicon layer 159 is connected to a contact 227 via the sixth metal-silicon compound 169. The contact 227 is composed of a barrier metal layer 186 and metal layers 191 and 196. The contact 227 is further connected to an output wire 223. The output wire 223 is composed of a barrier metal layer 213, a metal layer 214 and a barrier metal layer 215.
Through the above, an inverter circuit is composed from the pMOS SGT 219 and the nMOS SGT 220.
Through this composition, lower resistance and downsizing of the semiconductor device are realized in the inverter circuit according to the present embodiment, and in addition, the parasitic capacitance between interlayer wires is reduced. Through this, it is possible to avoid slowing of operating speeds accompanying SGT downsizing.
Through this composition, lower resistance and downsizing of the semiconductor device are realized in the inverter circuit according to the present embodiment, and in addition, the parasitic capacitance between interlayer wires is reduced. Through this, it is possible to avoid slowing of operating speeds accompanying SGT downsizing.
In this embodiment, the first gate insulating film 140 and the first metal film 138 are preferably materials that make the nMOS SGT 220 enhancement-type, and the second gate insulating film 139 and the second metal film 137 are preferably materials that make the pMOS SGT 219 enhancement-type. The penetrating current that flows during operation of this inverter composed of the nMOS SGT 220 and the pMOS SGT 219 can thus be reduced.
In addition, in the nMOS SGT according to this embodiment, the thickness of the second insulating film 162 is preferably thicker than the sum of the thickness of the first gate insulating film 140 and the thickness of the first metal film 138. In this case, the first gate insulating film 140 and the first metal film 138 are covered by the first columnar silicon layer 232, the first polysilicon films 136 and 152, the first insulating film 129 and the second insulating film 162.
When the above-described composition is employed, the first metal film 138 is protected in its entirety and thus is not etched by a sulfuric acid hydrogen peroxide mixture or an ammonia hydrogen peroxide mixture when the metal-semiconductor compound is formed.
In addition, in the pMOS SGT according to this embodiment, the thickness of the second insulating film 161 is preferably thicker than the sum of the thickness of the second gate insulating film 139 and the thickness of the second metal film 137. In this case, the second gate insulating film 139 and the second metal film 137 are covered by the second columnar silicon layer 231, the second polysilicon films 135 and 151, the fourth insulating film 129 and the fifth insulating film 161.
When the above-described composition is employed, the second metal film 137 is protected in its entirety and thus is not etched by a sulfuric acid hydrogen peroxide mixture or an ammonia hydrogen peroxide mixture when the metal-semiconductor compound is formed.
In addition, in the nMOS SGT according to this embodiment, the length from the center of the first columnar silicon layer 232 to the end of the first planar silicon layer 234 is preferably larger than the sum of the length from the center to the sidewall of the first columnar silicon layer 232, the thickness of the first gate insulating film 140, the thickness of the first gate electrode 236 and the thickness of the third insulating film 164.
When the above-described composition is employed, the first metal-silicon compound 172 can be formed on the n+ type silicon layer 113 without adding any special manufacturing processes.
In addition, in the pMOS SGT according to this embodiment, the length from the center of the second columnar silicon layer 231 to the end of the second planar silicon layer 233 is preferably larger than the sum of the length from the center to the sidewall of the second columnar silicon layer 231, the thickness of the second gate insulating film 139, the thickness of the first gate electrode 235 and the thickness of the sixth insulating film 164.
When the above-described composition is employed, the fourth metal-silicon compound 168 can be formed on the p+ type silicon layer 119 without adding any special manufacturing processes.
Next, one example of the manufacturing method for forming an inverter provided with SGTs according to the embodiments of the present invention will be described with reference to
First, as shown in
Next, resists 104 and 105 for forming a hard mask for a columnar silicon layer are formed on the nitride film 103, as shown in
Next, the nitride film 103 is etched and hard masks 106 and 107 are formed, as shown in
Next, the silicon layer 102 is etched and columnar silicon layers 231 and 232 are formed, as shown in
Next, the resists 104 and 105 are removed. Conditions on the substrate following removal are shown in
The surface of the silicon layer 102 is oxidized and a sacrificial oxide film 108 is formed, as shown in
The sacrificial oxide film 108 is removed through etching to form the shape shown in
An oxide film 109 is formed on the surface of the silicon layer 102 and the hard masks 106 and 107, as shown in
The oxide film 109 is etched and left in sidewall shape on the sidewall of the columnar silicon layers 231 and 232 to form sidewalls 110 and 111, as shown in
A resist 112 for injecting dopants into the bottom of the columnar silicon layer 232 is formed surrounding the columnar silicon layer 231, as shown in
As indicated by the arrows in
The resist 112 is removed. Conditions on the substrate following removal are shown in
The sidewalls 110 and 111 are removed through etching. Conditions on the substrate following etching are shown in
Annealing is accomplished and the injected dopants, here arsenic, are activated. Through this, the injected dopants are scattered to the bottom of the columnar silicon layer 232, as shown in
An oxide film 115 is formed on the silicon layer 102, the hard masks 106 and 107 and the n+ type silicon layer 113, as shown in
The oxide film 115 is etched, leaving behind a sidewall shape in the sidewall of the columnar silicon layers 231 and 232 to form sidewalls 116 and 117, as shown in
A resist 118 is formed surrounding the columnar silicon layer 231 in order to inject dopants into the bottom of the columnar silicon layer 232, as shown in
As indicated by the arrows in
The resist 118 is removed. Conditions on the substrate following removal are shown in
The sidewalls 116 and 117 are removed through etching. Conditions on the substrate following etching are shown in
Annealing is accomplished and the injected dopant, here boron, is activated. Through this, the injected dopant is scattered to the bottom of the columnar silicon layer 231, as shown in
An oxide film 121 is formed on the surface of the hard masks 106 and 107, the n+ type silicon layer 113 and the p+ type silicon layer 119, as shown in
Resists 122 and 123 for forming a planar silicon layer are formed. The resists 122 and 123 are formed so as to cover the second silicon layer 120 and the area surrounding the bottom thereof, and the first silicon layer 114 and the area surrounding the bottom thereof, respectively, as shown in
The oxide film 121 is etched and partitioned into oxide films 124 and 125, as shown in
Portions of the p+ type silicon layer 119 and of the n+ type silicon layer 113 are etched to form planar silicon layers 233 and 234, as shown in
The resists 122 and 123 are removed. Conditions on the substrate following removal are shown in
An oxide film 123 is formed on the surface of the resists 122 and 123 and the planar silicon layers 233 and 244, as shown in
CMP (Chemical Mechanical Polishing) is accomplished, the oxide film 126 is planarized and the hard masks 106 and 107 are exposed, as shown in
The oxide films 126, 124 and 125 are etched to form an oxide film 126 buried between the planar silicon layers 119 and 133, as shown in
An oxide film 128 is formed on the result of the above processes. At this time, the oxide film 128 is formed thickly on the n+ type silicon layer 113, the p+ type silicon layer 119, the oxide film 126 and the hard masks 106 and 107, and the oxide film 128 is formed thinly on the sidewalls of the columnar silicon layers 231 and 232, as shown in
The oxide film 128 formed on the sidewalls of the columnar silicon layers 231 and 232 is removed through etching. The etching is preferably isotropic etching. The oxide film 128 is formed thickly on the n+ type silicon layer 113, the p+ type silicon layer 119, the oxide film 126 and the hard masks 106 and 107 and the oxide film 128 is formed thinly on the sidewalls of the columnar silicon layers 213 and 232, and consequently, the oxide film 128 remains on the n+ type silicon layer 113, the p+ type silicon layer 119 and the oxide film 126, forming an insulating film 129, as shown in
By means of the insulating film 129, it is possible to reduce the parasitic capacitance between the gate electrode and the planar silicon layer.
A gate insulating film 132 is formed so as to cover at least the first silicon layer 114 and the surface of the surroundings of the bottom thereof and the second silicon layer 120 and the surface of the surroundings of the bottom thereof, as shown in
A metal film 133 is formed on the surface of the gate insulating film 132, as shown in
A polysilicon film 134 is formed on the surface of the metal film 133, as shown in
The polysilicon film 134 is etched to form polysilicon films 135 and 136 remaining in sidewall shape, as shown in
The metal film 133 is etched. The metal film on the sidewalls of the columnar silicon layers 231 and 232 is protected by the polysilicon films 135 and 136 and thus is not etched, and becomes the metal films 137 and 138 remaining in sidewall shape, as shown in
The gate insulating film 132 is etched. The gate insulating film on the sidewalls of the columnar silicon layers 231 and 232 is protected by the polysilicon films 135 and 136 and thus is not etched, and becomes the gate insulating film 140 remaining in sidewall shape, as shown in
A polysilicon film 141 is formed on the surface where circuits are formed, as shown in
When a high-k film is used in the gate insulating films 134 and 140, this high-k film can be the source of metal contamination.
Through this polysilicon film 141, the gate insulating film 139 and the metal film 137 are covered by the columnar silicon layer 231, the polysilicon films 135 and 141, the insulating film 129 and the hard mask 106.
In addition, the gate insulating film 140 and the metal film 138 are covered by the columnar silicon layer 232, the polysilicon films 136 and 141, the insulating film 129 and the hard mask 107.
That is to say, the gate insulating films 139 and 140 and the metal films 137 and 138, which are all sources of contamination, are covered by the columnar silicon layers 231 and 232, the polysilicon layers 135, 136 and 141, the insulating film 129 and the hard masks 106 and 107, so it is possible to control metal contamination by metal contained in the gate insulating films 139 and 140 and the metal films 137 and 138.
In order to achieve the aforementioned objectives, it would be fine to form a structure in which the metal film is thickly formed, etching is accomplished to leave a sidewall shape and the gate insulating film is etched, following which a polysilicon film is formed and the gate insulating film and the metal film are covered by the columnar silicon layer, the polysilicon layer, the insulating film and the hard mask.
A polysilicon film 142 is formed on the surface where the circuits are formed, as shown in
CMP (chemical mechanical polishing) is accomplished with the oxide films 130 and 131 and polishing steppers, as shown in
The oxide films 130 and 131 are removed through etching. Conditions on the substrate following etching are shown in
The polysilicon film 142 is etched and the polysilicon film 142 is removed to the top edge of the region where the gate electrode and the gate insulating films 139 and 140 are to be formed, as shown in
The metal films 137 and 138 on the upper sidewalls of the columnar silicon layers 231 and 232 are removed through etching. Conditions on the substrate following etching are shown in
The gate insulating films 139 and 140 on the upper sidewalls of the columnar silicon layers 231 and 232 are removed through etching. Conditions on the substrate following etching are shown in
An oxide film 144 is formed on the surface where the circuits are formed, as shown in
A nitride film 145 is formed on the surface of the oxide film 144, as shown in
The nitride film 145 and the oxide film 144 are etched to form the oxide films 148 and 149 and the nitride films 146 and 147 remaining in a sidewall shape, as shown in
The sum of the film thicknesses of the oxide film 148 and the nitride film 146 remaining in sidewall shape is the film thickness of the gate electrode 235 later, and the film thickness of the oxide film 149 and the nitride film 147 remaining in sidewall shape is the film thickness of the gate electrode 236 later, so by adjusting the film formation thicknesses and etching conditions of the oxide film 144 and the nitride film 145, it is possible to form a gate electrode of the desired film thickness.
In addition, it is preferable for the sum of the radius of the columnar silicon layer 231 and the sum of the film thicknesses of the oxide film 148 and the nitride film 146 remaining in sidewall shape to be greater than the radius of the outer circumference of the cylinder composed by the gate insulating film 139 and the metal film 137, and for the sum of the radius of the columnar silicon layer 232 and the sum of the film thicknesses of the oxide film 149 and the nitride film 147 remaining in sidewall shape to be larger than the diameter of the outer circumference of the cylinder composed by the gate insulating film 140 and the metal film 138. At this time, because the metal films 137 and 138 are covered by the polysilicon film after gate etching, it is possible to control metal contamination.
A resist 150 for forming a gate wire 221 is formed on the polysilicon layer 142 at least between the first silicon layer 114 and the second silicon layer 120, as shown in
The polysilicon films 142, 141, 135 and 136 are etched to form gate electrodes 235 and 236 and the gate wire 221, as shown in
The gate electrode 235 is composed of the metal film 137 and the polysilicon films 135 and 151, and the gate electrode 236 is composed of the metal film 138 and the polysilicon films 136 and 152.
The gate wire 221 connecting the gate electrodes 235 and 236 is composed of the polysilicon films 135, 151, 142, 152 and 136.
The insulating film 129 is etched and the surfaces of the p+ type silicon layer 119 and the n+ type silicon layer 113 are exposed, as shown in
The resist 150 is removed. Conditions on the substrate following removal are shown in
Oxidation is accomplished to form oxide films 153, 154 and 155, as shown in
The hard masks 106 and 107 and the nitride films 146 and 147 are removed by etching through a wet treatment or dry treatment. Conditions on the substrate following etching are shown in
The oxide films 148, 149, 153, 154 and 155 are removed by etching. Conditions on the substrate following etching are shown in
A resist 156 for forming an n+ type silicon layer on the columnar silicon layer 232 through dopant injection is formed surrounding the columnar silicon layer 231, as shown in
As indicated by the arrows in
The resist 156 is removed. Conditions on the substrate following removal are shown in
Heat treatment is accomplished and the arsenic is activated. Conditions on the substrate following activation is shown in
A resist 158 for forming a p+ type silicon layer on the upper part of the columnar silicon layer 231 through dopant injection is formed surrounding the columnar silicon layer 232, as shown by
As indicated by
The resist 158 is removed. Conditions on the substrate following removal are shown in
Heat treatment is accomplished and the boron is activated. Conditions on the substrate following activation is shown in
A nitride film 160 is formed on the surface where the circuits are formed, as shown in
The nitride film 160 is etched to form an insulating film 161 composed of nitride film formed in a sidewall shape on the upper sidewall of the columnar silicon layer 231 and the upper part of the gate electrode 235, an insulating film 162 composed of a nitride film formed in a sidewall shape on the upper sidewall of the columnar silicon layer 232 and the upper part of the gate electrode 236, an insulating film 164 composed of a nitride film formed in a sidewall shape on the sidewalls of the insulating film 129 and the gate electrodes 235 and 236, an insulating film 163 composed of a nitride film formed in a sidewall shape on the sidewall of the p+ type silicon layer 119 and an insulating film 165 composed of a nitride film formed in a sidewall shape on the sidewall of the n+ type silicon layer 113, as shown in
By making the thicknesses of the insulating films 161 and 162 formed in a sidewall shape on the upper sidewalls of the columnar semiconductor layers and the upper parts of the gate electrodes thicker than the sum of the thicknesses of the gate insulating films 139 and 140 and the thicknesses of the metal films 137 and 138, the gate insulating film 140 and the metal film 138 are covered by the columnar silicon layer 232, the polysilicon layers 136 and 152, the insulating film 129 and the insulating film 162, and in addition, the gate insulating film 129 and the metal film 137 are covered by the columnar silicon layer 231, the polysilicon layers 135 and 151, the insulating film 129 and the insulating film 161.
A resist 166 for forming a deep n+ type silicon layer in the direction orthogonal to the substrate on the upper part of the columnar silicon layer 232 through dopant injection is formed surrounding the columnar silicon layer 231, as shown in
As shown in
The resist 166 is removed. Conditions on the substrate following removal are shown in
A resist 167 for forming a deep p+ type silicon layer in the direction orthogonal to the substrate on the upper part of the columnar silicon layer 231 through dopant injection is formed surrounding the columnar silicon layer 232, as shown in
As shown in
The resist 167 is removed. Conditions on the substrate following removal are shown in
Heat treatment is accomplished in order to activate the dopant. Conditions following activation are shown in
By sputtering a metal such as Ni or Co and adding heat treatment, a metal-silicon compound is formed on the surface of the p+ type silicon layer 119, the p+ type silicon layer 159, the gate electrode 235, the n+ type silicon layer 113, the n+ type silicon layer 157 and the gate electrode 236, and by removing the unreacted metal film using a sulfuric acid hydrogen peroxide mixture or an ammonia hydrogen peroxide mixture, a metal-silicon compound 168 is formed on the surface of the p+ type silicon layer 119, a metal-silicon compound 169 is formed on the surface of the p+ type silicon layer 159, a metal-silicon compound 170 is formed on the surface of the gate electrode 235, the gate wire 221 and the gate electrode 236, a metal-silicon compound 172 is formed on the surface of the n+ type silicon layer 113, and a metal-silicon compound 171 is formed on the surface of the n+ type silicon layer 157.
The gate insulating film 140 and the metal film 138 are covered by the columnar silicon layer 232, the polysilicon films 136 and 152, the insulating film 129 and the insulating film 162, and in addition, the gate insulating film 139 and the metal film 137 are covered by the columnar silicon layer 231, the polysilicon films 135 and 151, the insulating film 129 and the insulating film 161, so the metal films 137 and 138 are not etched by the sulfuric acid hydrogen peroxide mixture or ammonia hydrogen peroxide mixture.
In other words, by using the structure of the present invention, it is possible to use metal in the gate electrode, it is possible to control depletion of the channel region, it is possible to lower the resistance of the gate electrode and it is possible to lower the resistance of the gate, source and drain through a metal-silicon compound.
Normally, the natural oxide film on the surface of the silicon layer is removed by hydrofluoric acid as a pre-treatment prior to sputtering the metal such as Ni or Co. At this time, the insulating film 129 composed of an oxide film is protected from the hydrofluoric acid by the insulating film 164 composed of a nitride film formed in a sidewall shape on the sidewall.
A contact stopper 173 of nitride film is formed, an interlayer insulating film 174 is deposited and planarization is undertaken, as shown in
A resist 175 for forming contact holes is formed above the columnar silicon layers 231 and 232, as shown in
The interlayer insulating film 174 is etched to form contact holes 176 and 177 above the columnar silicon layer 232, as shown in
The resist 175 is removed. Conditions on the substrate following removal are shown in
A resist 178 for forming contact holes above the planar silicon layers 233 and 234 and above the gate wire 221 is formed, as shown in
The interlayer insulating film 174 is etched to form contact holes 179, 180 and 181 above the planar silicon layers 233 and 234 and above the gate wire 221, respectively, as shown in
Because the contact holes 176 and 177 above the columnar silicon 231 and 232 and the contact holes 179, 180 and 181 above the planar silicon layers 233 and 234 and above the gate wire 221 are formed through different processes, the etching conditions for forming the contact holes 176 and 177 above the columnar silicon 231 and 232 and the etching conditions for forming the contact holes 179, 180 and 181 above the planar silicon layers 233 and 234 and above the gate wire 221 can each be optimized.
The resist 178 is removed. Conditions on the substrate following removal are shown in
A contact stopper 173 is etched below the contact holes 179, 176, 180, 177 and 181. Conditions on the substrate following etching are shown in
After a barrier metal layer 182 is deposited on the surface where the circuits are formed, a metal 183 is deposited on the top thereof, as shown in
A metal 184 is deposited to bury the gap, as shown in
The metals 184 and 183 and the barrier metal layer 182 are planarized and etched to form contacts 226, 227, 228, 229 and 230, as shown in
A barrier metal layer 200, a metal layer 201 and a barrier metal layer 202 are deposited in this order on the planarized surface, as shown in
Resists 203, 204, 205 and 206 for forming a power source wire, an input wire and an output wire are formed, as shown in
The barrier metal layer 202, the metal 201 and the barrier metal layer 200 are etched to form power source wires 222 and 225, an input wire 224 and an output wire 223, as shown in
The resists 203, 204, 205 and 206 are removed. Conditions on the substrate following removal are shown in
With the above production method, it is possible to produce a semiconductor device with a small parasitic capacitance between the gate electrode and the planar silicon layers because of the first and fourth insulating films.
Having described and illustrated the principles of this application by reference to one (or more) preferred embodiment(s), it should be apparent that the preferred embodiment(s) may be modified in arrangement and detail without departing from the principles disclosed herein and that it is intended that the application be construed as including all such modifications and variations insofar as they come within the spirit and scope of the subject matter disclosed herein.
| Number | Date | Country | Kind |
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Pursuant to 35 U.S.C. §119(e), this application claims the benefit of the filing date of Provisional U.S. Patent Application Ser. No. 61/354,866 filed on Jun. 15, 2010. This application also claims priority under 35 U.S.C. §119(a) to JP2010-136470 filed on Jun. 15, 2010. The entire contents of these applications are hereby incorporated by reference.
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| Number | Date | Country | |
|---|---|---|---|
| 20110303973 A1 | Dec 2011 | US |
| Number | Date | Country | |
|---|---|---|---|
| 61354866 | Jun 2010 | US |
