Claims
- 1. A method for monitoring a vapor drying process during semiconductor fabrication comprising:providing a vapor monitor in a vapor dryer chamber; measuring vapor concentration at a selected level of the vapor dryer chamber; recording the vapor concentration measurement; and controlling the vapor drying process using the vapor concentration measurement.
- 2. The method of claim 1 wherein measuring vapor concentration further comprises measuring an isopropyl alcohol vapor concentration within the vapor dryer chamber.
- 3. The method of claim 1 further comprising:initiating the vapor dryer chamber; placing at least one substrate wafer in the vapor dryer chamber; determining whether the vapor drying process reaches an end point; and removing the at least one substrate wafer when an end point has been reached.
- 4. The method of claim 1 further comprising:initiating the vapor dryer chamber; determining an initial steady state point using the vapor concentration measurement; and placing at least one substrate wafer in the vapor dryer chamber after the initial steady state point.
- 5. The method of claim 1 wherein controlling the process further comprises:determining whether the vapor drying process experiences a process excursion; and flagging the vapor concentration measurement that represents the process excursion.
- 6. The method of claim 1 wherein the selected level comprises a vapor cloud steady state blanket level.
- 7. The method of claim 1 wherein controlling the process further comprises:detecting a process excursion; and extending the vapor drying process for a set period of time.
- 8. The method of claim 1 wherein controlling the process further comprises:detecting a process excursion; and extending the vapor drying process until the process excursion has passed.
Parent Case Info
This is a divisional application of Ser. No. 09/737,632, now U.S. Pat. No. 6,497,055, filed Dec. 14, 2000, which claims priority under 35 USC 119(e)(1) of provisional application Ser. No. 60/174,321, filed Jan. 4, 2000.
US Referenced Citations (14)
Provisional Applications (1)
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Number |
Date |
Country |
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60/174321 |
Jan 2000 |
US |